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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09766759
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Filing Dt:
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01/22/2001
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Title:
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CATALYTIC REACTIVE PAD FOR METAL CMP
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09788082
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Filing Dt:
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02/16/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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POLISHING DISK WITH END-POINT DETECTION PORT
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Patent #:
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Issue Dt:
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03/14/2006
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Application #:
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09877341
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Filing Dt:
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06/08/2001
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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DRAG REDUCING AGENT SLURRIES HAVING ALFOL ALCOHOLS AND PROCESSES FOR FORMING DRAG REDUCING AGENT SLURRIES HAVING ALFOL ALCOHOLS
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09961934
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Filing Dt:
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09/24/2001
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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RARE EARTH SALT/OXIDIZER-BASED CMP METHOD
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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09962784
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Filing Dt:
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09/25/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Title:
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ALPHA OLEFIN MONOMER PARTITIONING AGENTS FOR DRAG REDUCING AGENTS AND METHODS OF FORMING DRAG REDUCING AGENTS USING ALPHA OLEFIN MONOMER PARTITIONING AGENTS
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Patent #:
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Issue Dt:
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03/16/2004
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Application #:
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10033152
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Filing Dt:
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10/24/2001
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Publication #:
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Pub Dt:
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04/24/2003
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Title:
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BORON-CONTAINING POLISHING SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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10047763
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Filing Dt:
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01/15/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Title:
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METHODS FOR FORMING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYOLEFINS FOR USE AS DRAG REDUCING AGENTS
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10051241
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Filing Dt:
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01/18/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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CMP SYSTEMS AND METHODS UTILIZING AMINE-CONTAINING POLYMERS
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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10054059
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Filing Dt:
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01/22/2002
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Title:
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CMP METHOD FOR NOBLE METALS
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10073844
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Filing Dt:
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02/11/2002
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Title:
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ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY CHARGED POLYELECTROLYTES FOR CMP
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10083985
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Filing Dt:
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02/27/2002
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Publication #:
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Pub Dt:
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09/05/2002
| | | | |
Title:
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METHOD FOR MANUFACTURING A POLISHING PAD HAVING A COMPRESSED TRANSLUCENT REGION
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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10092406
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Filing Dt:
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03/05/2002
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Publication #:
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Pub Dt:
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09/11/2003
| | | | |
Title:
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METHANOL-CONTAINING SILICA-BASED CMP COMPOSITIONS
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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10142681
