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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08414340
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Filing Dt:
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03/31/1995
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Title:
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TIME OPTIMAL TRAJECTORY FOR CLUSTER TOOL ROBOTS
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Patent #:
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Issue Dt:
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11/26/1996
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Application #:
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08421533
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Filing Dt:
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04/13/1995
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Title:
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ARTICULATED ARM TRANSFER DEVICE
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Patent #:
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Issue Dt:
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02/24/1998
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Application #:
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08434012
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Filing Dt:
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05/03/1995
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Title:
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ARTICULATED ARM TRANSFER DEVICE
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Patent #:
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Issue Dt:
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12/31/1996
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Application #:
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08480128
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Filing Dt:
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06/07/1995
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Title:
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PASSIVE GAS SUBSTRATE THERMAL CONDITIONING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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03/11/1997
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Application #:
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08498597
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Filing Dt:
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07/06/1995
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Title:
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DOOR DRIVE MECHANISMS FOR SUBSTRATE CARRIER AND LOAD LOCK
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Patent #:
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Issue Dt:
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12/31/1996
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Application #:
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08498835
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Filing Dt:
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07/06/1995
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Title:
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LOAD ARM FOR LOAD LOCK
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08498859
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Filing Dt:
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07/06/1995
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Title:
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BATCHLOADER FOR SUBSTRATE CARRIER ON LOAD LOCK
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Patent #:
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Issue Dt:
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03/25/1997
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Application #:
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08499069
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Filing Dt:
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07/06/1995
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Title:
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CLUSTER TOOL BATCHLOADER OF SUBSTRATE CARRIER
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Patent #:
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Issue Dt:
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05/28/1996
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Application #:
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08520811
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Filing Dt:
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08/30/1995
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Title:
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LOW-GAS TEMPERATURE STABILIZATION SYSTEM
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Patent #:
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Issue Dt:
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07/15/1997
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Application #:
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08549995
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Filing Dt:
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10/27/1995
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH DUAL SUBSTRATE HOLDERS
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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08587087
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Filing Dt:
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01/16/1996
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH DOUBLE SUBSTRATE HOLDERS
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08591278
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Filing Dt:
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01/25/1996
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Title:
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SUBSTRATE HEATING APPARATUS WITH CANTILEVERED LIFTING ARM
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Patent #:
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Issue Dt:
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04/21/1998
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Application #:
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08651395
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Filing Dt:
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05/22/1996
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Title:
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WAFER TRANSFER SYSTEM HAVING VERTICAL LIFTING CAPABILITY
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08654334
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Filing Dt:
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05/28/1996
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Title:
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METHOD FOR HEATING OR COOLING WAFERS
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Patent #:
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Issue Dt:
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06/16/1998
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Application #:
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08655598
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Filing Dt:
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05/30/1996
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Title:
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ROBOT HANDLING APPARATUS
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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08662930
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Filing Dt:
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06/13/1996
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Title:
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MULTI-LEVEL SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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08677402
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Filing Dt:
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07/09/1996
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Title:
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DIRECT DRIVEN ROBOT
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Patent #:
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Issue Dt:
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09/21/1999
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Application #:
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08679845
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Filing Dt:
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07/15/1996
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Title:
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BATCH LOADER ARM
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08716943
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Filing Dt:
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09/20/1996
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Title:
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COAXIAL DRIVE LOADER ARM
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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08716995
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Filing Dt:
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09/20/1996
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Title:
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SWAP OUT PLATE AND ASSEMBLY
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Patent #:
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Issue Dt:
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06/23/1998
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Application #:
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08722353
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Filing Dt:
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09/27/1996
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Title:
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COAXIAL DRIVE ELEVATOR
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08740496
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Filing Dt:
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10/30/1996
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Title:
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ARTICULATED ARM TRANSFER DEVICE
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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08786708
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Filing Dt:
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01/21/1997
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH ANGLED ARMS
