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Reel/Frame:	022925/0052			Pages:	9
		Recorded:	07/08/2009
Attorney Dkt #:	0107945.00174
Conveyance:	RELEASE OF PATENT PLEDGE AGREEMENT

Total properties: 42

Patent #:	6428940	Issue Dt:	08/06/2002	Application #:	09623194	Filing Dt:	08/29/2000
Title:	METHOD FOR PATTERN GENERATION WITH IMPROVED IMAGE QUALITY

Patent #:	6747783	Issue Dt:	06/08/2004	Application #:	09623195	Filing Dt:	08/29/2000
Title:	PATTERN GENERATOR

Patent #:	6399261	Issue Dt:	06/04/2002	Application #:	09623200	Filing Dt:	08/29/2000
Title:	PATTERN GENERATOR WITH IMPROVED PRECISION

Patent #:	6687041	Issue Dt:	02/03/2004	Application #:	09623270	Filing Dt:	08/31/2000
Title:	PATTERN GENERATOR USING EUV

Patent #:	6373619	Issue Dt:	04/16/2002	Application #:	09623308	Filing Dt:	08/31/2000
Title:	PATTERN GENERATOR WITH IMPROVED ADDRESS RESOLUTION

Patent #:	6285488	Issue Dt:	09/04/2001	Application #:	09623310	Filing Dt:	08/31/2000
Title:	Pattern generator for avoiding stitching errors

Patent #:	6504644	Issue Dt:	01/07/2003	Application #:	09623311	Filing Dt:	08/31/2000
Title:	MODULATOR DESIGN FOR PATTERN GENERATOR

Patent #:	6645677	Issue Dt:	11/11/2003	Application #:	09664288	Filing Dt:	09/18/2000
Title:	DUAL LAYER RETICLE BLANK AND MANUFACTURING PROCESS

Patent #:	6816302	Issue Dt:	11/09/2004	Application #:	09824670	Filing Dt:	04/04/2001
Publication #:	US20020024714	Pub Dt:	02/28/2002
Title:	PATTERN GENERATOR

Patent #:	6624878	Issue Dt:	09/23/2003	Application #:	09869922	Filing Dt:	11/02/2001
Title:	LASER WRITER

Patent #:	7302111	Issue Dt:	11/27/2007	Application #:	09954721	Filing Dt:	09/12/2001
Publication #:	US20030160980	Pub Dt:	08/28/2003
Title:	GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY

Patent #:	6605816	Issue Dt:	08/12/2003	Application #:	09992653	Filing Dt:	11/16/2001
Publication #:	US20020125443	Pub Dt:	09/12/2002
Title:	RETICLE AND DIRECT LITHOGRAPHY WRITING STRATEGY

Patent #:	6618185	Issue Dt:	09/09/2003	Application #:	09995526	Filing Dt:	11/28/2001
Publication #:	US20030099026	Pub Dt:	05/29/2003
Title:	DEFECTIVE PIXEL COMPENSATION METHOD

Patent #:	6717097	Issue Dt:	04/06/2004	Application #:	10049286	Filing Dt:	02/11/2002
Title:	DATA PATH FOR HIGH PERFORMANCE PATTERN GENERATOR

Patent #:	6813058	Issue Dt:	11/02/2004	Application #:	10129364	Filing Dt:	05/03/2002
Title:	METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR

Patent #:	6700095	Issue Dt:	03/02/2004	Application #:	10130070	Filing Dt:	05/15/2002
Publication #:	US20020153362	Pub Dt:	10/24/2002
Title:	PATTERN GENERATION SYSTEM USING A SPATIAL LIGHT MODULATOR

Patent #:	6819490	Issue Dt:	11/16/2004	Application #:	10238177	Filing Dt:	09/10/2002
Publication #:	US20030071204	Pub Dt:	04/17/2003
Title:	HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE

Patent #:	6965119	Issue Dt:	11/15/2005	Application #:	10238220	Filing Dt:	09/10/2002
Publication #:	US20030081303	Pub Dt:	05/01/2003
Title:	Method and apparatus of calibrating multi-position SLM elements

Patent #:	6903859	Issue Dt:	06/07/2005	Application #:	10308917	Filing Dt:	12/03/2002
Publication #:	US20030123152	Pub Dt:	07/03/2003
Title:	HOMOGENIZER

Patent #:	6950194	Issue Dt:	09/27/2005	Application #:	10310637	Filing Dt:	12/04/2002
Publication #:	US20030128367	Pub Dt:	07/10/2003
Title:	ALIGNMENT SENSOR

Patent #:	NONE	Issue Dt:		Application #:	10410874	Filing Dt:	04/10/2003
Publication #:	US20030233630	Pub Dt:	12/18/2003
Title:	Methods and systems for process control of corner feature embellishment

Patent #:	6987599	Issue Dt:	01/17/2006	Application #:	10449661	Filing Dt:	05/30/2003
Publication #:	US20030202233	Pub Dt:	10/30/2003
Title:	PATTERN GENERATOR MIRROR CONFIGURATIONS

Patent #:	6833854	Issue Dt:	12/21/2004	Application #:	10460765	Filing Dt:	06/12/2003
Publication #:	US20040251430	Pub Dt:	12/16/2004
Title:	METHOD FOR HIGH PRECISION PRINTING OF PATTERNS

