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Patent #:
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Issue Dt:
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09/07/1993
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Application #:
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07821793
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Filing Dt:
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01/16/1992
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Title:
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MASK FOR PHOTOLITHOGRAPHY
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Patent #:
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Issue Dt:
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10/26/1993
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Application #:
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07933393
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Filing Dt:
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08/21/1992
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Title:
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LITHOGRAPHICAL MASK FOR CONTROLLING THE DIMENSIONS OF RESIST PATTERNS
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Patent #:
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Issue Dt:
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08/23/1994
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Application #:
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08149122
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Filing Dt:
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11/03/1993
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Title:
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METHOD FOR IMPROVED LITHOGRAPHIC PATTERNING IN A SEMICONDUCTOR FABRICATION PROCESS
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Patent #:
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Issue Dt:
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09/05/1995
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Application #:
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08194097
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Filing Dt:
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02/09/1994
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Title:
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MASKS FOR IMPROVED LITHOGRAPHIC PATTERNING FOR OFF-AXIS ILLUMINATION LITHOGRAPHY
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Patent #:
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Issue Dt:
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09/02/1997
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Application #:
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08433730
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Filing Dt:
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05/03/1995
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Title:
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METHOD FOR GENERATING PROXIMITY CORRECTION FEATURES FOR A LITHOGRAPHIC MASK PATTERN
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Patent #:
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Issue Dt:
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01/13/1998
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Application #:
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08654459
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Filing Dt:
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05/28/1996
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Title:
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PHOTOLITHOGRAPHY MASK USING SERIFS AND METHOD THEREOF
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Patent #:
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Issue Dt:
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03/23/1999
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Application #:
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08687043
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Filing Dt:
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07/25/1996
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Title:
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VERTEX BASED GEOMETRY ENGINE SYSTEM FOR USE IN INTEGRATED CIRCUIT DESIGN
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08808587
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Filing Dt:
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02/28/1997
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Title:
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OPTICAL PROXIMITY CORRECTION METHOD FOR INTERMEDIATE-PITCH FEATURES USING SUB-RESOLUTION SCATTERING BARS ON A MASK
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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09055355
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Filing Dt:
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04/06/1998
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Title:
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METHOD OF FINE FEATURE EDGE TUNING WITH OPTICALLY-HALFTONED MASK
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09270052
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Filing Dt:
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03/16/1999
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Title:
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METHOD OF PATTERNING SUB-0.25 LAMBDA LINE FEATURES WITH HIGH TRANSMISSION, "ATTENUATED" PHASE SHIFT MASKS
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Patent #:
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Issue Dt:
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01/01/2002
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Application #:
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09562445
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Filing Dt:
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05/01/2000
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Title:
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System and method providing optical proximity correction for features using phase-shifted halftone transparent/semi-transparent features
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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09729695
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Filing Dt:
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12/06/2000
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Publication #:
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Pub Dt:
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05/29/2003
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Title:
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METHOD AND APPARATUS FOR DETECTING ABERRATIONS IN A PROJECTION LENS UTILIZED FOR PROJECTION OPTICS
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09840291
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Filing Dt:
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04/24/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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HYBRID PHASE-SHIFT MASK
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09840305
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Filing Dt:
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04/24/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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METHOD AND APPARATUS FOR MINIMIZING OPTICAL PROXIMITY EFFECTS
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09840307
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Filing Dt:
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04/24/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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OPTICAL PROXIMITY CORRECTION
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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09877231
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Filing Dt:
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06/11/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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OPTICAL PROXIMITY CORRECTION METHOD UTILIZING SERIFS HAVING VARIABLE DIMENSIONS
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Patent #:
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Issue Dt:
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05/03/2005
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Application #:
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09905198
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Filing Dt:
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07/16/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Title:
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ASSIST FEATURES FOR USE IN LITHOGRAPHIC PROJECTION
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09948697
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Filing Dt:
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09/10/2001
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Publication #:
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Pub Dt:
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05/23/2002
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Title:
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METHOD AND APPARATUS FOR FAST AERIAL IMAGE SIMULATION
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09976336
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Filing Dt:
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10/15/2001
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Publication #:
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Pub Dt:
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04/25/2002
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Title:
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METHOD OF PATTERNING SUB-0.25LAMBDA LINE FEATURES WITH HIGH TRANSMISSION, "ATTENUATED" PHASE SHIFT MASKS
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09985621
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Filing Dt:
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11/05/2001
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Publication #:
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Pub Dt:
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11/07/2002
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Title:
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METHOD AND APPARATUS FOR GENERATING MASKS UTILIZED IN CONJUNCTION WITH DIPOLE ILLUMINATION TECHNIQUES
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Patent #:
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Issue Dt:
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09/07/2004
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Application #:
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10001196
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Filing Dt:
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12/04/2001
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Publication #:
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Pub Dt:
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07/11/2002
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Title:
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METHOD AND APPARATUS FOR DETECTING ABERRATIONS IN AN OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10083683
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Filing Dt:
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02/27/2002
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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METHOD OF IDENTIFYING AN EXTREME INTERACTION PITCH REGION, METHODS OF DESIGNING MASK PATTERNS AND MANUFACTURING MASKS, DEVICE MANUFACTURING METHODS AND COMPUTER PROGRAMS
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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10152686
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Filing Dt:
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05/23/2002
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Publication #:
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Pub Dt:
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04/03/2003
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Title:
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OPTICAL PROXIMITY CORRECTION METHOD UTILIZING PHASE-EDGES AS SUB-RESOLUTION ASSIST FEATURES
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10222972
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Filing Dt:
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08/19/2002
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Publication #:
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Pub Dt:
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04/17/2003
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Title:
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METHOD FOR IMPROVED LITHOGRAPHIC PATTERNING UTILIZING MULTIPLE COHERENCY OPTIMIZED EXPOSURES AND HIGH TRANSMISSION ATTENUATED PSM
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Patent #:
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Issue Dt:
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02/13/2007
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Application #:
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10266922
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Filing Dt:
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10/09/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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METHOD OF TWO DIMENSIONAL FEATURE MODEL CALIBRATION AND OPTIMIZATION
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10305364
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Filing Dt:
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11/27/2002
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Publication #:
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Pub Dt:
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09/11/2003
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Title:
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METHOD OF REMOVING ASSIST FEATURES UTILIZED TO IMPROVE PROCESS LATITUDE
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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10395887
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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01/08/2004
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Title:
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METHOD AND APPARATUS FOR DEFINING MASK PATTERNS UTILIZING A SPATIAL FREQUENCY DOUBLING TECHNIQUE
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10395888
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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01/01/2004
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Title:
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METHOD AND APPARATUS FOR PERFORMING RULE-BASED GATE SHRINK UTILIZING DIPOLE ILLUMINATION
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Patent #:
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Issue Dt:
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02/01/2005
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Application #:
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10395903
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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METHOD AND APPARATUS FOR DECOMPOSING SEMICONDUCTOR DEVICE PATTERNS INTO PHASE AND CHROME REGIONS FOR CHROMELESS PHASE LITHOGRAPHY
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Patent #:
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Issue Dt:
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07/17/2007
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Application #:
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10626858
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Filing Dt:
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07/25/2003
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Publication #:
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Pub Dt:
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05/12/2005
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Title:
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ORIENTATION DEPENDENT SHIELDING FOR USE WITH DIPOLE ILLUMINATION TECHNIQUES
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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10626864
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Filing Dt:
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07/25/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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AUTOMATIC OPTICAL PROXIMITY CORRECTION (OPC) RULE GENERATION
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Patent #:
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Issue Dt:
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05/01/2007
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Application #:
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10659715
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09/11/2003
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Pub Dt:
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06/17/2004
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Title:
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METHOD OF ACHIEVING CD LINEARITY CONTROL FOR FULL-CHIP CPL MANUFACTURING
