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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:024278/0346   Pages: 9
Recorded: 04/23/2010
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 61
1
Patent #:
6906305
Issue Dt:
06/14/2005
Application #:
10337510
Filing Dt:
01/07/2003
Publication #:
US20030128870
Pub Dt:
07/10/2003
Title:
SYSTEM AND METHOD FOR AERIAL IMAGE SENSING
2
Patent #:
6828542
Issue Dt:
12/07/2004
Application #:
10390806
Filing Dt:
03/18/2003
Publication #:
US20030226951
Pub Dt:
12/11/2003
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
3
Patent #:
6806456
Issue Dt:
10/19/2004
Application #:
10646313
Filing Dt:
08/22/2003
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
4
Patent #:
6807503
Issue Dt:
10/19/2004
Application #:
10677563
Filing Dt:
10/02/2003
Publication #:
US20040098216
Pub Dt:
05/20/2004
Title:
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
5
Patent #:
6803554
Issue Dt:
10/12/2004
Application #:
10703732
Filing Dt:
11/07/2003
Publication #:
US20040119036
Pub Dt:
06/24/2004
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
6
Patent #:
6884984
Issue Dt:
04/26/2005
Application #:
10755809
Filing Dt:
01/12/2004
Publication #:
US20040140418
Pub Dt:
07/22/2004
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
7
Patent #:
6959255
Issue Dt:
10/25/2005
Application #:
10756718
Filing Dt:
01/13/2004
Publication #:
US20040148120
Pub Dt:
07/29/2004
Title:
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
8
Patent #:
6879924
Issue Dt:
04/12/2005
Application #:
10763142
Filing Dt:
01/22/2004
Publication #:
US20040162692
Pub Dt:
08/19/2004
Title:
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
9
Patent #:
6820028
Issue Dt:
11/16/2004
Application #:
10763433
Filing Dt:
01/23/2004
Publication #:
US20040153279
Pub Dt:
08/05/2004
Title:
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
10
Patent #:
7003758
Issue Dt:
02/21/2006
Application #:
10815573
Filing Dt:
04/01/2004
Publication #:
US20050076322
Pub Dt:
04/07/2005
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
11
Patent #:
7171334
Issue Dt:
01/30/2007
Application #:
10858330
Filing Dt:
06/01/2004
Publication #:
US20050288893
Pub Dt:
12/29/2005
Title:
METHOD AND APPARATUS FOR SYNCHRONIZING DATA ACQUISITION OF A MONITORED IC FABRICATION PROCESS
12
Patent #:
6969837
Issue Dt:
11/29/2005
Application #:
10863915
Filing Dt:
06/09/2004
Publication #:
US20040222354
Pub Dt:
11/11/2004
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
13
Patent #:
6969864
Issue Dt:
11/29/2005
Application #:
10873539
Filing Dt:
06/21/2004
Publication #:
US20040232313
Pub Dt:
11/25/2004
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
14
Patent #:
6892156
Issue Dt:
05/10/2005
Application #:
10874093
Filing Dt:
06/22/2004
Publication #:
US20040230396
Pub Dt:
11/18/2004
Title:
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
15
Patent #:
7558419
Issue Dt:
07/07/2009
Application #:
10917060
Filing Dt:
08/12/2004
Title:
SYSTEM AND METHOD FOR DETECTING INTEGRATED CIRCUIT PATTERN DEFECTS
16
Patent #:
7111277
Issue Dt:
09/19/2006
Application #:
10981914
Filing Dt:
11/04/2004
Publication #:
US20050097500
Pub Dt:
05/05/2005
