Total properties:
47
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Patent #:
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Issue Dt:
|
04/28/2009
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Application #:
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10057206
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Filing Dt:
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01/25/2002
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Publication #:
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Pub Dt:
|
10/16/2003
| | | | |
Title:
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Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates
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Patent #:
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Issue Dt:
|
06/01/2004
|
Application #:
|
10245440
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Filing Dt:
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09/17/2002
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Publication #:
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Pub Dt:
|
06/19/2003
| | | | |
Title:
|
GEL-FREE COLLOIDAL ABRASIVE POLISHING COMPOSITIONS AND ASSOCIATED METHODS
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Patent #:
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Issue Dt:
|
05/17/2005
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Application #:
|
10315398
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Filing Dt:
|
12/09/2002
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Publication #:
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Pub Dt:
|
06/10/2004
| | | | |
Title:
|
COMPOSITION AND ASSOCIATED METHODS FOR CHEMICAL MECHANICAL PLANARIZATION HAVING HIGH SELECTIVITY FOR METAL REMOVAL
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Patent #:
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Issue Dt:
|
04/18/2006
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Application #:
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10361822
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Filing Dt:
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02/11/2003
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Publication #:
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Pub Dt:
|
01/15/2004
| | | | |
Title:
|
CATALYST ATTACHED TO SOLID AND USED TO PROMOTE FREE RADICAL FORMATION IN CMP FORMULATIONS
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Patent #:
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Issue Dt:
|
10/02/2007
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Application #:
|
10401405
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Filing Dt:
|
03/27/2003
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Publication #:
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Pub Dt:
|
09/18/2003
| | | | |
Title:
|
CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
|
06/13/2017
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Application #:
|
10534699
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Filing Dt:
|
01/22/2009
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Publication #:
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Pub Dt:
|
08/06/2009
| | | | |
Title:
|
CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
|
06/28/2011
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Application #:
|
10568077
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Filing Dt:
|
08/03/2007
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Publication #:
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Pub Dt:
|
02/14/2008
| | | | |
Title:
|
PERIODIC ACID COMPOSITIONS FOR POLISHING RUTHENIUM/LOW K SUBSTRATES
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Patent #:
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Issue Dt:
|
03/21/2006
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Application #:
|
10619708
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Filing Dt:
|
07/14/2003
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Publication #:
|
|
Pub Dt:
|
02/12/2004
| | | | |
Title:
|
CATALYTIC COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING, METHOD OF USING SAME, AND SUBSTRATE TREATED WITH SAME
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Patent #:
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Issue Dt:
|
05/02/2006
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Application #:
|
10619901
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Filing Dt:
|
07/14/2003
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Publication #:
|
|
Pub Dt:
|
01/20/2005
| | | | |
Title:
|
COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING AND METHOD OF USING SAME
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|
Patent #:
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|
Issue Dt:
|
04/25/2006
|
Application #:
|
10665417
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Filing Dt:
|
09/22/2003
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Publication #:
|
|
Pub Dt:
|
11/10/2005
| | | | |
Title:
|
COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION OF TANTALUM AND TANTALUM NITRIDE
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Patent #:
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|
Issue Dt:
|
12/26/2006
|
Application #:
|
10683232
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Filing Dt:
|
10/10/2003
|
Publication #:
|
|
Pub Dt:
|
04/14/2005
| | | | |
Title:
|
TUNABLE COMPOSITION AND METHOD FOR CHEMICAL-MECHANICAL PLANARIZATION WITH ASPARTIC ACID/TOLYLTRIAZOLE
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Patent #:
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Issue Dt:
|
04/04/2006
|
Application #:
|
10683258
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Filing Dt:
|
10/10/2003
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Publication #:
|
|
Pub Dt:
|
04/14/2005
| | | | |
Title:
|
CHEMICAL-MECHANICAL PLANARIZATION COMPOSITION WITH NITROGEN CONTAINING POLYMER AND METHOD FOR USE
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Patent #:
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|
Issue Dt:
|
04/25/2006
|
Application #:
|
10683730
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Filing Dt:
|
10/10/2003
|
Publication #:
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Pub Dt:
|
04/15/2004
| | | | |
Title:
|
CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
|
07/24/2007
|
Application #:
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10690623
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Filing Dt:
|
10/23/2003
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Publication #:
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|
Pub Dt:
|
04/28/2005
| | | | |
Title:
|
CMP METHOD FOR COPPER, TUNGSTEN, TITANIUM, POLYSILICON, AND OTHER SUBSTRATES USING ORGANOSULFONIC ACIDS AS OXIDIZERS
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Patent #:
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Issue Dt:
|
09/23/2008
|
Application #:
|
10690626
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Filing Dt:
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10/23/2003
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Publication #:
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Pub Dt:
|
04/14/2005
| | | | |
Title:
|
PARTICULATE OR PARTICLE-BOUND CHELATING AGENTS
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Patent #:
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Issue Dt:
|
07/18/2006
|
Application #:
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10759666
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Filing Dt:
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01/16/2004
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Publication #:
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|
Pub Dt:
|
07/21/2005
| | | | |
Title:
|
SURFACE MODIFIED COLLOIDAL ABRASIVES, INCLUDING STABLE BIMETALLIC SURFACE COATED SILICA SOLS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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07/24/2007
|
Application #:
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10914113
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Filing Dt:
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08/09/2004
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Publication #:
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Pub Dt:
|
03/03/2005
| | | | |
Title:
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COMPOSITION AND ASSOCIATED METHODS FOR CHEMICAL MECHANICAL PLANARIZATION HAVING HIGH SELECTIVITY FOR METAL REMOVAL
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Patent #:
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Issue Dt:
|
03/18/2008
|
Application #:
|
10972616
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Filing Dt:
|
10/26/2004
|
Publication #:
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Pub Dt:
|
09/08/2005
| | | | |
Title:
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ALUMINA ABRASIVE FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
|
12/27/2005
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Application #:
|
11030503
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Filing Dt:
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01/06/2005
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Title:
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LOW DEFECTIVITY PRODUCT SLURRY FOR CMP AND ASSOCIATED PRODUCTION METHOD
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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11132315
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Filing Dt:
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05/19/2005
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Publication #:
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Pub Dt:
|
11/24/2005
| | | | |
Title:
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POLISHING METHOD TO REDUCE DISHING OF TUNGSTEN ON A DIELECTRIC
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Patent #:
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Issue Dt:
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01/01/2008
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Application #:
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11194467
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Filing Dt:
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08/02/2005
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Publication #:
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Pub Dt:
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12/01/2005
| | | | |
Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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04/07/2009
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Application #:
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11212628
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Filing Dt:
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08/29/2005
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Publication #:
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Pub Dt:
|
03/02/2006
| | | | |
Title:
|
CHEMICAL-MECHANICAL PLANARIZATION COMPOSITION HAVING BENZENESULFONIC ACID AND PER-COMPOUND OXIDIZING AGENTS, AND ASSOCIATED METHOD FOR USE
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Patent #:
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Issue Dt:
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04/07/2009
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Application #:
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11264027
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Filing Dt:
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11/02/2005
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Publication #:
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Pub Dt:
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06/08/2006
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Title:
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FREE RADICAL-FORMING ACTIVATOR ATTACHED TO SOLID AND USED TO ENHANCE CMP FORMULATIONS
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Patent #:
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Issue Dt:
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01/13/2009
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Application #:
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11387934
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Filing Dt:
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03/24/2006
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Publication #:
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Pub Dt:
|
11/30/2006
| | | | |
Title:
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DIHYDROXY ENOL COMPOUNDS USED IN CHEMICAL MECHANICAL POLISHING COMPOSITIONS HAVING METAL ION OXIDIZERS
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Patent #:
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Issue Dt:
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09/23/2008
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Application #:
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11405485
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Filing Dt:
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04/18/2006
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Publication #:
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Pub Dt:
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08/17/2006
| | | | |
Title:
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FREE RADICAL-FORMING ACTIVATOR ATTACHED TO SOLID AND USED TO ENHANCE CMP FORMULATIONS
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Patent #:
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Issue Dt:
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09/30/2008
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Application #:
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11487443
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Filing Dt:
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07/17/2006
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Publication #:
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Pub Dt:
|
11/16/2006
| | | | |
Title:
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SURFACE MODIFIED COLLOIDAL ABRASIVES, INCLUDING STABLE BIMETALLIC SURFACE COATED SILICA SOLS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11643519
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Filing Dt:
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12/21/2006
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Publication #:
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Pub Dt:
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06/26/2008
| | | | |
Title:
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Method and slurry for tuning low-k versus copper removal rates during chemical mechanical polishing
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11700526
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Filing Dt:
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01/31/2007
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Publication #:
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Pub Dt:
|
07/31/2008
| | | | |
Title:
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METHOD FOR IMMOBILIZING LIGANDS AND ORGANOMETALLIC COMPOUNDS ON SILICA SURFACE, AND THEIR APPLICATION IN CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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04/24/2012
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11783191
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04/06/2007
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Publication #:
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Pub Dt:
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11/01/2007
| | | | |
Title:
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FLUORIDE-MODIFIED SILICA SOLS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12179643
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Filing Dt:
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07/25/2008
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Publication #:
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Pub Dt:
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02/19/2009
| | | | |
Title:
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Reverse Shallow Trench Isolation Process
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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12190882
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Filing Dt:
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08/13/2008
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Publication #:
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Pub Dt:
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03/05/2009
| | | | |
Title:
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METHOD FOR CHEMICAL MECHANICAL PLANARIZATION OF CHALCOGENIDE MATERIALS
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Patent #:
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03/29/2011
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12193303
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08/18/2008
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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METHOD FOR CHEMICAL MECHANICAL PLANARIZATION OF CHALCOGENIDE MATERIALS
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Patent #:
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11/15/2011
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Application #:
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12201459
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Filing Dt:
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08/29/2008
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Publication #:
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01/15/2009
| | | | |
Title:
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COMPOSITIONS AND METHODS FOR RAPIDLY REMOVING OVERFILLED SUBSTRATES
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Patent #:
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NONE
