Total properties:
70
|
|
Patent #:
|
|
Issue Dt:
|
08/16/1994
|
Application #:
|
07759538
|
Filing Dt:
|
09/13/1991
|
Title:
|
VERY LOW FREQUENCY TRACKING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/1994
|
Application #:
|
07888477
|
Filing Dt:
|
05/22/1992
|
Title:
|
VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/1994
|
Application #:
|
07948148
|
Filing Dt:
|
09/21/1992
|
Title:
|
METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/1995
|
Application #:
|
08155428
|
Filing Dt:
|
11/19/1993
|
Title:
|
DEVICES AND METHODS FOR READING IDENTIFICATION MARKS ON SEMICONDUCTOR WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/1998
|
Application #:
|
08179678
|
Filing Dt:
|
01/11/1994
|
Title:
|
APPARATUS AND METHODS FOR VIEWING IDENTIFICATION MARKS ON SEMICONDUCTOR WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/1996
|
Application #:
|
08234402
|
Filing Dt:
|
04/28/1994
|
Title:
|
SURFACE DEFECT INSPECTION SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
08/20/1996
|
Application #:
|
08299900
|
Filing Dt:
|
09/01/1994
|
Title:
|
METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/24/1996
|
Application #:
|
08394698
|
Filing Dt:
|
02/27/1995
|
Title:
|
DIRECT LOADLOCK INTERFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/1999
|
Application #:
|
08400039
|
Filing Dt:
|
03/07/1995
|
Title:
|
POD LOADER INTERFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/05/1997
|
Application #:
|
08498455
|
Filing Dt:
|
07/05/1995
|
Title:
|
SMIF PORT INTERFACE ADAPTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/1997
|
Application #:
|
08500595
|
Filing Dt:
|
07/11/1995
|
Title:
|
STAGE ASSEMBLY FOR A SUBSTRATE PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/1997
|
Application #:
|
08503677
|
Filing Dt:
|
07/18/1995
|
Title:
|
DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/09/1999
|
Application #:
|
08713396
|
Filing Dt:
|
09/13/1996
|
Title:
|
MOLECULAR CONTAMINATION CONTROL SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/1999
|
Application #:
|
08730484
|
Filing Dt:
|
10/11/1996
|
Title:
|
ROTATED, ORTHOGONAL LOAD COMPATIBLE FRONT-OPENING INTERFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2000
|
Application #:
|
08730643
|
Filing Dt:
|
10/11/1996
|
Title:
|
LOAD PORT OPENER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/1999
|
Application #:
|
08843245
|
Filing Dt:
|
04/14/1997
|
Title:
|
INTEGRATED INTRABAY BUFFER, DELIVERY, AND STOCKER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/2003
|
Application #:
|
08891543
|
Filing Dt:
|
07/11/1997
|
Title:
|
SMIF POD STORAGE, DELIVERY AND RETRIEVAL SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2000
|
Application #:
|
09049330
|
Filing Dt:
|
03/27/1998
|
Title:
|
KINEMATIC COUPLING COMPATIBLE PASSIVE INTERFACE SEAL
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/1999
|
Application #:
|
09049461
|
Filing Dt:
|
03/27/1998
|
Title:
|
EVACUATION-DRIVEN SMIF POD PURGE SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/20/2000
|
Application #:
|
09050321
|
Filing Dt:
|
03/30/1998
|
Title:
|
PROGRAMMABLE SUBSTRATE SUPPORT FOR A SUBSTRATE POSITIONING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/03/1999
|
Application #:
|
09083834
|
Filing Dt:
|
05/22/1998
|
Title:
|
METHOD AND APPARATUS FOR VERTICAL TRANSFER OF A SEMICONDUCTOR WAFER CASSETTE
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/2003
|
Application #:
|
09115414
|
Filing Dt:
|
07/14/1998
|
Title:
|
POD DOOR TO PORT DOOR RETENTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2001
|
Application #:
|
09115526
|
Filing Dt:
|
07/13/1998
|
Title:
|
ERGONOMIC, VARIABLE SIZE, BOTTOM OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2001
|
Application #:
|
09130254
|
Filing Dt:
|
08/06/1998
|
Title:
|
POD TO PORT DOOR RETENTION AND EVACUATION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/31/2000
|
Application #:
|
09145704
|
Filing Dt:
|
09/02/1998
|
Title:
|
TILT AND GO LOAD PORT INTERFACE ALIGNMENT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2001
|
Application #:
|
09162334
|
Filing Dt:
|
09/28/1998
|
Title:
|