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
17
Patent #:
7114145
Issue Dt:
09/26/2006
Application #:
10989972
Filing Dt:
11/16/2004
Publication #:
US20050091633
Pub Dt:
04/28/2005
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
18
Patent #:
7117477
Issue Dt:
10/03/2006
Application #:
11024121
Filing Dt:
12/28/2004
Publication #:
US20050120327
Pub Dt:
06/02/2005
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
19
Patent #:
7117478
Issue Dt:
10/03/2006
Application #:
11037988
Filing Dt:
01/18/2005
Publication #:
US20050122500
Pub Dt:
06/09/2005
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
20
Patent #:
7233874
Issue Dt:
06/19/2007
Application #:
11041807
Filing Dt:
01/24/2005
Publication #:
US20050125184
Pub Dt:
06/09/2005
Title:
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
21
Patent #:
7120895
Issue Dt:
10/10/2006
Application #:
11084484
Filing Dt:
03/18/2005
Publication #:
US20050166174
Pub Dt:
07/28/2005
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
22
Patent #:
7053355
Issue Dt:
05/30/2006
Application #:
11212308
Filing Dt:
08/25/2005
Publication #:
US20060000964
Pub Dt:
01/05/2006
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
23
Patent #:
7564017
Issue Dt:
07/21/2009
Application #:
11437587
Filing Dt:
05/19/2006
Publication #:
US20060273242
Pub Dt:
12/07/2006
Title:
SYSTEM AND METHOD FOR CHARACTERIZING AERIAL IMAGE QUALITY IN A LITHOGRAPHY SYSTEM
24
Patent #:
7853920
Issue Dt:
12/14/2010
Application #:
11437594
Filing Dt:
05/19/2006
Publication #:
US20060273266
Pub Dt:
12/07/2006
Title:
METHOD FOR DETECTING, SAMPLING, ANALYZING, AND CORRECTING MARGINAL PATTERNS IN INTEGRATED CIRCUIT MANUFACTURING
25
Patent #:
7488933
Issue Dt:
02/10/2009
Application #:
11461929
Filing Dt:
08/02/2006
Publication #:
US20070032896
Pub Dt:
02/08/2007
Title:
METHOD FOR LITHOGRAPHY MODEL CALIBRATION
26
Patent #:
7747978
Issue Dt:
06/29/2010
Application #:
11461994
Filing Dt:
08/02/2006
Publication #:
US20070031745
Pub Dt:
02/08/2007
Title:
SYSTEM AND METHOD FOR CREATING A FOCUS-EXPOSURE MODEL OF A LITHOGRAPHY PROCESS
27
Patent #:
7749666
Issue Dt:
07/06/2010
Application #:
11462022
Filing Dt:
08/02/2006
Publication #:
US20070035712
Pub Dt:
02/15/2007
Title:
SYSTEM AND METHOD FOR MEASURING AND ANALYZING LITHOGRAPHIC PARAMETERS AND DETERMINING OPTIMAL PROCESS CORRECTIONS
28
Patent #:
7695876
Issue Dt:
04/13/2010
Application #:
11466978
Filing Dt:
08/24/2006
Publication #:
US20070050749
Pub Dt:
03/01/2007
Title:
METHOD FOR IDENTIFYING AND USING PROCESS WINDOW SIGNATURE PATTERNS FOR LITHOGRAPHY PROCESS CONTROL
29
Patent #:
7873937
Issue Dt:
01/18/2011
Application #:
11527010
Filing Dt:
09/26/2006
Publication #:
US20070022402
Pub Dt:
01/25/2007
Title:
SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
30
Patent #:
7587704
Issue Dt:
09/08/2009
Application #:
11530402
Filing Dt:
09/08/2006
Publication #:
US20070061772
Pub Dt:
03/15/2007
Title:
SYSTEM AND METHOD FOR MASK VERIFICATION USING AN INDIVIDUAL MASK ERROR MODEL
31
Patent #:
7617477
Issue Dt:
11/10/2009
Application #:
11530409
Filing Dt:
09/08/2006
Publication #:
US20070061773
Pub Dt:
03/15/2007
Title:
METHOD FOR SELECTING AND OPTIMIZING EXPOSURE TOOL USING AN INDIVIDUAL MASK ERROR MODEL
