Total properties:
20
|
|
Patent #:
|
|
Issue Dt:
|
01/28/2003
|
Application #:
|
09392371
|
Filing Dt:
|
09/08/1999
|
Title:
|
APPARATUS AND METHOD FOR GROWTH OF A THIN FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/2003
|
Application #:
|
09611536
|
Filing Dt:
|
07/07/2000
|
Title:
|
ATOMIC LAYER DEPOSITION
|
|
|
Patent #:
|
|
Issue Dt:
|
04/15/2003
|
Application #:
|
09835737
|
Filing Dt:
|
04/16/2001
|
Publication #:
|
|
Pub Dt:
|
04/11/2002
| | | | |
Title:
|
PROCESS FOR PRODUCING OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/10/2010
|
Application #:
|
10148525
|
Filing Dt:
|
08/27/2002
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
Title:
|
ATOMIC-LAYER-CHEMICAL-VAPOR-DEPOSITION OF FILMS THAT CONTAIN SILICON DIOXIDE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/28/2006
|
Application #:
|
10317266
|
Filing Dt:
|
12/10/2002
|
Publication #:
|
|
Pub Dt:
|
06/05/2003
| | | | |
Title:
|
APPARATUS AND METHOD FOR GROWTH OF A THIN FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/2004
|
Application #:
|
10317275
|
Filing Dt:
|
12/10/2002
|
Publication #:
|
|
Pub Dt:
|
05/15/2003
| | | | |
Title:
|
APPARATUS AND METHOD FOR GROWTH OF A THIN FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10410718
|
Filing Dt:
|
04/08/2003
|
Publication #:
|
|
Pub Dt:
|
11/20/2003
| | | | |
Title:
|
PROCESS FOR PRODUCING OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/2006
|
Application #:
|
10461893
|
Filing Dt:
|
06/12/2003
|
Publication #:
|
|
Pub Dt:
|
11/13/2003
| | | | |
Title:
|
ATOMIC LAYER CVD
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2010
|
Application #:
|
10678766
|
Filing Dt:
|
10/02/2003
|
Publication #:
|
|
Pub Dt:
|
04/08/2004
| | | | |
Title:
|
METHOD OF GROWING OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/2008
|
Application #:
|
10917906
|
Filing Dt:
|
08/13/2004
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
PROCESS FOR PRODUCING YTTRIUM OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2010
|
Application #:
|
11026208
|
Filing Dt:
|
12/30/2004
|
Publication #:
|
|
Pub Dt:
|
07/06/2006
| | | | |
Title:
|
METHOD OF PULSING VAPOR PRECURSORS IN AN ALD REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2011
|
Application #:
|
11096861
|
Filing Dt:
|
03/31/2005
|
Publication #:
|
|
Pub Dt:
|
03/23/2006
| | | | |
Title:
|
DEPOSITION OF TIN FILMS IN A BATCH REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/2008
|
Application #:
|
11605615
|
Filing Dt:
|
11/27/2006
|
Publication #:
|
|
Pub Dt:
|
04/26/2007
| | | | |
Title:
|
APPARATUS AND METHOD FOR GROWTH OF A THIN FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/10/2010
|
Application #:
|
11615827
|
Filing Dt:
|
12/22/2006
|
Publication #:
|
|
Pub Dt:
|
07/19/2007
| | | | |
Title:
|
METHOD OF GROWING OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2010
|
Application #:
|
11634043
|
Filing Dt:
|
12/04/2006
|
Publication #:
|
|
Pub Dt:
|
04/05/2007
| | | | |
Title:
|
CHEMICAL VAPOR DEPOSITION OF TIN FILMS IN A BATCH REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/2010
|
Application #:
|
11864663
|
Filing Dt:
|
09/28/2007
|
Publication #:
|
|
Pub Dt:
|
01/17/2008
| | | | |
Title:
|
PROCESS FOR PRODUCING ZIRCONIUM OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/2013
|
Application #:
|
12340551
|
Filing Dt:
|
12/19/2008
|
Publication #:
|
|
Pub Dt:
|
08/20/2009
| | | | |
Title:
|
SILICON DIOXIDE THIN FILMS BY ALD
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2011
|
Application #:
|
12820633
|
Filing Dt:
|
06/22/2010
|
Publication #:
|
|
Pub Dt:
|
10/21/2010
| | | | |
Title:
|
PROCESS FOR PRODUCING ZIRCONIUM OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/2016
|
Application #:
|
12917307
|
Filing Dt:
|
11/01/2010
|
Publication #:
|
|
Pub Dt:
|
05/05/2011
| | | | |
Title:
|
METHOD OF GROWING OXIDE THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/18/2014
|
Application #:
|
13183016
|
Filing Dt:
|
07/14/2011
|
Publication #:
|
|
Pub Dt:
|
01/19/2012
| | | | |
Title:
|
METHOD OF CVD-DEPOSITING A FILM HAVING A SUBSTANTIALLY UNIFORM FILM THICKNESS
|
|