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Filing Dt:
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05/10/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Title:
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COMPOSITIONS AND METHODS FOR DIELECTRIC CMP
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Patent #:
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Issue Dt:
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12/13/2005
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Application #:
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10165100
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Filing Dt:
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06/07/2002
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Publication #:
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Pub Dt:
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12/11/2003
| | | | |
Title:
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CMP COMPOSITIONS FOR LOW-K DIELECTRIC MATERIALS
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Patent #:
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Issue Dt:
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09/01/2009
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Application #:
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10170785
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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BULK POLYMERIZATION REACTOR METHODS
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10199704
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Filing Dt:
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07/19/2002
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Publication #:
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Pub Dt:
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01/22/2004
| | | | |
Title:
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POLISHING COMPOSITION CONTAINING CONDUCTING POLYMER
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10231047
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Filing Dt:
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08/30/2002
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Publication #:
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Pub Dt:
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04/17/2003
| | | | |
Title:
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SLURRY FOR MECHANICAL POLISHING (CMP) OF METALS AND USE THEREOF
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Patent #:
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Issue Dt:
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11/23/2004
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Application #:
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10246280
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Filing Dt:
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09/18/2002
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Publication #:
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Pub Dt:
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07/03/2003
| | | | |
Title:
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METHOD FOR COPPER CMP USING POLYMERIC COMPLEXING AGENTS
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10269864
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Filing Dt:
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10/11/2002
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Publication #:
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Pub Dt:
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12/11/2003
| | | | |
Title:
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CMP METHOD UTILIZING AMPHIPHILIC NONIONIC SURFACTANTS
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10281782
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Filing Dt:
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10/28/2002
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Publication #:
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Pub Dt:
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11/27/2003
| | | | |
Title:
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MICROPOROUS POLISHING PADS
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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10282489
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Filing Dt:
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10/28/2002
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Publication #:
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Pub Dt:
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04/29/2004
| | | | |
Title:
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TRANSPARENT MICROPOROUS MATERIALS FOR CMP
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10295836
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Filing Dt:
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11/18/2002
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Title:
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POLISHING COMPOSITIONS AND USE THEREOF
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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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10361520
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Filing Dt:
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02/10/2003
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Publication #:
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Pub Dt:
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08/12/2004
| | | | |
Title:
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CMP PAD WITH COMPOSITE TRANSPARENT WINDOW