32
Patent #:
7694267
Issue Dt:
04/06/2010
Application #:
11670848
Filing Dt:
02/02/2007
Title:
METHOD FOR PROCESS WINDOW OPTIMIZED OPTICAL PROXIMITY CORRECTION
33
Patent #:
7882480
Issue Dt:
02/01/2011
Application #:
11757805
Filing Dt:
06/04/2007
Publication #:
US20080301620
Pub Dt:
12/04/2008
Title:
SYSTEM AND METHOD FOR MODEL-BASED SUB-RESOLUTION ASSIST FEATURE GENERATION
34
Patent #:
7707538
Issue Dt:
04/27/2010
Application #:
11764128
Filing Dt:
06/15/2007
Publication #:
US20080309897
Pub Dt:
12/18/2008
Title:
MULTIVARIABLE SOLVER FOR OPTICAL PROXIMITY CORRECTION
35
Patent #:
7703069
Issue Dt:
04/20/2010
Application #:
11838582
Filing Dt:
08/14/2007
Title:
THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATION
36
Patent #:
7999920
Issue Dt:
08/16/2011
Application #:
11892407
Filing Dt:
08/22/2007
Publication #:
US20090053628
Pub Dt:
02/26/2009
Title:
METHOD OF PERFORMING MODEL-BASED SCANNER TUNING
37
Patent #:
8572521
Issue Dt:
10/29/2013
Application #:
12270498
Filing Dt:
11/13/2008
Publication #:
US20090125866
Pub Dt:
05/14/2009
Title:
METHOD FOR PERFORMING PATTERN DECOMPOSITION FOR A FULL CHIP DESIGN
38
Patent #:
8200468
Issue Dt:
06/12/2012
Application #:
12315849
Filing Dt:
12/05/2008
Publication #:
US20090157360
Pub Dt:
06/18/2009
Title:
METHODS AND SYSTEM FOR LITHOGRAPHY PROCESS WINDOW SIMULATION
39
Patent #:
8056028
Issue Dt:
11/08/2011
Application #:
12417559
Filing Dt:
04/02/2009
Publication #:
US20090276751
Pub Dt:
11/05/2009
Title:
METHOD OF PERFORMING MASK-WRITER TUNING AND OPTIMIZATION
40
Patent #:
8570485
Issue Dt:
10/29/2013
Application #:
12475071
Filing Dt:
05/29/2009
Publication #:
US20090296055
Pub Dt:
12/03/2009
Title:
LENS HEATING COMPENSATION SYSTEMS AND METHODS
41
Patent #:
8571845
Issue Dt:
10/29/2013
Application #:
12475080
Filing Dt:
05/29/2009
Publication #:
US20100010784
Pub Dt:
01/14/2010
Title:
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
42
Patent #:
8806387
Issue Dt:
08/12/2014
Application #:
12475095
Filing Dt:
05/29/2009
Publication #:
US20090300573
Pub Dt:
12/03/2009
Title:
MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS
43
Patent #:
8340394
Issue Dt:
12/25/2012
Application #:
12509389
Filing Dt:
07/24/2009
Publication #:
US20100021055
Pub Dt:
01/28/2010
Title:
METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING A MODEL BASED COLORING PROCESS FOR GEOMETRY DECOMPOSITION FOR USE IN A MULTIPLE EXPOSURE PROCESS
44
Patent #:
8182969
Issue Dt:
05/22/2012
Application #:
12567514
Filing Dt:
09/25/2009
Publication #:
US20100086863
Pub Dt:
04/08/2010
Title:
LITHOGRAPHIC PROCESSING METHOD, AND DEVICE MANUFACTURED THEREBY
45
Patent #:
9645509
Issue Dt:
05/09/2017
Application #:
12608460
Filing Dt:
10/29/2009
Publication #:
US20100141925
Pub Dt:
06/10/2010
Title:
SCANNER MODEL REPRESENTATION WITH TRANSMISSION CROSS COEFFICIENTS
46
Patent #:
8418088
Issue Dt:
04/09/2013
Application #:
12613221
Filing Dt:
11/05/2009
Publication #:
US20100119961
Pub Dt:
05/13/2010
Title:
METHODS AND SYSTEM FOR LITHOGRAPHY CALIBRATION
47
Patent #:
8694928
Issue Dt:
04/08/2014
Application #:
12613244
Filing Dt:
11/05/2009
Publication #:
US20100122225
Pub Dt:
05/13/2010