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Patent #:
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Issue Dt:
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09/09/1997
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Application #:
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08789510
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Filing Dt:
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01/27/1997
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Title:
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BATCHLOADER FOR LOAD LOCK
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Patent #:
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Issue Dt:
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04/28/1998
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Application #:
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08833768
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Filing Dt:
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04/09/1997
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Title:
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WIDE WRIST ARTICULATED ARM TRANSFER DEVICE
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08864264
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Filing Dt:
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05/28/1997
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Title:
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TIME OPTIMAL TRAJECTORY FOR CLUSTER TOOL ROBOTS
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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08867567
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Filing Dt:
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06/02/1997
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Title:
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LOW BACKGROUND MULTI-WELL PLATES AND PLATFORMS FOR SPECTROSCOPIC MEASUREMENTS
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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08867584
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Filing Dt:
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06/02/1997
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Title:
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LOW BACKGROUND MULTI-WELL PLATES WITH GREATER THAN 864 WELLS FOR SPECTROSCOPIC MEASUREMENTS
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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08868018
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Filing Dt:
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06/03/1997
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Title:
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LOW BACKGROUND MULTI-WELL PLATES FOR FLUORESCENCE MEASUREMENTS OF BIOLOGICAL AND BIOCHEMICAL SAMPLES
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Patent #:
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Issue Dt:
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06/08/1999
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Application #:
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08868049
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Filing Dt:
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06/03/1997
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Title:
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LOW BACKGROUND MULTI-WELL PLATES WITH GREATER THAN 864 WELLS FOR FLUORESCENCE MEASUREMENTS OF BIOLOGICAL AND BIOCHEMICAL SAMPLES
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08873693
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Filing Dt:
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06/12/1997
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Title:
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SUBSTRATE TRANSPORT DRIVE SYSTEM
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08874122
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Filing Dt:
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06/12/1997
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Title:
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LOW VIBRATION THROTTLING DEVICE FOR THROTTLE-CYCLE REFRIGERATORS
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Patent #:
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Issue Dt:
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06/15/1999
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Application #:
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08882367
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Filing Dt:
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06/25/1997
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Title:
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SUBSTRATE HEATING APPARATUS WITH GLASS-CERAMIC PANELS AND THIN FILM RIBBON HEATER ELEMENT
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Patent #:
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Issue Dt:
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09/26/2000
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Application #:
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08889516
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Filing Dt:
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07/08/1997
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Title:
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SUBSTRATE HOLDER HAVING VACUUM HOLDING AND GRAVITY HOLDING
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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08890862
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Filing Dt:
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07/10/1997
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Title:
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REMOVABLE MEMORY DEVICE TO STORE ROBOTIC APPLICATION AND CONFIGURATION DATA
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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08891523
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Filing Dt:
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07/11/1997
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Title:
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ROBOT ARM RELOCATION SYSTEM
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08891532
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Filing Dt:
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07/11/1997
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Title:
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SUBSTRATE PROCESSING APPARATUS HAVING A SUBSTRATE TRANSPORT WITH A FRONT END EXTENSION AND AN INTERNAL SUBSTRATE BUFFER
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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08891543
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Filing Dt:
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07/11/1997
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Title:
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SMIF POD STORAGE, DELIVERY AND RETRIEVAL SYSTEM
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Patent #:
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Issue Dt:
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11/17/1998
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Application #:
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08891550
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Filing Dt:
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07/11/1997
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Title:
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AUTOMATIC POSITIVE PRESSURE SEAL ACCESS DOOR
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08912213
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Filing Dt:
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08/15/1997
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Title:
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MODULAR ENVIRONMENTAL CONTROL UNIT FOR CLEANROOMS
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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08918860
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Filing Dt:
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08/26/1997
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Title:
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DEVICE AND METHOD FOR SENSING WAFER-SHAPED OBJECTS AND SHELVES IN A CONTAINER
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08941444
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Filing Dt:
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09/30/1997
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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05/04/1999
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Application #:
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08957141
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Filing Dt:
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10/24/1997
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Title:
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ARTICULATED ARM TRANSFER DEVICE
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Patent #:
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Issue Dt:
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09/12/2000
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Application #:
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08979194
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Filing Dt:
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11/26/1997
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Title:
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APPARATUS AND METHOD FOR HIGH-SPEED TRANSFER AND CENTERING OF WAFER SUBSTRATES
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09003542
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Filing Dt:
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01/06/1998
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Title:
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METHOD FOR ELECTRONICALLY TRACKING CONTAINERS TO AVOID MISPROCESSING OF CONTENTS
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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09008615
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Filing Dt:
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01/16/1998
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|
Title:
|
ROBOT MOUNTING DE-COUPLING TECHNIQUE
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Patent #:
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Issue Dt:
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01/09/2001
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Application #:
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09030578
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Filing Dt:
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02/24/1998
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Title:
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LOW FLUORESCENCE ASSAY PLATFORMS AND RELATED METHODS FOR DRUG DISCOVERY
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09044820
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Filing Dt:
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03/20/1998
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Title:
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METHOD OF TRANSFERRING SUBSTRATES WITH TWO DIFFERENT SUBSTRATE HOLDING END EFFECTORS
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09049314
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Filing Dt:
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03/27/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH SMALL BATCH LOAD LOCK
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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09049315
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Filing Dt:
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03/27/1998
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Title:
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METERED GAS CONTROL IN A SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09049330
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Filing Dt:
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03/27/1998
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Title:
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KINEMATIC COUPLING COMPATIBLE PASSIVE INTERFACE SEAL
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Patent #:
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Issue Dt:
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04/15/2003
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Application #:
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09072097
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Filing Dt:
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05/04/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH COAXIAL DRIVE SHAFTS AND DUAL INDEPENDENT SCARA ARMS
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09084457
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Filing Dt:
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05/26/1998
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Title:
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SINGLE SUBSTRATE LOAD LOCK WITH OFFSET COOL MODULE AND BUFFER CHAMBER
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09084754
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Filing Dt:
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05/26/1998
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Title:
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DUAL PLATE GAS ASSISTED HEATER MODULE
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09089752
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Filing Dt:
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06/02/1998
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Title:
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APPARATUS AND METHOD FOR TRANSPORTING SUBSTRATES
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Patent #:
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Issue Dt:
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07/30/2002
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Application #:
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09111553
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Filing Dt:
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07/07/1998
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Title:
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MULTI-WELL PLATFORMS, CADDIES, LIDS AND COMBINATIONS THEREOF
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09113599
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Filing Dt:
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07/10/1998
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Title:
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DUAL ARM SUBSTRATE HANDLING ROBOT WITH A BATCH LOADER
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09113784
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Filing Dt:
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07/10/1998
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Title:
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MATERIAL HANDLING DEVICE WITH OVERCENTER ARMS AND METHOD FOR USE THEREOF
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09114549
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Filing Dt:
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07/13/1998
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Title:
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VACUUM NETWORK CONTROLLER
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09115414
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Filing Dt:
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07/14/1998
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Title:
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POD DOOR TO PORT DOOR RETENTION SYSTEM
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09115526
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Filing Dt:
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07/13/1998
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Title:
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ERGONOMIC, VARIABLE SIZE, BOTTOM OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09130254
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Filing Dt:
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08/06/1998
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Title:
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POD TO PORT DOOR RETENTION AND EVACUATION SYSTEM
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09134662
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Filing Dt:
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07/30/1998
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Title:
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MICROPLATE LID
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09145008
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Filing Dt:
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09/01/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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09145704
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Filing Dt:
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09/02/1998
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Title:
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TILT AND GO LOAD PORT INTERFACE ALIGNMENT SYSTEM
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09158560
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Filing Dt:
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09/22/1998
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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SAFETY DEVICE FOR A MOVING SYSTEM
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09162334
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Filing Dt:
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09/28/1998
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Title:
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METHOD FOR IN-CASSETTE WAFER CENTER DETERMINATION
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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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09163844
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Filing Dt:
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09/30/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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09172945
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Filing Dt:
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10/14/1998
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Title:
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MODULAR FILTER FAN UNIT
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09173710
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Filing Dt:
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10/15/1998
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Title:
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WAFER MAPPING SYSTEM
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09184561
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Filing Dt:
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11/02/1998
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Title:
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DEVICE FOR RECEIVING TRANSPORT CONTAINERS AT A LOADING AND UNLOADING STATION
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09184562
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Filing Dt:
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11/02/1998
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Publication #:
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Pub Dt:
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11/22/2001
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Title:
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DEVICE AND METHOD FOR DETECTING AND DISTINGUISHING SHELF-FORMING SUPPORTS IN CASSETTES AND DISK-SHAPED OBJECTS DEPOSITED THEREON
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09185222
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Filing Dt:
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11/03/1998
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Title:
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AUTOMATED DOOR ASSEMBLY FOR USE IN SEMICONDUCTOR WAFER MANUFACTURING
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09204320
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Filing Dt:
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12/02/1998
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Title:
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PASSIVELY ACTIVATED VALVE FOR CARRIER PURGING
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09204747
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Filing Dt:
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12/02/1998
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Title:
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ROBOT ARM WITH SPECIMEN EDGE GRIPPING END EFFECTOR
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09207957
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Filing Dt:
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12/09/1998