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10364243
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Filing Dt:
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02/11/2003
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Publication #:
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Pub Dt:
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08/12/2004
| | | | |
Title:
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MIXED-ABRASIVE POLISHING COMPOSITION AND METHOD FOR USING THE SAME
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10368275
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Filing Dt:
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02/18/2003
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Title:
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CATALYST/OXIDIZER-BASED CMP SYSTEM FOR ORGANIC POLYMER FILMS
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|
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10376172
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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09/25/2003
| | | | |
Title:
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CMP METHOD FOR NOBLE METALS
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|
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Patent #:
|
|
Issue Dt:
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05/16/2006
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Application #:
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10419580
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/21/2004
| | | | |
Title:
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COATED METAL OXIDE PARTICLES FOR CMP
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10463680
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
Title:
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
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Patent #:
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Issue Dt:
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02/14/2006
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Application #:
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10463721
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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ULTRASONIC WELDING METHOD FOR THE MANUFACTURE OF A POLISHING PAD COMPRISING AN OPTICALLY TRANSMISSIVE REGION
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Patent #:
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Issue Dt:
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02/14/2006
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Application #:
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10463730
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
Title:
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POLISHING PAD WITH ORIENTED PORE STRUCTURE
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|
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Patent #:
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Issue Dt:
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10/28/2008
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Application #:
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10543848
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Filing Dt:
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07/29/2005
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Publication #:
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Pub Dt:
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09/07/2006
| | | | |
Title:
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METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
|
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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10568727
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Filing Dt:
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02/17/2006
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Publication #:
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Pub Dt:
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03/06/2008
| | | | |
Title:
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CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME
|
|
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Patent #:
|
|
Issue Dt:
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01/09/2007
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Application #:
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10610407
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Filing Dt:
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06/30/2003
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Publication #:
|
|
Pub Dt:
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12/30/2004
| | | | |
Title:
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CMP OF NOBLE METALS
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|
|
Patent #:
|
|
Issue Dt:
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06/03/2008
|
Application #:
|
10616335
|
Filing Dt:
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07/09/2003
|
Publication #:
|
|
Pub Dt:
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01/15/2004
| | | | |
Title:
|
CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2009
|
Application #:
|
10660379
|
Filing Dt:
|
09/11/2003
|
Publication #:
|
|
Pub Dt:
|
03/17/2005
| | | | |
Title:
|
CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
03/27/2007
|
Application #:
|
10666797
|
Filing Dt:
|
09/19/2003
|
Publication #:
|
|
Pub Dt:
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03/24/2005
| | | | |
Title:
|
POLISHING PAD WITH RECESSED WINDOW