Title:
PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION
48
Patent #:
8443307
Issue Dt:
05/14/2013
Application #:
12613285
Filing Dt:
11/05/2009
Publication #:
US20100146475
Pub Dt:
06/10/2010
Title:
METHODS AND SYSTEM FOR MODEL-BASED GENERIC MATCHING AND TUNING
49
Patent #:
8379991
Issue Dt:
02/19/2013
Application #:
12614180
Filing Dt:
11/06/2009
Publication #:
US20100260427
Pub Dt:
10/14/2010
Title:
DELTA TCC FOR FAST SENSITIVITY MODEL COMPUTATION
50
Patent #:
10025198
Issue Dt:
07/17/2018
Application #:
12615004
Filing Dt:
11/09/2009
Publication #:
US20120005637
Pub Dt:
01/05/2012
Title:
SMART SELECTION AND/OR WEIGHTING OF PARAMETERS FOR LITHOGRAPHIC PROCESS SIMULATION
51
Patent #:
8447095
Issue Dt:
05/21/2013
Application #:
12625079
Filing Dt:
11/24/2009
Publication #:
US20100128969
Pub Dt:
05/27/2010
Title:
HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
52
Patent #:
9360766
Issue Dt:
06/07/2016
Application #:
12642436
Filing Dt:
12/18/2009
Publication #:
US20100162197
Pub Dt:
06/24/2010
Title:
METHOD AND SYSTEM FOR LITHOGRAPHY PROCESS-WINDOW-MAXIMIXING OPTICAL PROXIMITY CORRECTION
53
Patent #:
8239786
Issue Dt:
08/07/2012
Application #:
12644790
Filing Dt:
12/22/2009
Publication #:
US20100167184
Pub Dt:
07/01/2010
Title:
LOCAL MULTIVARIABLE SOLVER FOR OPTICAL PROXIMITY CORRECTION IN LITHOGRAPHIC PROCESSING METHOD, AND DEVICE MANUFACTURED THEREBY
54
Patent #:
8057967
Issue Dt:
11/15/2011
Application #:
12660313
Filing Dt:
02/23/2010
Publication #:
US20100151364
Pub Dt:
06/17/2010
Title:
PROCESS WINDOW SIGNATURE PATTERNS FOR LITHOGRAPHY PROCESS CONTROL
55
Patent #:
8732625
Issue Dt:
05/20/2014
Application #:
12663121
Filing Dt:
12/04/2009
Publication #:
US20100203430
Pub Dt:
08/12/2010
Title:
METHODS FOR PERFORMING MODEL-BASED LITHOGRAPHY GUIDED LAYOUT DESIGN
56
Patent #:
8413081
Issue Dt:
04/02/2013
Application #:
12709373
Filing Dt:
02/19/2010
Publication #:
US20100180251
Pub Dt:
07/15/2010
Title:
METHOD FOR PROCESS WINDOW OPTIMIZED OPTICAL PROXIMITY CORRECTION
57
Patent #:
8291352
Issue Dt:
10/16/2012
Application #:
12721331
Filing Dt:
03/10/2010
Publication #:
US20100161093
Pub Dt:
06/24/2010
Title:
MULTIVARIABLE SOLVER FOR OPTICAL PROXIMITY CORRECTION
58
Patent #:
8352885
Issue Dt:
01/08/2013
Application #:
12721343
Filing Dt:
03/10/2010
Publication #:
US20100162199
Pub Dt:
06/24/2010
Title:
THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATION
59
Patent #:
8542340
Issue Dt:
09/24/2013
Application #:
13003294
Filing Dt:
01/07/2011
PCT #:
US0949792
Title:
ILLUMINATION OPTIMIZATION
60
Patent #:
8930172
Issue Dt:
01/06/2015
Application #:
13128630
Filing Dt:
05/10/2011
Publication #:
US20110224956
Pub Dt:
09/15/2011
PCT #:
US0963798
Title:
METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DESIGN FOR LITHOGRAPHY CALIBRATION
61
Patent #:
8584056
Issue Dt:
11/12/2013
Application #:
13130548
Filing Dt:
05/20/2011
Publication #:
US20110230999
Pub Dt:
09/22/2011
PCT #:
US0965359
Title:
FAST FREEFORM SOURCE AND MASK CO-OPTIMIZATION METHOD
Assignor
1
BRION TECHNOLOGIES, INC.
Exec Dt:
04/16/2010
Assignee
1
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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