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Total properties:
64
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Patent #:
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Issue Dt:
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03/22/1994
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Application #:
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07940958
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Filing Dt:
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10/29/1992
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Title:
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ILLUMINATION DEVICE
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Patent #:
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Issue Dt:
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02/27/1996
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Application #:
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08211973
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Filing Dt:
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06/17/1994
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Title:
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ILLUMINATION DEVICE USING A PULSED LASER SOURCE A SCHLIEREN OPTICAL SYSTEM, AND A MATRIX ADDRESSABLE SURFACE LIGHT MODULATOR FOR PRODUCING IMAGES WITH UNDIFFRACTED LIGHT
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Patent #:
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Issue Dt:
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01/23/1996
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Application #:
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08232005
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Filing Dt:
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07/19/1994
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Title:
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ILLUMINATION DEVICE USING A PULSED LASER SOURCE A SCHLIEREN OPTICAL SYSTEM AND A MATRIX ADDRESSABLES SURFACE LIGHT MODULATOR FOR PRODUCING IMAGED WITH UNDIFRACTED LIGHT
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08973805
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Filing Dt:
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01/29/1998
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Title:
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METHOD AND DEVICE FOR PRODUCING FEATURES ON A PHOTOLITHOGRAPHIC LAYER
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09623194
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Filing Dt:
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08/29/2000
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Title:
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METHOD FOR PATTERN GENERATION WITH IMPROVED IMAGE QUALITY
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Patent #:
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Issue Dt:
|
06/08/2004
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Application #:
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09623195
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Filing Dt:
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08/29/2000
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Title:
|
PATTERN GENERATOR
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Patent #:
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Issue Dt:
|
06/04/2002
|
Application #:
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09623200
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Filing Dt:
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08/29/2000
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Title:
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PATTERN GENERATOR WITH IMPROVED PRECISION
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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09623270
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Filing Dt:
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08/31/2000
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Title:
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PATTERN GENERATOR USING EUV
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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09623308
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Filing Dt:
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08/31/2000
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Title:
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PATTERN GENERATOR WITH IMPROVED ADDRESS RESOLUTION
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Patent #:
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Issue Dt:
|
09/04/2001
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Application #:
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09623310
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Filing Dt:
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08/31/2000
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Title:
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Pattern generator for avoiding stitching errors
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Patent #:
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Issue Dt:
|
01/07/2003
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Application #:
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09623311
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Filing Dt:
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08/31/2000
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Title:
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MODULATOR DESIGN FOR PATTERN GENERATOR
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Patent #:
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Issue Dt:
|
11/11/2003
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Application #:
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09664288
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Filing Dt:
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09/18/2000
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Title:
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DUAL LAYER RETICLE BLANK AND MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09765084
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Filing Dt:
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01/18/2001
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Publication #:
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Pub Dt:
|
08/08/2002
| | | | |
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Title:
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METHOD AND APPARATUS FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
|
11/09/2004
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Application #:
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09824670
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Filing Dt:
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04/04/2001
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Publication #:
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Pub Dt:
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02/28/2002
| | | | |
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Title:
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PATTERN GENERATOR
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Patent #:
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Issue Dt:
|
09/23/2003
|
Application #:
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09869922
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Filing Dt:
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11/02/2001
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Title:
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LASER WRITER
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Patent #:
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Issue Dt:
|
11/27/2007
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Application #:
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09954721
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Filing Dt:
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09/12/2001
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Publication #:
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Pub Dt:
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08/28/2003
| | | | |
|
Title:
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GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY
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Patent #:
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Issue Dt:
|
08/12/2003
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Application #:
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09992653
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Filing Dt:
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11/16/2001
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Publication #:
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Pub Dt:
|
09/12/2002
| | | | |
|
Title:
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RETICLE AND DIRECT LITHOGRAPHY WRITING STRATEGY
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09995526
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Filing Dt:
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11/28/2001
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Publication #:
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Pub Dt:
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05/29/2003
| | | | |
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Title:
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DEFECTIVE PIXEL COMPENSATION METHOD
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Patent #:
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Issue Dt:
|
04/06/2004
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Application #:
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10049286
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Filing Dt:
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02/11/2002
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Title:
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DATA PATH FOR HIGH PERFORMANCE PATTERN GENERATOR
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10129364
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Filing Dt:
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05/03/2002
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Title:
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METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR