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2007
|
Application #:
|
10753138
|
Filing Dt:
|
01/07/2004
|
Publication #:
|
|
Pub Dt:
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07/07/2005
| | | | |
Title:
|
CHEMICAL-MECHANICAL POLISHING OF METALS IN AN OXIDIZED FORM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2007
|
Application #:
|
10755154
|
Filing Dt:
|
01/09/2004
|
Publication #:
|
|
Pub Dt:
|
07/14/2005
| | | | |
Title:
|
POLISHING SYSTEM COMPRISING A HIGHLY BRANCHED POLYMER
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2005
|
Application #:
|
10792183
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Filing Dt:
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03/03/2004
|
Publication #:
|
|
Pub Dt:
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09/02/2004
| | | | |
Title:
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MICROPOROUS POLISHING PADS
|
|
|
Patent #:
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|
Issue Dt:
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05/31/2005
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Application #:
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10792344
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Filing Dt:
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03/03/2004
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Publication #:
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Pub Dt:
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09/16/2004
| | | | |
Title:
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MICROPOROUS POLISHING PADS
|
|
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Patent #:
|
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Issue Dt:
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08/30/2005
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Application #:
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10792348
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Filing Dt:
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03/03/2004
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Publication #:
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|
Pub Dt:
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09/02/2004
| | | | |
Title:
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MICROPOROUS POLISHING PADS
|
|
|
Patent #:
|
|
Issue Dt:
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06/13/2006
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Application #:
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10807079
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Filing Dt:
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03/23/2004
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Publication #:
|
|
Pub Dt:
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09/29/2005
| | | | |
Title:
|
LOW SURFACE ENERGY CMP PAD
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2008
|
Application #:
|
10810070
|
Filing Dt:
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03/25/2004
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Publication #:
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|
Pub Dt:
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01/13/2005
| | | | |
Title:
|
CUSTOMIZED POLISH PADS FOR CHEMICAL MECHANICAL PLANARIZATION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/2006
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Application #:
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10826580
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Filing Dt:
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04/16/2004
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Publication #:
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Pub Dt:
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10/07/2004
| | | | |
Title:
|
ALCOHOL ABSORBED POLYALPHAOLEFIN DRAG REDUCING AGENTS
|
|
|
Patent #:
|
|
Issue Dt:
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12/11/2007
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Application #:
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10855276
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Filing Dt:
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05/27/2004
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Publication #:
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Pub Dt:
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11/18/2004
| | | | |
Title:
|
ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY CHARGED POLYELECTROLYTES FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
07/24/2007
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Application #:
|
10869397
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Filing Dt:
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06/16/2004
|
Publication #:
|
|
Pub Dt:
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12/22/2005
| | | | |
Title:
|
METHOD OF POLISHING A TUNGSTEN-CONTAINING SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/2008
|
Application #:
|
10897192
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Filing Dt:
|
07/21/2004
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Publication #:
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Pub Dt:
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01/26/2006
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Title:
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METHODS FOR PRODUCING IN-SITU GROOVES IN CHEMICAL MECHANICAL PLANARIZATION (CMP) PADS, AND NOVEL CMP PAD DESIGNS
|
|
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Patent #:
|
|
Issue Dt:
|
01/09/2007
|
Application #:
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10901420
|
Filing Dt:
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07/28/2004
