|
Total properties:
54
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|
|
|
Patent #:
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|
Issue Dt:
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06/06/1995
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Application #:
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08067392
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Filing Dt:
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05/25/1993
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Title:
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METHOD FOR A REACTIVE SURFACE TREATMENT OF A WORKPIECE AND A TREATMENT CHAMBER FOR PRACTICING SUCH METHOD
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Patent #:
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Issue Dt:
|
03/21/1995
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Application #:
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08153608
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Filing Dt:
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11/16/1993
|
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Title:
|
PLASMA GENERATING DEVICE
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Patent #:
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Issue Dt:
|
12/02/1997
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Application #:
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08237432
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Filing Dt:
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05/03/1994
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Title:
|
METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
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Patent #:
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Issue Dt:
|
05/14/1996
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Application #:
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08237575
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Filing Dt:
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05/03/1994
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
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Patent #:
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Issue Dt:
|
08/04/1998
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Application #:
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08573257
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Filing Dt:
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12/15/1995
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Title:
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FIELD EMISSION DEVICE
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Patent #:
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Issue Dt:
|
12/22/1998
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Application #:
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08576236
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Filing Dt:
|
12/21/1995
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|
Title:
|
HEATING SYSTEM, VACUUM PROCESS CHAMBER COMPRISING SUCH A HEATING SYSTEM AND OPERATION OF SUCH A VACUUM PROCESS CHAMBER
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Patent #:
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Issue Dt:
|
08/12/1997
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Application #:
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08693987
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Filing Dt:
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08/08/1996
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Title:
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VACUUM APPARATUS FOR THE SURFACE TREATMENT OF WORKPIECES
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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08881759
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Filing Dt:
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06/24/1997
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Title:
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METHOD FOR MONITORING THE FLOW OF A GAS INTO A VACUUM REACTOR
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Patent #:
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Issue Dt:
|
07/25/2000
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Application #:
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09026446
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Filing Dt:
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02/19/1998
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Title:
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MAGNETRON SPUTTERING SOURCE
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Patent #:
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Issue Dt:
|
10/03/2000
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Application #:
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09066978
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Filing Dt:
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04/28/1998
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Title:
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PROCESS FOR DRY ETCHING AND VACUUM TREATMENT REACTOR
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Patent #:
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Issue Dt:
|
10/02/2001
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Application #:
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09177894
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Filing Dt:
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10/23/1998
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATION SAME
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Patent #:
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Issue Dt:
|
08/28/2001
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Application #:
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09360247
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Filing Dt:
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07/23/1999
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Title:
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CAPACITIVELY COUPLED RF-PLASMA REACTOR
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Patent #:
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Issue Dt:
|
03/18/2003
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Application #:
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09379742
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Filing Dt:
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08/24/1999
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Publication #:
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Pub Dt:
|
06/14/2001
| | | | |
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Title:
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METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09401158
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Filing Dt:
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09/22/1999
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Title:
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PLASMA REACTOR FORTHE TREATMENT OF LARGE SIZE SUBTRATES
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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09441373
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Filing Dt:
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11/17/1999
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Title:
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PROCESS FOR HANDLING WORKPIECES AND APPARATUS THEREFOR
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09441374
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Filing Dt:
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11/17/1999
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Title:
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PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
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Patent #:
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Issue Dt:
|
02/04/2003
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Application #:
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09481392
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Filing Dt:
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01/12/2000
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Title:
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HEAT CONDITIONING PROCESS
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09559408
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Filing Dt:
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04/26/2000
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Title:
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DESING OF GAS INJECTION FOR THE ELECTRODE IN A CAPACITIVELY COUPLED RF PLASMA REACTOR
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Patent #:
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Issue Dt:
|
09/04/2001
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Application #:
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09587543
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Filing Dt:
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06/05/2000
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Title:
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METHOD OF PRODUCING FLAT PANELS
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09632847
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Filing Dt:
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08/04/2000
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Title:
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VACUUM SYSTEM WITH A VACUUM PLATE VALVE
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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09766835
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Filing Dt:
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01/23/2001
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Publication #:
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Pub Dt:
|
12/13/2001
| | | | |
|
Title:
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PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09888923
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Filing Dt:
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06/25/2001
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Publication #:
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Pub Dt:
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03/28/2002
| | | | |
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Title:
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MAGNETRON SPUTTERING SOURCE
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09925646
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Filing Dt:
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08/10/2001
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Publication #:
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Pub Dt:
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03/07/2002
| | | | |
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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10031258
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Filing Dt:
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02/05/2002
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Title:
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USE OF A METHOD FOR THE PLASMA-SUPPORTED REACTIVE DEPOSITION OF A MATERIAL
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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10236636
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Filing Dt:
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09/06/2002
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Publication #:
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Pub Dt:
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04/03/2003
| | | | |
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Title:
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METHOD OF PRODUCING FLAT PANELS
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Patent #:
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Issue Dt:
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12/11/2007
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Application #:
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10300873
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Filing Dt:
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11/21/2002
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Publication #:
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Pub Dt:
|
04/17/2003
| | | | |
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Title:
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AN RF PLASMA REACTOR HAVING A DISTRIBUTION CHAMBER WITH AT LEAST ONE GRID
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Patent #:
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Issue Dt:
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02/16/2010
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Application #:
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10484174
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Filing Dt:
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06/21/2004
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Publication #:
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Pub Dt:
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12/09/2004
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Title:
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LIFTING AND SUPPORTING DEVICE
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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10551489
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09/29/2005
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Publication #:
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Pub Dt:
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09/07/2006
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Title:
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METHOD FOR LASER MICROMACHINING
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Patent #:
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03/18/2008
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Application #:
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10691102
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10/22/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD
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Patent #:
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Issue Dt:
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11/11/2008
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Application #:
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10835708
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Filing Dt:
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04/30/2004
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Publication #:
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Pub Dt:
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11/03/2005
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Title:
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METHOD FOR MANUFACTURING A PLATE-SHAPED WORKPIECE
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Patent #:
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03/16/2010
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10912365
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07/23/2004
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02/17/2005
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Title:
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SLIDING ANODE MAGNETRON SPUTTERING SOURCE
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02/10/2009
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10935779
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09/08/2004
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03/31/2005
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Title:
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VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
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Patent #:
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02/17/2009
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11061143
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02/18/2005
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Publication #:
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Pub Dt:
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09/08/2005
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Title:
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DIFFUSION BARRIER LAYER AND METHOD FOR MANUFACTURING A DIFFUSION BARRIER LAYER
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Patent #:
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01/11/2011
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11279152
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04/10/2006
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Pub Dt:
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10/12/2006
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Title:
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SOLAR CELL MODULE AND METHOD OF ENCAPSULATING SAME
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03/18/2014
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11573162
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06/14/2007
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11/01/2007
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Title:
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Adhesion Layer for Thin Film Transistors
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05/17/2011
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11577576
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05/11/2007
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11/15/2007
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MAGNETRON SPUTTERING APPARATUS
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09/25/2012
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11638176
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12/13/2006
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08/02/2007
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02/16/2010
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11691593
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03/27/2007
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12/13/2007
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PLASMA REACTOR FOR THE TREATMENT OF LARGE SIZE SUBSTRATES
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08/31/2010
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11872957
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10/16/2007
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08/07/2008
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PLASMA REACTOR FOR THE TREATMENT OF LARGE SIZE SUBSTRATES
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03/17/2009
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11947245
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11/29/2007
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Pub Dt:
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03/27/2008
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Title:
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METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD
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06/21/2011
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12015145
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01/16/2008
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07/30/2009
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PROCESS FOR LASER SCRIBING
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Patent #:
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NONE
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12040292
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02/29/2008
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Pub Dt:
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09/04/2008
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Title:
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INLINE VACUUM PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES THEREIN
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10/30/2012
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12059305
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03/31/2008
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10/02/2008
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Title:
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METHOD FOR LASER SCRIBING OF SOLAR PANELS
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06/30/2009
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12105331
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04/18/2008
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10/23/2008
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Title:
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TEST EQUIPMENT FOR AUTOMATED QUALITY CONTROL OF THIN FILM SOLAR MODULES
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09/11/2012
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12118961
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05/12/2008
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10/02/2008
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Title:
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METHOD FOR LASER MICROMACHINING
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06/26/2012
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12235845
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09/23/2008
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01/29/2009
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Title:
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VACUUM TREATMENT INSTALLATION FOR THE PRODUCTION OF A DISK-SHAPED WORKPIECE BASED ON A DIELECTRIC SUBSTRATE
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NONE
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12330903
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12/09/2008
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04/02/2009
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Title:
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METHOD FOR MANUFACTURING A DIFFUSION BARRIER LAYER
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03/30/2010
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12346917
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12/31/2008
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06/18/2009
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Title:
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VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
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NONE
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12361020
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01/28/2009
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05/21/2009
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METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD
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03/01/2011
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12372813
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02/18/2009
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06/18/2009
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METHOD FOR MANUFACTURING FLAT SUBSTRATES
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11/15/2011
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12708757
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02/19/2010
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06/10/2010
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VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
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NONE
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13002572
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04/21/2011
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08/25/2011
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Title:
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REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD
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02/18/2014
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13060345
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04/20/2011
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08/04/2011
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Title:
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METHOD FOR DEPOSITING AN AMORPHOUS SILICON FILM FOR PHOTOVOLTAIC DEVICES WITH REDUCED LIGHT-INDUCED DEGRADATION FOR IMPROVED STABILIZED PERFORMANCE
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NONE
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13079072
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04/04/2011
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10/06/2011
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Title:
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LARGE-AREA THIN-FILM-SILICON PHOTOVOLTAIC MODULES
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