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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09305017
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Filing Dt:
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05/04/1999
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR EUV LITHOGRAPHY
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09322813
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Filing Dt:
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05/28/1999
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Title:
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REDUCTION OBJECTIVE FOR EXTREME ULTRAVIOLET LITHOGRAPHY
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09362228
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Filing Dt:
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07/28/1999
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Title:
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METHOD OF WELDING AN OPTICAL COMPONENT TO A METAL ATTACHMENT ELEMENT AND AN OPTICAL ASSEMBLY INCORPORATING THE METAL ATTACHMENT ELEMENT
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09486017
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Filing Dt:
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07/22/2000
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Title:
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OPTICAL SYSTEM, ESPECIALLY A PROJECTION LIGHT FACILITY FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09503640
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Filing Dt:
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02/14/2000
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Title:
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Microlithography reduction objective and projection exposure apparatus
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09627559
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Filing Dt:
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07/27/2000
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Title:
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ILLUMINATION SYSTEM WITH A PLURALITY OF LIGHT SOURCES
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09705662
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Filing Dt:
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11/03/2000
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Title:
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Illumination system, particularly for EUV lithography
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Patent #:
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Issue Dt:
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10/07/2003
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Application #:
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09741863
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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01/16/2003
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Title:
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CATADIOPTRIC OBJECTIVE
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09751352
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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04/04/2002
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Title:
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PROJECTION EXPOSURE LENS WITH ASPHERIC ELEMENTS
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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09760066
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Filing Dt:
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01/12/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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02/19/2008
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Application #:
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09792607
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Filing Dt:
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02/23/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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APPARATUS FOR WAVEFRONT DETECTION
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09821448
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Filing Dt:
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03/29/2001
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Publication #:
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Pub Dt:
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01/31/2002
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Title:
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MULTILAYER SYSTEM WITH PROTECTING LAYER SYSTEM AND PRODUCTION METHOD
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09825665
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Filing Dt:
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04/03/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Title:
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IRIS DIAPHRAGM
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09836654
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Filing Dt:
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04/17/2001
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Publication #:
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Pub Dt:
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11/08/2001
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Title:
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METHOD FOR THE PRODUCTION OF MULTI-LAYER SYSTEMS
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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09847658
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Filing Dt:
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05/02/2001
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Publication #:
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Pub Dt:
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01/24/2002
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Title:
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PROJECTION LENS, IN PARTICULAR FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09878697
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Filing Dt:
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06/11/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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REDUCTION OBJECTIVE FOR EXTREME ULTRAVIOLET LITHOGRAPHY
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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09882564
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Filing Dt:
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06/15/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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DEVICE FOR MOUNTING AN OPTICAL ELEMENT, FOR EXAMPLE A LENS ELEMENT IN A LENS
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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09920285
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Filing Dt:
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08/01/2001
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Publication #:
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Pub Dt:
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05/16/2002
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Title:
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6-MIRROR MICROLITHOGRAPHY PROJECTION OBJECTIVE
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09933879
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Filing Dt:
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08/21/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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SPECTROMETER ARRANGEMENT
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09934252
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Filing Dt:
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08/21/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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PROJECTION EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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09934817
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Filing Dt:
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08/21/2001
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Publication #:
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Pub Dt:
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01/24/2002
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Title:
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OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09955910
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Filing Dt:
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09/19/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Title:
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OPTICAL ELEMENT AND METHOD FOR RECOVERING THE SUBSTRATE
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Patent #:
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Issue Dt:
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01/18/2005
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Application #:
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09956715
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Filing Dt:
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09/19/2001
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Publication #:
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Pub Dt:
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04/25/2002
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Title:
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OPTICAL ELEMENT DEFORMATION SYSTEM
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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09961819
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Filing Dt:
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09/24/2001
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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ILLUMINATION SYSTEM WITH A GRATING ELEMENT
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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09975920
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Filing Dt:
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10/10/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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TEMPERATURE COMPENSATION APPARATUS FOR THERMALLY LOADED BODIES OF LOW THERMAL CONDUCTIVITY
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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10002097
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Filing Dt:
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10/18/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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MOUNTING APPARATUS FOR AN OPTICAL ELEMENT
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Patent #:
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Issue Dt:
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09/07/2004
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Application #:
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10025605