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Publication #:
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|
Pub Dt:
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02/02/2006
| | | | |
Title:
|
POLISHING COMPOSITION FOR NOBLE METALS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2011
|
Application #:
|
10931908
|
Filing Dt:
|
09/01/2004
|
Publication #:
|
|
Pub Dt:
|
03/02/2006
| | | | |
Title:
|
POLISHING PAD WITH MICROPOROUS REGIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/21/2009
|
Application #:
|
10963108
|
Filing Dt:
|
10/12/2004
|
Publication #:
|
|
Pub Dt:
|
04/13/2006
| | | | |
Title:
|
CMP COMPOSITION WITH A POLYMER ADDITIVE FOR POLISHING NOBLE METALS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2011
|
Application #:
|
10974460
|
Filing Dt:
|
10/27/2004
|
Publication #:
|
|
Pub Dt:
|
04/27/2006
| | | | |
Title:
|
METAL ION-CONTAINING CMP COMPOSITION AND METHOD FOR USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
04/28/2009
|
Application #:
|
10975585
|
Filing Dt:
|
10/28/2004
|
Publication #:
|
|
Pub Dt:
|
05/11/2006
| | | | |
Title:
|
CMP COMPOSITION COMPRISING SURFACTANT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/2009
|
Application #:
|
10982486
|
Filing Dt:
|
11/05/2004
|
Publication #:
|
|
Pub Dt:
|
05/11/2006
| | | | |
Title:
|
POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2007
|
Application #:
|
11093806
|
Filing Dt:
|
03/30/2005
|
Publication #:
|
|
Pub Dt:
|
10/12/2006
| | | | |
Title:
|
POLYMERIC INHIBITORS FOR ENHANCED PLANARIZATION
|
|
|
Patent #:
|
|
Issue Dt:
|
10/14/2008
|
Application #:
|
11113498
|
Filing Dt:
|
04/25/2005
|
Publication #:
|
|
Pub Dt:
|
09/08/2005
| | | | |
Title:
|
MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2007
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Application #:
|
11158694
|
Filing Dt:
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06/22/2005
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Publication #:
|
|
Pub Dt:
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12/15/2005
| | | | |
Title:
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TRANSPARENT MICROPOROUS MATERIALS FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
11/22/2011
|
Application #:
|
11173518
|
Filing Dt:
|
06/30/2005
|
Publication #:
|
|
Pub Dt:
|
01/11/2007
| | | | |
Title:
|
USE OF CMP FOR ALUMINUM MIRROR AND SOLAR CELL FABRICATION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/08/2008
|
Application #:
|
11235765
|
Filing Dt:
|
09/26/2005
|
Publication #:
|
|
Pub Dt:
|
02/09/2006
| | | | |
Title:
|
COMPOSITIONS AND METHODS FOR TANTALUM CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/2011
|
Application #:
|
11241137
|
Filing Dt:
|
09/30/2005
|
Publication #:
|
|
Pub Dt:
|
04/05/2007
| | | | |
Title:
|
COMPOSITION AND METHOD FOR PLANARIZING SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
04/27/2010
|
Application #:
|
11251547
|
Filing Dt:
|
10/14/2005
|
Publication #:
|
|
Pub Dt:
|
12/07/2006
| | | | |
Title:
|
CUSTOMIZED POLISHING PADS FOR CMP AND METHODS OF FABRICATION AND USE THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2007
|
Application #:
|
11259645
|
Filing Dt:
|
10/26/2005
|
Publication #:
|
|
Pub Dt:
|
04/26/2007
| | | | |
Title:
|
CMP OF COPPER/RUTHENIUM SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2007
|
Application #:
|
11265607
|
Filing Dt:
|
11/02/2005
|
Publication #:
|
|
Pub Dt:
|
03/09/2006
| | | | |
Title:
|
METHOD FOR MANUFACTURING MICROPOROUS CMP MATERIALS HAVING CONTROLLED PORE SIZE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2009
|
Application #:
|
11294853
|
Filing Dt:
|
12/06/2005
|
Publication #:
|
|
Pub Dt:
|
05/25/2006
| | | | |
Title:
|
POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/08/2013
|
Application #:
|
11387558
|
Filing Dt:
|
03/23/2006
|
Publication #:
|
|
Pub Dt:
|
09/27/2007
| | | | |
Title:
|
IODATE-CONTAINING CHEMICAL-MECHANICAL POLISHING COMPOSITIONS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/26/2010
|
Application #:
|
11388085
|
Filing Dt:
|
03/23/2006
|
Publication #:
|
|
Pub Dt:
|
09/27/2007
| | | | |
Title:
|
HALIDE ANIONS FOR METAL REMOVAL RATE CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
05/19/2009
|
Application #:
|
11406110
|
Filing Dt:
|
04/18/2006
|
Publication #:
|
|
Pub Dt:
|
08/17/2006
| | | | |
Title:
|
BULK POLYMERIZATION REACTORS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/2009
|
Application #:
|
11412369
|
Filing Dt:
|
04/27/2006
|
Publication #:
|
|
Pub Dt:
|
11/01/2007
| | | | |
Title:
|
POLISHING COMPOSITION CONTAINING POLYETHER AMINE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2014
|
Application #:
|
11448205
|
Filing Dt:
|
06/07/2006
|
Publication #:
|
|
Pub Dt:
|
12/27/2007
| | | | |
Title:
|
Compositions and methods for polishing silicon nitride materials
|
|
|
Patent #:
|
|
Issue Dt:
|
11/13/2007
|
Application #:
|
11478023
|
Filing Dt:
|
06/29/2006
|
Title:
|
TUNABLE SELECTIVITY SLURRIES IN CMP APPLICATIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2012
|
Application #:
|
11507271
|
Filing Dt:
|
08/21/2006
|
Publication #:
|
|
Pub Dt:
|
12/14/2006
| | | | |
Title:
|
BULK POLYMERIZATION REACTORS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
|
Application #:
|
11515546
|
Filing Dt:
|
09/05/2006
|
Publication #:
|
|
Pub Dt:
|
03/06/2008
| | | | |
Title:
|
SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/2015
|
Application #:
|
11517909
|
Filing Dt:
|
09/08/2006
|
Publication #:
|
|
Pub Dt:
|
03/13/2008
| | | | |
Title:
|
Onium-containing CMP compositions and methods of use thereof
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2008
|
Application #:
|
11595536
|
Filing Dt:
|
11/09/2006
|
Publication #:
|
|
Pub Dt:
|
05/15/2008
| | | | |
Title:
|