METHOD FOR IN-CASSETTE WAFER CENTER DETERMINATION
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2001
|
Application #:
|
09173710
|
Filing Dt:
|
10/15/1998
|
Title:
|
WAFER MAPPING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/19/2000
|
Application #:
|
09176476
|
Filing Dt:
|
10/21/1998
|
Title:
|
DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/2000
|
Application #:
|
09204320
|
Filing Dt:
|
12/02/1998
|
Title:
|
PASSIVELY ACTIVATED VALVE FOR CARRIER PURGING
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2002
|
Application #:
|
09247695
|
Filing Dt:
|
02/10/1999
|
Title:
|
RETICLE TRANSFER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2003
|
Application #:
|
09313945
|
Filing Dt:
|
05/18/1999
|
Title:
|
CASSETTE BUFFERING WITHIN A MINIENVIRONMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2000
|
Application #:
|
09343110
|
Filing Dt:
|
06/29/1999
|
Title:
|
METHOD FOR SUPPLYING WAFERS TO AN IC MANUFACTURING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/24/2000
|
Application #:
|
09346166
|
Filing Dt:
|
07/01/1999
|
Title:
|
UNIVERSAL TOOL INTERFACE AND/OR WORKPIECE TRANSFER APPARATUS FOR SMIF AND OPEN POD APPLICATIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2001
|
Application #:
|
09351986
|
Filing Dt:
|
07/12/1999
|
Title:
|
SMIF-COMPATIBLE OPEN CASSETTE ENCLOSURE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/2002
|
Application #:
|
09452059
|
Filing Dt:
|
11/30/1999
|
Title:
|
WAFER ORIENTING AND READING MECHANISM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2001
|
Application #:
|
09461151
|
Filing Dt:
|
12/14/1999
|
Title:
|
SYSTEM AND METHOD FOR CASCADE CONTROL OF TEMPERATURE AND HUMIDITY FOR SEMI-CONDUCTOR MANUFACTURING ENVIRONMENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/22/2002
|
Application #:
|
09461498
|
Filing Dt:
|
12/14/1999
|
Title:
|
INTEGRATED INTRA-BAY TRANSFER, STORAGE, AND DELIVERY SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/2003
|
Application #:
|
09483625
|
Filing Dt:
|
01/14/2000
|
Title:
|
WORKPIECE HANDLING ROBOT
|
|
|
Patent #:
|
|
Issue Dt:
|
12/04/2001
|
Application #:
|
09547551
|
Filing Dt:
|
04/12/2000
|
Title:
|
System for parallel processing of workpieces
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09593245
|
Filing Dt:
|
06/13/2000
|
Title:
|
POD LOADER INTERFACE END EFFECTORS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/08/2003
|
Application #:
|
09641032
|
Filing Dt:
|
08/16/2000
|
Title:
|
SMART LOAD PORT WITH INTEGRATED CARRIER MONITORING AND FAB-WIDE CARRIER MANAGEMENT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/16/2002
|
Application #:
|
09723629
|
Filing Dt:
|
11/28/2000
|
Title:
|
FIMS INTERFACE WITHOUT ALIGNMENT PINS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/29/2002
|
Application #:
|
09873691
|
Filing Dt:
|
06/04/2001
|
Publication #:
|
|
Pub Dt:
|
03/14/2002
| | | | |
Title:
|
INTELLIGENT MINIENVIRONMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2003
|
Application #:
|
09905339
|
Filing Dt:
|
07/13/2001
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
Title:
|
SMIF LOAD PORT INTERFACE INCLUDING SMART PORT DOOR
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09905490
|
Filing Dt:
|
07/13/2001
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
Title:
|
CLEAN METHOD FOR VACUUM HOLDING OF SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09943555
|
Filing Dt:
|
08/30/2001
|
Publication #:
|
|
Pub Dt:
|
04/25/2002
| | | | |
Title:
|
EDGE GRIP ALIGNER WITH BUFFERING CAPABILITIES
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2007
|
Application #:
|
10087092
|
Filing Dt:
|
03/01/2002
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
Title:
|
SEMICONDUCTOR MATERIAL HANDLING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2006
|
Application #:
|
10087400
|
Filing Dt:
|
03/01/2002
|
Title:
|
WAFER ENGINE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2006
|
Application #:
|
10087638
|
Filing Dt:
|
03/01/2002
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
Title:
|
UNIFIED FRAME FOR SEMICONDUCTOR MATERIAL HANDLING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2008