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Filing Dt:
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12/26/2001
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Publication #:
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Pub Dt:
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09/05/2002
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Title:
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LITHOGRAPHIC OBJECTIVE HAVING A FIRST LENS GROUP INCLUDING ONLY LENSES HAVING A POSITIVE REFRACTIVE POWER
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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10039841
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Filing Dt:
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01/03/2002
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Publication #:
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Pub Dt:
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07/11/2002
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Title:
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ADJUSTING APPARATUS FOR AN OPTICAL ELEMENT IN A LENS SYSTEM
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Patent #:
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Issue Dt:
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11/15/2005
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Application #:
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10055608
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Filing Dt:
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01/23/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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COLLECTOR FOR AN ILLUMINATION SYSTEM WITH A WAVELENGTH OF LESS THAN OR EQUAL TO 193 NM
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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10073119
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Filing Dt:
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02/12/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS, A GRATING MODULE, A SENSOR MODULE, A METHOD OF MEASURING WAVE FRONT ABERRATIONS
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10075797
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Filing Dt:
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02/12/2002
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Publication #:
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Pub Dt:
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08/15/2002
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Title:
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SYSTEM FOR DAMPING OSCILLATIONS
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10079580
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Filing Dt:
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02/22/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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OPTICAL BEAM GUIDANCE SYSTEM AND METHOD FOR PREVENTING CONTAMINATION OF OPTICAL COMPONENTS CONTAINED THEREIN
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10087601
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Filing Dt:
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03/01/2002
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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PARTICLE-OPTICAL LENS ARRANGEMENT AND METHOD EMPLOYING SUCH A LENS ARRANGEMENT
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10090975
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Filing Dt:
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03/05/2002
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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METHOD AND APPARATUS FOR ANALYSIS OF SCHLIEREN
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Patent #:
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Issue Dt:
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08/01/2006
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Application #:
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10106962
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Filing Dt:
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03/25/2002
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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ADJUSTING APPARATUS FOR DEVICES AND FOR SETTING ADJUSTMENTS
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Patent #:
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Issue Dt:
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03/22/2005
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Application #:
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10108878
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Filing Dt:
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03/27/2002
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Publication #:
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Pub Dt:
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11/28/2002
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Title:
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APPARATUS FOR MOUNTING AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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10115886
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Filing Dt:
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04/04/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Title:
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PARTICLE-OPTICAL APPARATUS, ILLUMINATION APPARATUS AND PROJECTION SYSTEM AS WELL AS A METHOD EMPLOYING THE SAME
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10119182
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Filing Dt:
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04/08/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Title:
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APPARATUS FOR TILTING A CARRIER FOR OPTICAL ELEMENTS
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10145138
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Filing Dt:
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05/15/2002
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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OPTICAL IMAGING SYSTEM WITH POLARIZER AND A CRYSTALLINE-QUARTZ PLATE FOR USE THEREWITH
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10151867
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Filing Dt:
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05/22/2002
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Publication #:
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Pub Dt:
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11/28/2002
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Title:
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POLARIZER AND MICROLITHOGRAPHY PROJECTION SYSTEM WITH A POLARIZER
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10185729
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Filing Dt:
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07/01/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Title:
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EXAMINING SYSTEM FOR THE PARTICLE-OPTICAL IMAGING OF AN OBJECT, DEFLECTOR FOR CHARGED PARTICLES AS WELL AS METHOD FOR THE OPERATION OF THE SAME
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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10193688
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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02/24/2004
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Application #:
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10199503
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Filing Dt:
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07/18/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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OBJECTIVE WITH LENSES MADE OF A CRYSTALLINE MATERIAL
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Patent #:
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Issue Dt:
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02/22/2005
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Application #:
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10201652
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Filing Dt:
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07/22/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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10230232
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Filing Dt:
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08/28/2002
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Publication #:
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Pub Dt:
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06/05/2003
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Title:
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METHOD OF MAKING A FRACTURE-RESISTANT CALCIUM FLUORIDE SINGLE CRYSTAL AND ITS USE
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10234143
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Filing Dt:
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09/05/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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ZOOM SYSTEM FOR AN ILLUMINATION DEVICE
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10244419
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Filing Dt:
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09/17/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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METHOD AND COATING SYSTEM FOR COATING SUBSTRATES FOR OPTICAL COMPONENTS
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10247270
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Filing Dt:
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09/19/2002
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Publication #:
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Pub Dt:
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04/17/2003
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Title:
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METHOD FOR OPTIMIZING THE IMAGE PROPERTIES OF AT LEAST TWO OPTICAL ELEMENTS AS WELL AS METHODS FOR OPTIMIZING THE IMAGE PROPERTIES OF AT LEAST THREE OPTICAL ELEMENTS
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Patent #:
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Issue Dt:
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12/04/2007
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Application #:
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10250495
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Filing Dt:
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08/20/2004
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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10261455
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Filing Dt:
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09/30/2002
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Title:
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METHOD AND APPARATUS FOR POLISHING OR LAPPING AN ASPHERICAL SURFACE OF A WORK PIECE
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10280090
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Filing Dt:
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10/25/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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METHOD AND SYSTEM FOR MEASURING THE IMAGING QUALITY OF AN OPTICAL IMAGING SYSTEM
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Patent #:
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Issue Dt:
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05/01/2007
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Application #:
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10299030
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Filing Dt:
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11/18/2002
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Title:
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INTERFEROMETRIC MEASUREMENT DEVICE FOR DETERMINING THE BIREFRINGENCE IN A TRANSPARENT OBJECT
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10351901
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Filing Dt:
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01/27/2003
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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METHOD FOR CORRECTING OSCILLATION-INDUCED IMAGING ERRORS IN AN OBJECTIVE
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Patent #:
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Issue Dt:
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12/05/2006
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Application #:
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10367989
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Filing Dt:
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02/12/2003
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Publication #:
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Pub Dt:
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06/03/2004
| | | | |
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Title:
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OBJECTIVE WITH FLUORIDE CRYSTAL LENSES
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10375320
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Filing Dt:
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02/26/2003
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Publication #:
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Pub Dt:
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09/11/2003
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Title:
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OBJECTIVE, IN PARTICULAR A PROJECTION LENS FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10379809
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Filing Dt:
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03/06/2003
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Publication #:
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Pub Dt:
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09/18/2003
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Title:
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REFRACTIVE PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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10381945
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Filing Dt:
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08/07/2003
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Publication #:
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Pub Dt:
|
02/12/2004
| | | | |
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10385643
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Filing Dt:
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03/12/2003
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Publication #:
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Pub Dt:
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11/13/2003
| | | | |
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Title:
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METHOD AND DEVICE FOR DECONTAMINATING OPTICAL SURFACES
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Issue Dt:
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06/28/2005
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Application #:
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10402316
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Filing Dt:
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03/28/2003
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Publication #:
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Pub Dt:
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12/25/2003
| | | | |
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Title:
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6-MIRROR PROJECTION OBJECTIVE WITH FEW LENSES
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10429927
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Filing Dt:
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05/05/2003
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Publication #:
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Pub Dt:
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02/26/2004
| | | | |
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Title:
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ILLUMINATION SYSTEM WITH A PLURALITY OF LIGHT SOURCES
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10434952
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Filing Dt:
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05/08/2003
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Publication #:
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Pub Dt:
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01/29/2004
| | | | |
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Title:
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PROJECTION EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10445076
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Filing Dt:
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05/27/2003
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Publication #:
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02/19/2004
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Title:
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METHOD FOR DETERMINING WAVEFRONT ABERRATIONS
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04/24/2007
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10448339
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05/30/2003
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Publication #:
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Pub Dt:
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06/10/2004
| | | | |
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Title:
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PROJECTION OBJECTIVE, ESPECIALLY FOR MICROLITHOGRAPHY, AND METHOD FOR ADJUSTING A PROJECTION OBJECTIVE
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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10454830
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06/04/2003
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04/15/2004
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Title:
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PROJECTION SYSTEM FOR EUV LITHOGRAPHY
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Patent #:
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Issue Dt:
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01/10/2006
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Application #:
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10454831
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06/04/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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PROJECTION SYSTEM FOR EUV LITHOGRAPHY
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Patent #:
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Issue Dt:
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12/26/2006
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Application #:
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10466961
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07/23/2003
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Pub Dt:
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04/01/2004
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Title:
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NARROW-BAND SPECTRAL FILTER AND THE USE THEREOF
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06/13/2006
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10506555
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09/02/2004
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Pub Dt:
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05/19/2005
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Title:
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DEVICE, EUV-LITHOGRAPHIC DEVICE AND METHOD FOR PREVENTING AND CLEANING CONTAMINATION ON OPTICAL ELEMENTS
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06/10/2008
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Application #:
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10562257
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12/04/2006
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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OBJECTIVES AS A MICROLITHOGRAPHY PROJECTION OBJECTIVE WITH AT LEAST ONE LIQUID LENS
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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10562577
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11/09/2006
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Pub Dt:
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08/09/2007
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Title:
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CORRECTING DEVICE TO COMPENSATE FOR POLARIZATION DISTRIBUTION PERTURBATIONS
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Patent #:
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Issue Dt:
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03/22/2011
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10563175
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08/09/2006
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Pub Dt:
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03/15/2007
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Title:
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ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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08/30/2011
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10566196
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06/18/2008
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01/22/2009
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Title:
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OPTICAL IMAGING DEVICE HAVING AT LEAST ONE SYSTEM DIAPHRAGM
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08/24/2010
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10569574
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09/01/2006
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03/15/2007
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Title:
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OBLIQUE MIRROR-TYPE NORMAL-INCIDENCE COLLECTOR SYSTEM FOR LIGHT SOURCES, PARTICULARLY EUV PLASMA DISCHARGE SOURCES
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07/21/2009
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10570021
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04/12/2007
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08/09/2007
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Title:
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DEVICE FOR PREVENTING THE DISPLACEMENT OF AN OPTICAL ELEMENT
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06/23/2009
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10571267
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02/12/2007
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Pub Dt:
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11/08/2007
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Title:
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LITHOGRAPHY LENS SYSTEM AND PROJECTION EXPOSURE SYSTEM PROVIDED WITH AT LEAST ONE LITHOGRAPHY LENS SYSTEM OF THIS TYPE
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Issue Dt:
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05/11/2010
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10571475
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02/12/2007
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07/19/2007
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Title:
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ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INSTALLATION
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Patent #:
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08/11/2009
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10572149
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11/03/2006
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04/12/2007
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Title:
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MASKS, LITHOGRAPHY DEVICE AND SEMICONDUCTOR COMPONENT
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11/11/2008
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10573216
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03/24/2006
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01/18/2007
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Title:
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OPTICAL SUBASSEMBLY AND PROJECTION OBJECTIVE IN SEMICONDUCTOR LITHOGRAPHY
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04/13/2010
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10576265
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05/22/2007
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02/14/2008
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Title:
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CATADIOPTRIC PROJECTION OBJECTIVE
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07/06/2010
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10576754
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05/07/2007
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Pub Dt:
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02/21/2008
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REFRACTIVE PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
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07/07/2009
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10577163
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03/22/2006
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02/15/2007
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Title:
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PROJECTION OBJECTIVE
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Patent #:
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Issue Dt:
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10/07/2014
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10580179
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04/24/2007
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01/03/2008
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Holding Device for an Optical Element in an Objective
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10/02/2012
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10580698
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11/29/2006
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04/12/2007
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POLARIZATION-MODULATING OPTICAL ELEMENT
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02/17/2009
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10581651
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02/17/2007
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11/08/2007
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PROJECTION OPTICAL SYSTEM
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08/23/2011
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10585402
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12/19/2008
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05/07/2009
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DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM, MEASUREMENT STRUCTURE SUPPORT, AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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09/22/2009
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10590537
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08/25/2006
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09/06/2007
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SYSTEM FOR REDUCING THE COHERENCE OF LASER RADIATION
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06/23/2009
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10590783
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06/25/2007
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12/06/2007
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ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INSTALLATION
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05/10/2011
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10591591
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07/16/2007
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12/06/2007
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TRANSMISSION FILTER APPARATUS
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12/06/2011
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10595469
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11/28/2006
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04/05/2007
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OPTICAL APPARATUS FOR USE IN PHOTOLITHOGRAPHY
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03/23/2010
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10595583
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04/28/2006
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03/08/2007
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DIAPHRAGM CHANGING DEVICE
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07/13/2010
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10596626
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09/15/2006
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04/26/2007
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MICROLITHOGRAPHY PROJECTION OBJECTIVE WITH CRYSTAL LENS
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05/18/2010
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10597776
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05/04/2007
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12/13/2007
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IMAGING SYSTEM FOR A MICROLITHOGRAPHICAL PROJECTION LIGHT SYSTEM
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04/06/2010
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10597872
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03/28/2007
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07/19/2007
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STRUCTURE FOR USE IN A PROJECTION EXPOSURE SYSTEM FOR MANUFACTURING SEMICONDUCTORS
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09/13/2011
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10598014
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05/05/2009
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12/10/2009
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HOUSING STRUCTURE
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10598481
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06/18/2007
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12/13/2007
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Methods For Manufacturing Reflective Optical Element, Reflective Optical Elements, Euv-Lithography Apparatuses And Methods For Operating Optical Elements And Euv-Lithography Apparatuses, Methods For Determining The Phase Shift, Methods For Determining The Layer Thickness, And Apparatuses For Carrying Out The Methods
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07/15/2008
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10599784
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10/10/2006
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07/26/2007
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METHOD FOR CONNECTION OF AN OPTICAL ELEMENT TO A MOUNT STRUCTURE
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10/23/2007
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10628431
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07/29/2003
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06/17/2004
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METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE OF POLARIZATION BY AN OPTICAL SYSTEM; AND AN ANALYSER
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05/23/2006
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10637217
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08/08/2003
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METHOD FOR CALIBRATING AN INTERFEROMETER APPARATUS, FOR QUALIFYING AN OPTICAL SURFACE, AND FOR MANUFACTURING A SUBSTRATE HAVING AN OPTICAL SURFACE
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08/01/2006
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10639780
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08/12/2003
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02/17/2005
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PROJECTION OBJECTIVES INCLUDING A PLURALITY OF MIRRORS WITH LENSES AHEAD OF MIRROR M3
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05/10/2005
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10645302
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08/21/2003
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06/24/2004
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REFRACTIVE PROJECTION OBJECTIVE WITH A WAIST
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10/11/2005
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10647784
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08/26/2003
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06/03/2004
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Title:
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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