Patent #:	7106490	Issue Dt:	09/12/2006	Application #:	10462010	Filing Dt:	06/12/2003
Publication #:	US20040053143	Pub Dt:	03/18/2004
Title:	METHODS AND SYSTEMS FOR IMPROVED BOUNDARY CONTRAST

Patent #:	7060521	Issue Dt:	06/13/2006	Application #:	10488353	Filing Dt:	09/01/2004
Publication #:	US20050002596	Pub Dt:	01/06/2005
Title:	BONDING METHOD

Patent #:	7365829	Issue Dt:	04/29/2008	Application #:	10498590	Filing Dt:	06/10/2004
Publication #:	US20050082496	Pub Dt:	04/21/2005
Title:	METHOD AND APPARATUS FOR IMAGE FORMATION

Patent #:	7405414	Issue Dt:	07/29/2008	Application #:	10498713	Filing Dt:	06/14/2004
Publication #:	US20050084766	Pub Dt:	04/21/2005
Title:	METHOD AND APPARATUS FOR PATTERNING A WORKPIECE

Patent #:	7215409	Issue Dt:	05/08/2007	Application #:	10505564	Filing Dt:	08/24/2004
Publication #:	US20050168851	Pub Dt:	08/04/2005
Title:	IMAGE FORMING METHOD AND APPARATUS

Patent #:	7075693	Issue Dt:	07/11/2006	Application #:	10507554	Filing Dt:	09/14/2004
Publication #:	US20050122558	Pub Dt:	06/09/2005
Title:	ADDRESSING METHOD OF MOVABLE ELEMENTS IN A SPATIAL LIGHT MODULATOR (SLM)

Patent #:	NONE	Issue Dt:		Application #:	10510059	Filing Dt:	05/31/2005
Publication #:	US20050221199	Pub Dt:	10/06/2005
Title:	Mask blank and a method for producing the same

Patent #:	7186486	Issue Dt:	03/06/2007	Application #:	10634152	Filing Dt:	08/04/2003
Publication #:	US20050032002	Pub Dt:	02/10/2005
Title:	METHOD TO PATTERN A SUBSTRATE

Patent #:	6813062	Issue Dt:	11/02/2004	Application #:	10657526	Filing Dt:	09/08/2003
Publication #:	US20040047023	Pub Dt:	03/11/2004
Title:	DEFECTIVE PIXEL COMPENSATION METHOD

Patent #:	7153634	Issue Dt:	12/26/2006	Application #:	10704957	Filing Dt:	11/10/2003
Publication #:	US20040229169	Pub Dt:	11/18/2004
Title:	DUAL LAYER WORKPIECE MASKING AND MANUFACTURING PROCESS

Patent #:	7009753	Issue Dt:	03/07/2006	Application #:	10776192	Filing Dt:	02/12/2004
Publication #:	US20040165170	Pub Dt:	08/26/2004
Title:	PATTERN GENERATOR

Patent #:	7590966	Issue Dt:	09/15/2009	Application #:	10782863	Filing Dt:	02/23/2004
Publication #:	US20040159636	Pub Dt:	08/19/2004
Title:	DATA PATH FOR HIGH PERFORMANCE PATTERN GENERATOR

Patent #:	7444616	Issue Dt:	10/28/2008	Application #:	10827530	Filing Dt:	04/20/2004
Publication #:	US20040268289	Pub Dt:	12/30/2004
Title:	METHOD FOR ERROR REDUCTION IN LITHOGRAPHY

Patent #:	7411651	Issue Dt:	08/12/2008	Application #:	10911218	Filing Dt:	08/04/2004
Publication #:	US20050053273	Pub Dt:	03/10/2005
Title:	PSM ALIGNMENT METHOD AND DEVICE

Patent #:	7150949	Issue Dt:	12/19/2006	Application #:	10911412	Filing Dt:	08/04/2004
Publication #:	US20050053850	Pub Dt:	03/10/2005
Title:	FURTHER METHOD TO PATTERN A SUBSTRATE

Patent #:	7278129	Issue Dt:	10/02/2007	Application #:	10937737	Filing Dt:	09/09/2004
Publication #:	US20060053406	Pub Dt:	03/09/2006
Title:	HEALING ALGORITHM

Patent #:	7211453	Issue Dt:	05/01/2007	Application #:	10953560	Filing Dt:	09/30/2004
Publication #:	US20050047543	Pub Dt:	03/03/2005
Title:	METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR

Patent #:	7328425	Issue Dt:	02/05/2008	Application #:	10987589	Filing Dt:	11/12/2004
Publication #:	US20050186692	Pub Dt:	08/25/2005
Title:	METHOD AND DEVICE FOR CORRECTING SLM STAMP IMAGE IMPERFECTIONS

Patent #:	7110159	Issue Dt:	09/19/2006	Application #:	11008566	Filing Dt:	12/10/2004
Publication #:	US20050128565	Pub Dt:	06/16/2005
Title:	METHOD AND APPARATUS FOR PATTERNING A WORKPIECE AND METHODS OF MANUFACTURING THE SAME

Assignor

ASML NETHERLANDS B.V.

Exec Dt:

07/07/2009

Assignee

MICRONIC LASER SYSTEMS AB (PUBL)

NYTORPSVAGEN 9

TABY, SWEDEN 183 03

Correspondence name and address
	KATHLEEN M. BASTARACHE
	WILMER CUTLER PICKERING HALE & DORR LLP.
	60 STATE STREET
	BOSTON, MA 02109

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