COMPOSITIONS AND METHODS FOR CMP OF LOW-K-DIELECTRIC MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2016
|
Application #:
|
11634576
|
Filing Dt:
|
12/06/2006
|
Publication #:
|
|
Pub Dt:
|
06/12/2008
| | | | |
Title:
|
COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES
|
|
|
Patent #:
|
|
Issue Dt:
|
09/01/2009
|
Application #:
|
11670137
|
Filing Dt:
|
02/01/2007
|
Publication #:
|
|
Pub Dt:
|
09/20/2007
| | | | |
Title:
|
POLISHING COMPOSITION FOR A TUNGSTEN-CONTAINING SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/2010
|
Application #:
|
11673399
|
Filing Dt:
|
02/09/2007
|
Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
Title:
|
COMPOSITIONS AND METHODS FOR CMP OF SEMICONDUCTOR MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2010
|
Application #:
|
11673518
|
Filing Dt:
|
02/09/2007
|
Publication #:
|
|
Pub Dt:
|
03/06/2008
| | | | |
Title:
|
CMP SYSTEM UTILIZING HALOGEN ADDUCT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2011
|
Application #:
|
11699129
|
Filing Dt:
|
01/29/2007
|
Publication #:
|
|
Pub Dt:
|
08/02/2007
| | | | |
Title:
|
COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2013
|
Application #:
|
11800188
|
Filing Dt:
|
05/04/2007
|
Publication #:
|
|
Pub Dt:
|
11/06/2008
| | | | |
Title:
|
CMP compositions containing a soluble peroxometalate complex and methods of use thereof
|
|
|
Patent #:
|
|
Issue Dt:
|
05/06/2014
|
Application #:
|
11884829
|
Filing Dt:
|
10/16/2008
|
Publication #:
|
|
Pub Dt:
|
02/26/2009
| | | | |
Title:
|
Customized Polishing Pads for CMP and Methods of Fabrication and Use Thereof
|
|
|
Patent #:
|
|
Issue Dt:
|
11/26/2013
|
Application #:
|
11960135
|
Filing Dt:
|
12/19/2007
|
Publication #:
|
|
Pub Dt:
|
04/24/2008
| | | | |
Title:
|
HALIDE ANIONS FOR METAL REMOVAL RATE CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2011
|
Application #:
|
11970978
|
Filing Dt:
|
01/08/2008
|
Publication #:
|
|
Pub Dt:
|
07/09/2009
| | | | |
Title:
|
COMPOSITION AND METHOD FOR POLISHING NICKEL-PHOSPHOROUS-COATED ALUMINUM HARD DISKS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/2011
|
Application #:
|
11986921
|
Filing Dt:
|
11/27/2007
|
Publication #:
|
|
Pub Dt:
|
05/28/2009
| | | | |
Title:
|
COPPER-PASSIVATING CMP COMPOSITIONS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/27/2010
|
Application #:
|
11998196
|
Filing Dt:
|
11/28/2007
|
Publication #:
|
|
Pub Dt:
|
04/17/2008
| | | | |
Title:
|
CUSTOMIZED POLISH PADS FOR CHEMICAL MECHANICAL PLANARIZATION
|
|
|
Patent #:
|
|
Issue Dt:
|
10/16/2012
|
Application #:
|
11998212
|
Filing Dt:
|
11/28/2007
|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
Title:
|
METHODS FOR PRODUCING IN-SITU GROOVES IN CHEMICAL MECHANICAL PLANARIZATION (CMP) PADS, AND NOVEL CMP PAD DESIGNS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/2014
|
Application #:
|
11998319
|
Filing Dt:
|
11/28/2007
|
Publication #:
|
|
Pub Dt:
|
08/28/2008
| | | | |
Title:
|
Customized polishing pads for CMP and methods of fabrication and use thereof
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2011
|
Application #:
|
12043010
|
Filing Dt:
|
03/05/2008
|
Publication #:
|
|
Pub Dt:
|
06/26/2008
| | | | |
Title:
|
SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/23/2013
|
Application #:
|
12052970
|
Filing Dt:
|
03/21/2008
|
Publication #:
|
|
Pub Dt:
|
09/24/2009
| | | | |
Title:
|
COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/2011
|
Application #:
|
12126739
|
Filing Dt:
|
05/23/2008
|
Publication #:
|
|
Pub Dt:
|
11/26/2009
| | | | |
Title:
|
STABLE, HIGH RATE SILICON SLURRY
|
|
|
Patent #:
|
|
Issue Dt:
|
08/21/2012
|
Application #:
|
12170954
|
Filing Dt:
|
07/10/2008
|
Publication #:
|
|
Pub Dt:
|
01/14/2010
| | | | |
Title:
|
METHOD OF POLISHING NICKEL-PHOSPHOROUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/21/2012
|
Application #:
|
12221023
|
Filing Dt:
|
07/30/2008
|
Publication #:
|
|
Pub Dt:
|
02/04/2010
| | | | |
Title:
|
METHODS AND COMPOSITIONS FOR POLISHING SILICON-CONTAINING SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2011
|
Application #:
|
12234173
|
Filing Dt:
|
09/19/2008
|
Publication #:
|
|
Pub Dt:
|
03/26/2009
| | | | |
Title:
|
POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2015
|
Application #:
|
12234237
|
Filing Dt:
|
09/19/2008
|
Publication #:
|
|
Pub Dt:
|
03/26/2009
| | | | |
Title:
|
POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/16/2013
|
Application #:
|
12239249
|
Filing Dt:
|
09/26/2008
|
Publication #:
|
|
Pub Dt:
|
01/29/2009
| | | | |
Title:
|
METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
|
|
|
Patent #:
|
|
Issue Dt:
|
07/07/2015
|
Application #:
|
12309212
|
Filing Dt:
|
01/09/2009
|
Publication #:
|
|
Pub Dt:
|
12/24/2009
| | | | |
Title:
|
CMP method for metal-containing substrates
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2010
|
Application #:
|
12364253
|
Filing Dt:
|
02/02/2009
|
Publication #:
|
|
Pub Dt:
|
05/28/2009
| | | | |
Title:
|
POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/24/2012
|
Application #:
|
12364937
|
Filing Dt:
|
02/03/2009
|
Publication #:
|
|
Pub Dt:
|
08/05/2010
| | | | |
Title:
|
POLISHING COMPOSITION FOR NICKEL-PHOSPHOROUS MEMORY DISKS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/2015
|
Application #:
|
12381709
|
Filing Dt:
|
03/16/2009
|
Publication #:
|
|
Pub Dt:
|
12/17/2009
| | | | |
Title:
|
Grooved CMP pad
|
|
|
Patent #:
|
|
Issue Dt:
|
03/20/2012
|
Application #:
|
12384266
|
Filing Dt:
|
04/02/2009
|
Publication #:
|
|
Pub Dt:
|
08/27/2009
| | | | |
Title:
|
POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2016
|
Application #:
|
12455631
|
Filing Dt:
|
06/04/2009
|
Publication #:
|
|
Pub Dt:
|
12/09/2010
| | | | |
Title:
|
Polishing composition for nickel-phosphorous memory disks
|
|