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Patent #:
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Issue Dt:
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03/02/2004
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Application #:
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10130070
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Filing Dt:
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05/15/2002
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Publication #:
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Pub Dt:
|
10/24/2002
| | | | |
|
Title:
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PATTERN GENERATION SYSTEM USING A SPATIAL LIGHT MODULATOR
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Patent #:
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Issue Dt:
|
11/16/2004
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Application #:
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10238177
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Filing Dt:
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09/10/2002
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Publication #:
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Pub Dt:
|
04/17/2003
| | | | |
|
Title:
|
HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE
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Patent #:
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Issue Dt:
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11/15/2005
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Application #:
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10238220
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Filing Dt:
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09/10/2002
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Publication #:
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Pub Dt:
|
05/01/2003
| | | | |
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Title:
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Method and apparatus of calibrating multi-position SLM elements
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10308917
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Filing Dt:
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12/03/2002
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Publication #:
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Pub Dt:
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07/03/2003
| | | | |
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Title:
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HOMOGENIZER
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10310637
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Filing Dt:
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12/04/2002
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Publication #:
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Pub Dt:
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07/10/2003
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Title:
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ALIGNMENT SENSOR
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10335981
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Filing Dt:
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01/02/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Title:
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HIGH ENERGY, LOW ENERGY DENSITY, RADIATION-RESISTANT OPTICS USED WITH MICRO-ELECTROMECHANICAL DEVICES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10410874
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Filing Dt:
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04/10/2003
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Publication #:
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Pub Dt:
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12/18/2003
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Title:
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Methods and systems for process control of corner feature embellishment
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Patent #:
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Issue Dt:
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01/17/2006
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10449661
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05/30/2003
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Publication #:
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Pub Dt:
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10/30/2003
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Title:
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PATTERN GENERATOR MIRROR CONFIGURATIONS
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Patent #:
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Issue Dt:
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12/21/2004
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10460765
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Filing Dt:
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06/12/2003
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Publication #:
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Pub Dt:
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12/16/2004
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Title:
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METHOD FOR HIGH PRECISION PRINTING OF PATTERNS
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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10462010
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06/12/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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METHODS AND SYSTEMS FOR IMPROVED BOUNDARY CONTRAST
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Patent #:
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04/26/2005
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10467184
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08/05/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Title:
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METHOD AND A DEVICE FOR REDUCING HYSTERESIS OR IMPRINTING IN A MOVABLE MICRO-ELEMENT
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Patent #:
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06/13/2006
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10488353
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09/01/2004
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Publication #:
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Pub Dt:
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01/06/2005
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Title:
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BONDING METHOD
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Patent #:
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Issue Dt:
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04/29/2008
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10498590
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06/10/2004
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04/21/2005
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Title:
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METHOD AND APPARATUS FOR IMAGE FORMATION
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Patent #:
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07/29/2008
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10498713
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06/14/2004
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Pub Dt:
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04/21/2005
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Title:
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METHOD AND APPARATUS FOR PATTERNING A WORKPIECE
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Patent #:
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05/08/2007
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10505564
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08/24/2004
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08/04/2005
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Title:
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IMAGE FORMING METHOD AND APPARATUS
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07/11/2006
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10507554
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09/14/2004
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06/09/2005
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Title:
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ADDRESSING METHOD OF MOVABLE ELEMENTS IN A SPATIAL LIGHT MODULATOR (SLM)
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01/23/2007
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10508463
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07/14/2005
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03/16/2006
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Title:
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METHOD AND APPARATUS FOR PRINTING LARGE DATA FLOWS
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NONE
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10510059
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05/31/2005
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10/06/2005
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Title:
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Mask blank and a method for producing the same
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Issue Dt:
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03/06/2007
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10634152
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08/04/2003
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02/10/2005
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Title:
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METHOD TO PATTERN A SUBSTRATE
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11/02/2004
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10657526
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09/08/2003
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Pub Dt:
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03/11/2004
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Title:
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DEFECTIVE PIXEL COMPENSATION METHOD
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Patent #:
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11/02/2004
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10657526