|
Application #:
|
10194702
|
Filing Dt:
|
07/12/2002
|
Publication #:
|
|
Pub Dt:
|
05/15/2003
| | | | |
Title:
|
INTEGRATED SYSTEM FOR TOOL FRONT-END WORKPIECE HANDLING
|
|
|
Patent #:
|
|
Issue Dt:
|
11/13/2007
|
Application #:
|
10234640
|
Filing Dt:
|
09/03/2002
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
Title:
|
UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/2006
|
Application #:
|
10438470
|
Filing Dt:
|
05/15/2003
|
Publication #:
|
|
Pub Dt:
|
03/04/2004
| | | | |
Title:
|
PRE-ALIGNER
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/2004
|
Application #:
|
10444327
|
Filing Dt:
|
05/22/2003
|
Publication #:
|
|
Pub Dt:
|
10/23/2003
| | | | |
Title:
|
EDGE GRIP ALIGNER WITH BUFFERING CAPABILITIES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2007
|
Application #:
|
10624133
|
Filing Dt:
|
07/21/2003
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
ACTIVE EDGE GRIPPING END EFFECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2006
|
Application #:
|
10888819
|
Filing Dt:
|
07/10/2004
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
Title:
|
ULTRA LOW CONTACT AREA END EFFECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2007
|
Application #:
|
11014401
|
Filing Dt:
|
12/16/2004
|
Publication #:
|
|
Pub Dt:
|
06/22/2006
| | | | |
Title:
|
ACTIVE EDGE GRIP REST PAD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/2010
|
Application #:
|
11305256
|
Filing Dt:
|
12/16/2005
|
Publication #:
|
|
Pub Dt:
|
06/08/2006
| | | | |
Title:
|
WAFER ENGINE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/13/2007
|
Application #:
|
11404536
|
Filing Dt:
|
04/14/2006
|
Publication #:
|
|
Pub Dt:
|
08/17/2006
| | | | |
Title:
|
ULTRA LOW CONTACT AREA END EFFECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
04/07/2009
|
Application #:
|
11449084
|
Filing Dt:
|
06/08/2006
|
Publication #:
|
|
Pub Dt:
|
12/13/2007
| | | | |
Title:
|
EXTENDED READ RANGE RFID SYSTEM
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11483366
|
Filing Dt:
|
07/07/2006
|
Publication #:
|
|
Pub Dt:
|
02/08/2007
| | | | |
Title:
|
Workpiece support structures and apparatus for accessing same
|
|
|
Patent #:
|
|
Issue Dt:
|
12/05/2017
|
Application #:
|
11644240
|
Filing Dt:
|
12/22/2006
|
Publication #:
|
|
Pub Dt:
|
06/26/2008
| | | | |
Title:
|
Loader and buffer for reduced lot size
|
|
|
Patent #:
|
|
Issue Dt:
|
10/06/2009
|
Application #:
|
11774750
|
Filing Dt:
|
07/09/2007
|
Publication #:
|
|
Pub Dt:
|
02/07/2008
| | | | |
Title:
|
VARIABLE LOT SIZE LOAD PORT
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/2009
|
Application #:
|
11774764
|
Filing Dt:
|
07/09/2007
|
Publication #:
|
|
Pub Dt:
|
01/10/2008
| | | | |
Title:
|
VARIABLE LOT SIZE LOAD PORT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/02/2010
|
Application #:
|
11870560
|
Filing Dt:
|
10/11/2007
|
Publication #:
|
|
Pub Dt:
|
04/16/2009
| | | | |
Title:
|
ULTRA LOW CONTACT AREA END EFFECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/2010
|
Application #:
|
11938236
|
Filing Dt:
|
11/09/2007
|
Publication #:
|
|
Pub Dt:
|
05/01/2008
| | | | |
Title:
|
UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/15/2010
|
Application #:
|
12143197
|
Filing Dt:
|
06/20/2008
|
Publication #:
|
|
Pub Dt:
|
01/01/2009
| | | | |
Title:
|
METHOD AND APPARATUS FOR WAFER MARKING
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12184194
|
Filing Dt:
|
07/31/2008
|
Publication #:
|
|
Pub Dt:
|
02/04/2010
| | | | |
Title:
|
Variable-Size Load Port and Method for Operating the Same
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12244693
|
Filing Dt:
|
10/02/2008
|
Publication #:
|
|
Pub Dt:
|
04/09/2009
| | | | |
Title:
|
END EFFECTOR WITH SENSING CAPABILITIES
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12253212
|
Filing Dt:
|
10/16/2008
|
Publication #:
|
|
Pub Dt:
|
04/23/2009
| | | | |
Title:
|
METHOD AND APPARATUS FOR WAFER SUPPORT
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12348276
|
Filing Dt:
|
01/03/2009
|
Publication #:
|
|
Pub Dt:
|
07/09/2009
| | | | |
Title:
|
Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
|
|