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Title:
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INTEGRATED MATERIAL MANAGEMENT MODULE
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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09222809
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Filing Dt:
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12/30/1998
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Title:
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VARIABLE LOAD REFRIGERATION SYSTEM PARTICULARY FOR CRYOGENIC TEMPATURES
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09222810
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Filing Dt:
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12/30/1998
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Title:
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MULTIPLE CIRCUIT CRYOGENIC LIQUEFACTION OF INDUSTRIAL GAS
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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09222812
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Filing Dt:
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12/30/1998
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Title:
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METHOD FOR PROVIDING REFRIGERATION
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Patent #:
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Issue Dt:
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03/28/2000
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Application #:
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09222813
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Filing Dt:
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12/30/1998
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Title:
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SINGLE CIRCUIT CRYOGENIC LIQUEFACTION OF INDUSTRIAL GAS
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Patent #:
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Issue Dt:
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03/28/2000
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Application #:
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09222814
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Filing Dt:
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12/30/1998
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Title:
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CRYOGENIC INDUSTRIAL GAS LIQUEFACTION WITH HYBRID REFRIGERATION GENERATION
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Patent #:
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Issue Dt:
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05/23/2000
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Application #:
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09222815
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Filing Dt:
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12/30/1998
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Title:
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MULTICOMPONENT REFRIGERANT COOLING WITH INTERNAL RECYCLE
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09222816
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Filing Dt:
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12/30/1998
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Title:
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METHOD FOR CARRYING OUT SUBAMBIENT TEMPERATURE, ESPECIALLY CRYOGENIC, SEPARATION USING REFRIGERATION FROM A MULTICOMPONENT REFRIGERANT FLUID
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09223508
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Filing Dt:
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12/30/1998
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Publication #:
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Pub Dt:
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11/01/2001
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE ARMS ON A COMMON AXIS OF ROTATION
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09224134
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Filing Dt:
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12/31/1998
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Title:
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SELF-TEACHING ROBOT ARM POSITION METHOD
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09228305
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Filing Dt:
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01/12/1999
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH DOUBLE SUBSTRATE HOLDERS
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09243516
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Filing Dt:
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02/01/1999
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Title:
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SUBSTRATE CARRIER AS BATCHLOADER
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Patent #:
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Issue Dt:
|
04/02/2002
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Application #:
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09247695
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Filing Dt:
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02/10/1999
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Title:
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RETICLE TRANSFER SYSTEM
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Patent #:
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Issue Dt:
|
04/04/2000
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Application #:
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09274067
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Filing Dt:
|
03/22/1999
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Title:
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METHOD OF HEATING A SUBSTRATE WITH MULTIPLE SELECTIVELY DEACTUATED HEATERS
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09280751
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Filing Dt:
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03/29/1999
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Title:
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HYBRID HEATER WITH CERAMIC FOIL SERRATED PLATE AND GAS ASSIST
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09312343
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Filing Dt:
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05/14/1999
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Title:
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ROBOT ARM WITH SPECIMEN SENSING AND EDGE GRIPPING END EFFECTOR
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09313945
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Filing Dt:
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05/18/1999
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Title:
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CASSETTE BUFFERING WITHIN A MINIENVIRONMENT
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09314654
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Filing Dt:
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05/19/1999
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Title:
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CORROSION RESISTANT EXOSKELETON ARM LINKAGE ASSEMBLY
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Patent #:
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Issue Dt:
|
03/05/2002
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Application #:
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09318993
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Filing Dt:
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05/26/1999
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Title:
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SEAL RING USING GAS CURTAIN
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09322858
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Filing Dt:
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05/28/1999
|
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Title:
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SYSTEM OF TRAJECTORY PLANINING FOR ROBOTIC MANIPULATORS BASED ON PRE-DEFINED TIME-OPTIMUM TRAJECTORY SHAPES
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09346166
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Filing Dt:
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07/01/1999
|
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Title:
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UNIVERSAL TOOL INTERFACE AND/OR WORKPIECE TRANSFER APPARATUS FOR SMIF AND OPEN POD APPLICATIONS
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|
|
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09346867
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Filing Dt:
|
07/02/1999
|
|
Title:
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TOOL FOR ALIGNING A ROBOT ARM TO A CASSETTE FOR HOLDING SEMICONDUCTOR WAFERS
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|
|
|
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Patent #:
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|
Issue Dt:
|
11/20/2001
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Application #:
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09351986
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Filing Dt:
|
07/12/1999
|
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Title:
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SMIF-COMPATIBLE OPEN CASSETTE ENCLOSURE
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Patent #:
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Issue Dt:
|
08/28/2001
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Application #:
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09352155
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Filing Dt:
|
07/12/1999
|
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Title:
|
FIMS TRANSPORT BOX LOAD INTERFACE
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Patent #:
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Issue Dt:
|
11/20/2001
|
Application #:
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09362490
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Filing Dt:
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07/28/1999
|
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Publication #:
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Pub Dt:
|
11/15/2001
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH VERTICALLY STACKED LOAD LOCK AND SUBSTRATE TRANSPORT ROBOT
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