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Application #:
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12213141
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Filing Dt:
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06/16/2008
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Publication #:
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Pub Dt:
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10/16/2008
| | | | |
Title:
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Composition and method used for chemical mechanical planarization of metals
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Patent #:
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Issue Dt:
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08/13/2013
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12257950
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Filing Dt:
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10/24/2008
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Pub Dt:
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04/29/2010
| | | | |
Title:
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Polishing Slurry for Copper Films
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Patent #:
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Issue Dt:
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02/14/2012
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Application #:
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12352700
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Filing Dt:
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01/13/2009
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Publication #:
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Pub Dt:
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12/17/2009
| | | | |
Title:
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DIHYDROXY ENOL COMPOUNDS USED IN CHEMICAL MECHANICAL POLISHING COMPOSITIONS HAVING METAL ION OXIDIZERS
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12630304
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Filing Dt:
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12/03/2009
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Publication #:
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Pub Dt:
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06/24/2010
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Title:
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Combination, Method, and Composition for Chemical Mechanical Planarization of A Tungsten-Containing Substrate
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Patent #:
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Issue Dt:
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04/09/2013
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Application #:
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12632111
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Filing Dt:
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12/07/2009
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Publication #:
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Pub Dt:
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07/01/2010
| | | | |
Title:
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METHOD AND COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF A METAL
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12632918
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Filing Dt:
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12/08/2009
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Publication #:
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Pub Dt:
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07/01/2010
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Title:
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METHOD AND COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF A METAL OR A METAL ALLOY
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Patent #:
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Issue Dt:
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07/17/2012
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Application #:
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12881574
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Filing Dt:
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09/14/2010
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Publication #:
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Pub Dt:
|
03/24/2011
| | | | |
Title:
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METHOD AND COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF A METAL-CONTAINING SUBSTRATE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12888872
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Filing Dt:
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09/23/2010
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Publication #:
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Pub Dt:
|
09/29/2011
| | | | |
Title:
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METHOD FOR EXPOSING THROUGH-BASE WAFER VIAS FOR FABRICATION OF STACKED DEVICES
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Patent #:
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Issue Dt:
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12/23/2014
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Application #:
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12959452
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Filing Dt:
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12/03/2010
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Publication #:
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Pub Dt:
|
12/08/2011
| | | | |
Title:
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METHOD FOR FORMING THROUGH-BASE WAFER VIAS FOR FABRICATION OF STACKED DEVICES
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Patent #:
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Issue Dt:
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10/08/2013
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Application #:
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12964943
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Filing Dt:
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12/10/2010
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Publication #:
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Pub Dt:
|
12/22/2011
| | | | |
Title:
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METHOD FOR CHEMICAL MECHANICAL PLANARIZATION OF A COPPER-CONTAINING SUBSTRATE
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Patent #:
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Issue Dt:
|
10/14/2014
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Application #:
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13014009
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Filing Dt:
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01/26/2011
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Publication #:
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Pub Dt:
|
02/02/2012
| | | | |
Title:
|
METHOD FOR CHEMICAL MECHANICAL PLANARIZATION OF A TUNGSTEN-CONTAINING SUBSTRATE
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|
Patent #:
|
NONE
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Issue Dt:
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|
Application #:
|
13052457
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Filing Dt:
|
03/21/2011
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Publication #:
|
|
Pub Dt:
|
07/07/2011
| | | | |
Title:
|
Method and Slurry for Tuning Low-K Versus Copper Removal Rates During Chemical Mechanical Polishing
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Patent #:
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Issue Dt:
|
09/02/2014
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Application #:
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13154662
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Filing Dt:
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06/07/2011
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Publication #:
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Pub Dt:
|
06/07/2012
| | | | |
Title:
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Chemical Mechanical Planarization Composition And Method With Low Corrosiveness
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Patent #:
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Issue Dt:
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12/09/2014
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Application #:
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13325459
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Filing Dt:
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12/14/2011
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Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
CMP SLURRY/METHOD FOR POLISHING RUTHENIUM AND OTHER FILMS
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|