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09/08/2003
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Publication #:
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03/11/2004
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Title:
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DEFECTIVE PIXEL COMPENSATION METHOD
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05/06/2008
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10679701
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10/03/2003
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04/07/2005
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Title:
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METHOD AND DEVICE FOR IMMERSION LITHOGRAPHY
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12/26/2006
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10704957
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11/10/2003
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Pub Dt:
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11/18/2004
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Title:
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DUAL LAYER WORKPIECE MASKING AND MANUFACTURING PROCESS
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06/13/2006
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10757351
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01/14/2004
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10/21/2004
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Title:
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METHOD TO DETECT A DEFECTIVE ELEMENT
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03/07/2006
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10776192
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02/12/2004
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Pub Dt:
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08/26/2004
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Title:
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PATTERN GENERATOR
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Patent #:
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Issue Dt:
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09/15/2009
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10782863
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02/23/2004
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Pub Dt:
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08/19/2004
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Title:
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DATA PATH FOR HIGH PERFORMANCE PATTERN GENERATOR
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Patent #:
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10/28/2008
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10827530
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04/20/2004
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12/30/2004
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Title:
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METHOD FOR ERROR REDUCTION IN LITHOGRAPHY
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07/04/2006
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10829679
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04/22/2004
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Pub Dt:
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10/27/2005
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Title:
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ADDRESSING OF AN SLM
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08/12/2008
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10911218
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08/04/2004
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03/10/2005
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PSM ALIGNMENT METHOD AND DEVICE
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12/19/2006
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10911412
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08/04/2004
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03/10/2005
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Title:
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FURTHER METHOD TO PATTERN A SUBSTRATE
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05/01/2007
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10953560
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09/30/2004
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03/03/2005
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METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR
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Patent #:
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NONE
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10976548
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10/29/2004
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05/05/2005
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Title:
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Device for protecting a chip and method for operating a chip
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10/18/2005
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10977394
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10/29/2004
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Pub Dt:
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06/30/2005
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METHOD AND APPARATUS FOR CONTROLLING EXPOSURE OF A SURFACE OF A SUBSTRATE
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02/05/2008
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10987589
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11/12/2004
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08/25/2005
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METHOD AND DEVICE FOR CORRECTING SLM STAMP IMAGE IMPERFECTIONS
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09/19/2006
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11008566
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12/10/2004
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06/16/2005
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METHOD AND APPARATUS FOR PATTERNING A WORKPIECE AND METHODS OF MANUFACTURING THE SAME
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05/06/2008
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11030728
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01/06/2005
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08/11/2005
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METHOD AND DEVICE FOR DATA INTEGRITY CHECKING
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12/02/2008
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11061754
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02/18/2005
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08/24/2006
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Title:
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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NONE
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11061931
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02/22/2005
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06/30/2005
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Method and device for coherence reduction
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11/17/2009
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11066828
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02/25/2005
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Pub Dt:
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10/06/2005
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RET FOR OPTICAL MASKLESS LITHOGRAPHY
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04/25/2006
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11157043
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06/20/2005
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Pub Dt:
|
10/13/2005
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Title:
|
PATTERN GENERATOR MIRROR CONFIGURATIONS
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|
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Patent #:
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Issue Dt:
|
05/13/2008
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Application #:
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11174568
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Filing Dt:
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07/06/2005
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Publication #:
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Pub Dt:
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01/11/2007
| | | | |
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Title:
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HIDDEN HINGE MEMS DEVICE
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|
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Patent #:
|
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Issue Dt:
|
05/06/2008
|
Application #:
|
11188876
|
Filing Dt:
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07/26/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
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Title:
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SLM ADDRESSING METHODS AND APPARATUSES
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|
|
|
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Patent #:
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|
Issue Dt:
|
02/10/2009
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Application #:
|
11206197
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Filing Dt:
|
08/18/2005
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Publication #:
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Pub Dt:
|
02/09/2006
| | | | |
|
Title:
|
PATTERN GENERATION METHODS AND APPARATUSES
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/02/2007
|
Application #:
|
11272925
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Filing Dt:
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11/14/2005
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Publication #:
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Pub Dt:
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04/13/2006
| | | | |
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Title:
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METHODS AND SYSTEMS FOR IMPROVED BOUNDARY CONTRAST
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