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08/08/1995
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Application #:
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08093353
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07/16/1993
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Title:
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GAS REPLENISHMENT METHOD AND APPARATUS FOR EXCIMER LASERS
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05/05/1998
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08583302
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Filing Dt:
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01/05/1996
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Title:
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07/08/1997
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08599744
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02/12/1996
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Title:
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08/12/1997
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08601907
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02/15/1996
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Title:
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02/17/1998
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08625500
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Filing Dt:
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03/29/1996
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Title:
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Patent #:
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Issue Dt:
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03/17/1998
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08739873
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Filing Dt:
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10/31/1996
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Title:
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04/27/1999
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08786186
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Filing Dt:
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01/21/1997
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Title:
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06/22/1999
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08803890
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Filing Dt:
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02/21/1997
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Title:
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11/10/1998
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08842305
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Filing Dt:
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04/23/1997
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Title:
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Patent #:
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10/06/1998
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08857395
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05/16/1997
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Title:
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COMPACT EXCIMER LASER INSULATOR WITH INTEGRAL PRE-IONIZER
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06/23/1998
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08857608
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05/16/1997
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Title:
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01/05/1999
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08869239
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06/04/1997
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Title:
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Patent #:
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10/19/1999
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08886715
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07/01/1997
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Title:
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08893904
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07/11/1997
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Title:
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11/02/1999
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08896384
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07/18/1997
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Title:
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12/22/1998
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08897665
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07/21/1997
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Title:
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06/20/2000
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08898630
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07/22/1997
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Title:
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Patent #:
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10/31/2000
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08908862
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08/08/1997
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Title:
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Patent #:
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03/23/1999
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08915030
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Filing Dt:
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08/20/1997
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Title:
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Patent #:
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11/10/1998
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08926948
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Filing Dt:
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09/10/1997
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Title:
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Patent #:
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12/19/2000
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08939611
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09/29/1997
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Title:
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11/09/1999
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08947474
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10/10/1997
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Title:
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Patent #:
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05/04/1999
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08987127
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12/08/1997
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Title:
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NARROW BAND LASER WITH ETALON BASED OUTPUT COUPLER
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08/17/1999
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08990848
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12/15/1997
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Title:
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CURRENT REVERSAL PREVENTION CIRCUIT FOR A PULSED GAS DISCHARGE LASER
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Issue Dt:
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11/09/1999
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08995832
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Filing Dt:
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12/22/1997
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Title:
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Patent #:
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11/02/1999
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09016525
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01/30/1998
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Title:
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FLUORINE CONTROL SYSTEM FOR EXCIMER LASERS
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Patent #:
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Issue Dt:
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12/21/1999
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09034870
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03/04/1998
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Title:
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Patent #:
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Issue Dt:
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11/02/1999
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09036158
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Filing Dt:
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03/06/1998
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Title:
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LASER CHAMBER WITH MINIMIZED ACOUSTIC AND SHOCK WAVE DISTURBANCES
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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09041474
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Filing Dt:
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03/11/1998
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Title:
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RELIABLE, MODULAR, PRODUCTION QUALITY NARROW-BAND KRF EXCIMER LASER
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Patent #:
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Issue Dt:
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01/18/2000
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09069019
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Filing Dt:
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04/27/1998
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Title:
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MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT
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Patent #:
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05/23/2000
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09081374
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05/19/1998
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Title:
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Patent #:
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01/11/2000
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09082139
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05/20/1998
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Title:
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NARROW BAND EXCIMER LASER WITH GAS ADDITIVE
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Patent #:
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01/11/2000
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09089330
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06/02/1998
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Title:
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LASER CHAMBER INCORPORATING CERAMIC INSULATORS COATED WITH DIELECTRIC MATERIAL
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04/18/2000
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09093416
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06/08/1998
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Title:
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PLASMA FOCUS HIGH ENERGY PHOTON SOURCE
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09/07/1999
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09100311
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06/19/1998
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Title:
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HIGH VOLTAGE CABLE INTERLOCK CIRCUIT
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12/19/2000
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09102241
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06/22/1998
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Title:
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BEAM EXPANDER FOR ULTRAVIOLET LASERS
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Patent #:
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Issue Dt:
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05/09/2000
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09108899
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07/01/1998
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Title:
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FLEXIBLE SEAL FOR A LASER SYSTEM
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02/22/2000
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09109596
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07/02/1998
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Title:
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AUTOMATIC FLUORINE CONTROL SYSTEM
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05/08/2001
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09112631
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07/09/1998
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Title:
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MULTIPLEXER FOR LASER LITHOGRAPHY
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08/10/1999
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09118773
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07/18/1998
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Title:
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HIGH PULSE RATE PULSE POWER SYSTEM
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Patent #:
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Issue Dt:
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01/18/2005
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09122900
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07/27/1998
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01/31/2002
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Title:
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COMPACT DUCTLESS COOLING WITH HEAT EXCHANGERS
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03/27/2001
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09141068
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08/27/1998
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Title:
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BLOWER ASSEMBLY FOR A PULSED LASER SYSTEM INCORPORATING CERAMIC BEARINGS
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Patent #:
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02/27/2001
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09143040
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08/28/1998
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05/09/2000
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09143633
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08/28/1998
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Title:
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05/23/2000
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09148514
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09/04/1998
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EXCIMER LASER WITH PULSE MULTIPLIER
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10/03/2000
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09157067
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09/18/1998
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11/02/1999
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09162341
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09/28/1998
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Title:
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11/02/1999
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09165593
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10/02/1998
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Title:
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WAVELENGTH SYSTEM FOR AN EXCIMER LASER
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04/03/2001
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09169195
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10/09/1998
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Title:
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08/29/2000
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09174155
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10/16/1998
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Title:
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GAS LASER CHAMBER/OPTICS SUPPORT STRUCTURE
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05/09/2000
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09183220
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10/29/1998
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Title:
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LONG LIFE FUSED SILICA ULTRAVIOLET OPTICAL ELEMENTS
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11/06/2001
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09183860
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10/30/1998
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Title:
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EXCIMER LASER WITH PULSE AND BEAM MULTIPLIER
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05/29/2001
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09191446
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11/12/1998
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Title:
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FLUORINE CONTROL SYSTEM WITH FLUORINE MONITOR
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02/13/2001
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09198081
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11/23/1998
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Title:
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AERODYNAMIC ELECTRODE SUPP0RT BAR
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02/22/2000
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09204111
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12/02/1998
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Title:
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NARROW BAND LASER WITH ETALON BASED OUTPUT COUPLER
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05/28/2002
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12/07/1998
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Title:
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02/22/2000
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09211825
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12/15/1998
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Title:
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HIGH PULSE RATE PULSE POWER SYSTEM WITH RESONANT POWER SUPPLY
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10/24/2000
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09217340
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12/21/1998
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Title:
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DURABLE ETALON BASED OUTPUT COUPLER
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05/09/2000
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01/22/1999
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Title:
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10/09/2001
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09241240
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02/01/1999
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Title:
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NARROW BAND UV LASER WITH VISIBLE LIGHT GUIDE LASER
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06/05/2001
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02/04/1999
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Title:
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07/25/2000
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02/11/1999
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Title:
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12/07/1999
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03/09/1999
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Title:
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REFLECTIVE OVERCOAT FOR REPLICATED DIFFRACTION GRATINGS
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05/16/2000
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09268243
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03/15/1999
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PLASMA FOCUS HIGH ENERGY PHOTON SOURCE
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12/11/2001
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09271041
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03/17/1999
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Title:
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RELIABLE, MODULAR, PRODUCTION QUALITY NARROW-BAND HIGH REP RATE ARF EXCIMER LASER
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08/15/2000
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09290851
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04/13/1999
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GAS DISCHARGE LASER WITH MAGNETIC BEARINGS AND MAGNETIC RELUCTANCE CENTERING FOR FAN DRIVE
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02/15/2000
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09290852
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04/13/1999