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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10662365
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Filing Dt:
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09/16/2003
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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HYBRID PHASE-SHIFT MASK
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Patent #:
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Issue Dt:
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11/21/2006
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Application #:
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10705231
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Filing Dt:
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11/12/2003
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Publication #:
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Pub Dt:
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07/22/2004
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Title:
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METHOD AND APPARATUS FOR PERFORMING MODEL-BASED LAYOUT CONVERSION FOR USE WITH DIPOLE ILLUMINATION
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Patent #:
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Issue Dt:
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04/25/2006
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Application #:
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10705234
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11/12/2003
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Pub Dt:
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09/23/2004
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Title:
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METHOD AND APPARATUS FOR PROVIDING LENS ABERRATION COMPENSATION BY ILLUMINATION SOURCE OPTIMIZATION
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Patent #:
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Issue Dt:
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09/22/2009
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Application #:
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10756829
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Filing Dt:
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01/14/2004
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Publication #:
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Pub Dt:
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11/18/2004
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Title:
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METHOD OF OPTICAL PROXIMITY CORRECTION DESIGN FOR CONTACT HOLE MASK
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10756830
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Filing Dt:
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01/14/2004
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Publication #:
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Pub Dt:
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10/21/2004
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Title:
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METHOD AND APPARATUS FOR PROVIDING OPTICAL PROXIMITY FEATURES TO A RETICLE PATTERN FOR DEEP SUB-WAVELENGTH OPTICAL LITHOGRAPHY
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Patent #:
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Issue Dt:
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04/08/2008
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Application #:
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10878489
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Filing Dt:
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06/29/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Title:
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METHOD, PROGRAM PRODUCT AND APPARATUS OF SIMULTANEOUS OPTIMIZATION FOR NA-SIGMA EXPOSURE SETTINGS AND SCATTERING BARS OPC USING A DEVICE LAYOUT
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Patent #:
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Issue Dt:
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05/20/2008
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Application #:
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10878490
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Filing Dt:
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06/29/2004
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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METHOD, PROGRAM PRODUCT AND APPARATUS FOR GENERATING ASSIST FEATURES UTILIZING AN IMAGE FIELD MAP
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Patent #:
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Issue Dt:
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04/08/2008
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Application #:
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10880376
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Filing Dt:
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06/30/2004
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Publication #:
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Pub Dt:
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04/07/2005
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Title:
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SCATTERING BAR OPC APPLICATION METHOD FOR SUB-HALF WAVELENGTH LITHOGRAPHY PATTERNING
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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10921878
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08/20/2004
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06/23/2005
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Title:
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OPTIMIZED POLARIZATION ILLUMINATION
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10/03/2006
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10926400
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08/26/2004
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03/02/2006
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Title:
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METHOD OF PERFORMING RESIST PROCESS CALIBRATION/OPTIMIZATION AND DOE OPTIMIZATION FOR PROVIDING OPE MATCHING BETWEEN DIFFERENT LITHOGRAPHY SYSTEMS
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06/23/2009
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10933496
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09/03/2004
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06/30/2005
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Title:
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METHOD AND APPARATUS FOR PERFORMING MODEL BASED PLACEMENT OF PHASE-BALANCED SCATTERING BARS FOR SUB-WAVELENGTH OPTICAL LITHOGRAPHY
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08/29/2006
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10938510
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09/13/2004
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Publication #:
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Pub Dt:
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02/10/2005
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Title:
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METHOD OF IDENTIFYING AN EXTREME INTERACTION PITCH REGION, METHODS OF DESIGNING MASK PATTERNS AND MANUFACTURING MASKS, DEVICE MANUFACTURING METHODS AND COMPUTER PROGRAMS
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03/17/2009
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10975342
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10/29/2004
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06/30/2005
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Title:
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FEATURE OPTIMIZATION USING INTERFERENCE MAPPING LITHOGRAPHY
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06/12/2007
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10976306
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10/29/2004
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07/07/2005
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Title:
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FEATURE OPTIMIZATION USING ENHANCED INTERFERENCE MAPPING LITHOGRAPHY
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07/08/2008
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10981750
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11/05/2004
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07/07/2005
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Title:
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EIGEN DECOMPOSITION BASED OPC MODEL
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04/07/2009
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10981762
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11/05/2004
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09/08/2005
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Title:
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METHOD FOR PERFORMING TRANSMISSION TUNING OF A MASK PATTERN TO IMPROVE PROCESS LATITUDE
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06/16/2009
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11035737
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01/18/2005
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Publication #:
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Pub Dt:
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06/09/2005
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Title:
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METHOD AND APPARATUS FOR DECOMPOSING SEMICONDUCTOR DEVICE PATTERNS INTO PHASE AND CHROME REGIONS FOR CHROMELESS PHASE LITHOGRAPHY
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Patent #:
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Issue Dt:
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07/10/2007
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Application #:
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11044711
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01/28/2005
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Publication #:
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Pub Dt:
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08/18/2005
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Title:
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METHOD OF PREDICTING AND MINIMIZING MODEL OPC DEVIATION DUE TO MIX/MATCH OF EXPOSURE TOOLS USING A CALIBRATED EIGEN DECOMPOSITION MODEL
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Patent #:
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03/11/2008
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Application #:
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11051559
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01/27/2005
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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METHOD OF MANUFACTURING RELIABILITY CHECKING AND VERIFICATION FOR LITHOGRAPHY PROCESS USING A CALIBRATED EIGEN DECOMPOSITION MODEL
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Patent #:
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Issue Dt:
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02/19/2008
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Application #:
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11055790
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Filing Dt:
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02/11/2005
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Title:
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OPTICAL PROXIMITY CORRECTION
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Patent #:
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Issue Dt:
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12/21/2010
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Application #:
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11092983
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03/30/2005
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Publication #:
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Pub Dt:
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01/12/2006
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Title:
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APPARATUS, METHOD AND PROGRAM PRODUCT FOR SUPPRESSING WAVINESS OF FEATURES TO BE PRINTED USING PHOTOLITHOGRAPHIC SYSTEMS
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04/08/2008
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11101649
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04/08/2005
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Publication #:
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Pub Dt:
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12/22/2005
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04/21/2009
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04/19/2005
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08/25/2005
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Title:
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03/25/2008
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05/05/2005
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11/09/2006
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Title:
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07/15/2008
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07/26/2005
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12/08/2005
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11/17/2009
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11208015
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08/22/2005
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04/06/2006
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04/13/2006
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02/24/2009
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01/26/2006
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09/21/2006
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12/29/2009
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09/14/2006
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03/16/2010
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04/12/2006
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12/07/2006
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Title:
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10/19/2010
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11415423
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05/02/2006
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11/08/2007
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03/06/2012
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06/22/2006
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02/08/2007
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02/17/2009
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08/01/2006
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07/05/2007
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02/22/2011
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08/10/2006
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03/22/2007
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01/26/2010
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08/14/2006
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01/04/2007
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06/08/2010
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12/07/2006
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02/23/2010
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10/27/2006
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02/22/2007
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11/03/2009
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11/08/2006
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05/31/2007
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10/20/2009
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01/17/2008
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10/26/2010
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01/22/2007
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05/24/2007
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09/28/2010
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01/31/2007
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08/23/2007
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02/23/2010
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06/28/2007
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09/13/2007
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08/10/2010
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03/06/2007
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07/12/2007
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11/02/2010
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04/06/2007
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01/24/2008
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09/13/2007
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10/21/2008
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06/27/2007
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10/25/2007
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