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GAS DISCHARGE LASER WITH ROLLER BEARINGS AND STABLE MAGNETIC AXIAL POSITIONING
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12/26/2000
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05/06/1999
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GAS MODULE VALVE AUTOMATED TEST FIXTURE
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04/29/2003
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05/10/1999
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03/21/2002
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Title:
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03/07/2000
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05/12/1999
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03/07/2000
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05/12/1999
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GAS DISCHARGE LASER WITH GAS TEMPERATURE CONTROL
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02/08/2000
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05/12/1999
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Title:
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02/13/2001
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09361551
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07/27/1999
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Title:
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NARROW BAND GAS DISCHARGE LASER WITH GAS ADDITIVE
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11/21/2000
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08/04/1999
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Title:
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AUTOMATIC FLUORINE CONTROL SYSTEM
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11/21/2000
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09370739
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08/09/1999
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HIGH PULSE RATE PULSE POWER SYSTEM WITH FAST RISE TIME AND LOW CURRENT
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03/27/2001
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09386938
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08/31/1999
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Title:
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LASER CHAMBER WITH FULLY INTEGRATED ELECTRODE FEEDTHROUGH MAIN INSULATOR
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04/03/2001
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09390579
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09/03/1999
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Title:
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SMART LASER WITH AUTOMATED BEAM QUALITY CONTROL
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11/13/2001
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09405615
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09/23/1999
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BANDWIDTH ESTIMATING TECHNIQUE FOR NARROW BAND LASER
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03/19/2002
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Filing Dt:
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10/20/1999
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Title:
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SINGLE CHAMBER GAS DISCHARGE LASER WITH LINE NARROWED SEED BEAM
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09442140
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Filing Dt:
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11/17/1999
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Title:
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VIRTUAL LASER OPERATOR
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09450919
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Filing Dt:
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11/29/1999
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Title:
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DEEP ULTRAVIOLET CATADIOPTRIC ANAMORPHIC TELESCOPE
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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09451407
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Filing Dt:
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11/30/1999
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Publication #:
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Pub Dt:
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01/17/2002
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Title:
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HIGH POWER GAS DISCHARGE LASER WITH LINE NARROWING UNIT
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09451750
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Filing Dt:
|
11/30/1999
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Title:
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ARF LASER WITH LOW PULSE ENERGY AND HIGH REP RATE
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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09451995
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Filing Dt:
|
11/30/1999
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Title:
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LONG-PULSE PULSE POWER SYSTEM FOR GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
|
05/28/2002
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Application #:
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09454693
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Filing Dt:
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12/03/1999
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Title:
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PORTABLE LASER BEAM MONITOR
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Patent #:
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Issue Dt:
|
12/04/2001
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Application #:
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09465427
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Filing Dt:
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12/21/1999
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Title:
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HIGH SPEED MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT
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Patent #:
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Issue Dt:
|
05/29/2001
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Application #:
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09470288
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Filing Dt:
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12/22/1999
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Title:
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HIGH PULSE RATE PULSE POWER SYSTEM WITH LIQUID COOLING
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Patent #:
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Issue Dt:
|
02/20/2001
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Application #:
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09470724
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Filing Dt:
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12/22/1999
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Title:
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NARROW BAND LASER WITH FINE WAVELENGTH CONTROL
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09490835
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Filing Dt:
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01/25/2000
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Title:
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Electric discharge laser with acoustic chirp correction
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Patent #:
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Issue Dt:
|
11/11/2003
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Application #:
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09518970
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Filing Dt:
|
03/06/2000
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Title:
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LASER DISCHARGE CHAMBER PASSIVATION BY PLASMA
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Patent #:
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Issue Dt:
|
10/15/2002
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Application #:
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09590961
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Filing Dt:
|
06/09/2000
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Title:
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GAS DISCHARGE LASER LONG LIFE ELECTRODES
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Patent #:
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Issue Dt:
|
04/13/2004
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Application #:
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09608543
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Filing Dt:
|
06/30/2000
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Title:
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BANDWIDTH CONTROL TECHIQUE FOR A LASER
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Patent #:
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Issue Dt:
|
07/30/2002
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Application #:
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09675492
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Filing Dt:
|
09/29/2000
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Title:
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GAS LASER CHAMBER WITH VERTICAL VIBRATION ISOLATOR
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Patent #:
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Issue Dt:
|
08/27/2002
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Application #:
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09684629
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Filing Dt:
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10/06/2000
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Title:
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EXTREME REPETITION RATE GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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07/27/2010
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Application #:
|
11091005
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Filing Dt:
|
03/25/2005
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Title:
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WAVEMETER FOR GAS DISCHARGE LASER
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