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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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09163844
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Filing Dt:
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09/30/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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09549268
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Filing Dt:
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04/14/2000
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Title:
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SYSTEM AND METHOD FOR CONTROL AND SIMULATION
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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09842370
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Filing Dt:
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04/25/2001
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Publication #:
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Pub Dt:
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11/29/2001
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Title:
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RETICLE MANAGEMENT SYSTEM
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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09897202
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Filing Dt:
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07/02/2001
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Publication #:
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Pub Dt:
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01/02/2003
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Title:
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FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09935919
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Filing Dt:
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08/23/2001
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Publication #:
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Pub Dt:
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07/18/2002
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Title:
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WEB BASED TOOL CONTROL IN A SEMICONDUCTOR FABRICATION FACILITY
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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10009218
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Filing Dt:
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02/05/2002
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Title:
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DEVICE FOR HANDLING SUBSTRATES INSIDE AND OUTSIDE A CLEAN ROOM
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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10074411
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Filing Dt:
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02/12/2002
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Publication #:
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Pub Dt:
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08/15/2002
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Title:
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SECURE REMOTE DIAGNOSTIC CUSTOMER SUPPORT NETWORK
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Patent #:
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Issue Dt:
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05/15/2007
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Application #:
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10087092
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Filing Dt:
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03/01/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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SEMICONDUCTOR MATERIAL HANDLING SYSTEM
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10087400
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Filing Dt:
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03/01/2002
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Title:
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WAFER ENGINE
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10087638
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Filing Dt:
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03/01/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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UNIFIED FRAME FOR SEMICONDUCTOR MATERIAL HANDLING SYSTEM
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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10104846
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Filing Dt:
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03/22/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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DEVICE FOR HANDLING FLAT PANELS IN A VACUUM
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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10120673
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Filing Dt:
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04/11/2002
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Publication #:
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Pub Dt:
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03/20/2003
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Title:
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ROBOT ARM EDGE GRIPPING DEVICE FOR HANDLING SUBSTRATES USING TWO FOUR-BAR LINKAGES
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10120744
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Filing Dt:
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04/11/2002
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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SEMICONDUCTOR LOAD PORT ALIGNMENT DEVICE
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10121152
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Filing Dt:
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04/11/2002
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Publication #:
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Pub Dt:
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07/17/2003
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Title:
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ROBOT ARM EDGE GRIPPING DEVICE FOR HANDLING SUBSTRATES
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Patent #:
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Issue Dt:
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08/25/2009
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Application #:
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10159726
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Filing Dt:
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05/29/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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DUAL ARM SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/02/2008
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Application #:
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10194702
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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INTEGRATED SYSTEM FOR TOOL FRONT-END WORKPIECE HANDLING
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Patent #:
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05/18/2004
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Application #:
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10196066
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Filing Dt:
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07/15/2002
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Publication #:
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Pub Dt:
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01/16/2003
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENT END EFFECTORS
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10196685
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Filing Dt:
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07/15/2002
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Publication #:
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Pub Dt:
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06/12/2003
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Title:
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TRAJECTORY PLANNING AND MOTION CONTROL STRATEGIES FOR A PLANAR THREE-DEGREE-OF-FREEDOM ROBOTIC ARM
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Patent #:
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Issue Dt:
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03/22/2005
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Application #:
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10200818
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Filing Dt:
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07/22/2002
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Publication #:
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Pub Dt:
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01/22/2004
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Title:
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SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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10223075
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Filing Dt:
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08/15/2002
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Publication #:
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Pub Dt:
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03/20/2003
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Title:
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METHOD OF USING A SPECIMEN SENSING END EFFECTOR TO DETERMINE ANGULAR ORIENTATION OF A SPECIMEN
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Patent #:
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Issue Dt:
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11/13/2007
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Application #:
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10234640
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Filing Dt:
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09/03/2002
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Publication #:
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Pub Dt:
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07/10/2003
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Title:
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UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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10244852
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Filing Dt:
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09/16/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Title:
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METHOD OF REMOVING SUBSTRATES FROM A STORAGE SITE AND A MULTIPLE SUBSTRATE BATCH LOADER
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08/11/2009
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10266072
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10/07/2002
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Pub Dt:
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04/08/2004
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Title:
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SUBSTRATE ALIGNMENT SYSTEM
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08/03/2004
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10267465
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10/08/2002
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04/08/2004
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Title:
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APPARATUS FOR ALIGNMENT AND ORIENTATION OF A WAFER FOR PROCESSING
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08/31/2004
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10328749
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12/24/2002
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09/18/2003
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Title:
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SEMICONDUCTOR PROCESSING TOOL ALIGNMENT TECHNIQUE IMPLEMENTED IN A FIMS SYSTEM
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11/09/2004
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10328853
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12/24/2002
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09/18/2003
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Title:
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SPECIMEN SCANNING MECHANISM ADAPTED FOR IMPLEMENTATION IN A FIMS SYSTEM
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07/20/2004
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10335134
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12/30/2002
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09/18/2003
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Title:
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DETECTION OF MOTIVE FORCE APPLIED TO TRANSPORT BOX MOUNTED ON A FIMS SYSTEM
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03/16/2010
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10339150
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01/09/2003
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07/15/2004
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Title:
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WAFER SHIPPING CONTAINER
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08/14/2007
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10413102
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04/14/2003
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10/28/2004
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02/22/2011
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10434582
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05/09/2003
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01/01/2004
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05/09/2006
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10438470
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05/15/2003
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03/04/2004
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05/04/2004
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10444327
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05/22/2003
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10/23/2003
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01/04/2005
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10460698
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06/12/2003
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11/06/2003
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03/20/2007
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06/19/2003
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12/23/2004
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09/13/2005
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10613697
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07/03/2003
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01/06/2005
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02/21/2006
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07/10/2003
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01/13/2005
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03/16/2010
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07/21/2003
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07/22/2004
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11/27/2007
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07/21/2003
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01/27/2005
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08/18/2009
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07/22/2003
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08/05/2004
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05/02/2006
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07/23/2003
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01/27/2005
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01/20/2009
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07/28/2003
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06/17/2004
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04/20/2010
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07/29/2003
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05/13/2004
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12/13/2005
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08/06/2003
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09/23/2004
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05/24/2005
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08/26/2003
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02/26/2004
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04/19/2005
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09/03/2003
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05/13/2004
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09/19/2006
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10/23/2003
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09/30/2004
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01/24/2006
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12/18/2003
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08/26/2004
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07/17/2007
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12/19/2003
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06/06/2006
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07/10/2004
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03/10/2005
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09/05/2006
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07/20/2004
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12/23/2004
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08/02/2011
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10/09/2004
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05/19/2005
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05/01/2007
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11/10/2004
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06/09/2005
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12/02/2008
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11/10/2004
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05/26/2005
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09/09/2008
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11/10/2004
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06/02/2005
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11/06/2007
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12/16/2004
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06/22/2006
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09/13/2011
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01/28/2005
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12/01/2005
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Title:
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SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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11093479
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Filing Dt:
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03/30/2005
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Publication #:
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Pub Dt:
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11/02/2006
| | | | |
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Title:
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HIGH SPEED SUBSTRATE ALIGNER APPARATUS
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Patent #:
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Issue Dt:
|
08/04/2015
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Application #:
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11093480
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Filing Dt:
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03/30/2005
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Publication #:
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Pub Dt:
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11/02/2006
| | | | |
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Title:
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TRANSFER CHAMBER BETWEEN WORKSTATIONS
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Patent #:
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Issue Dt:
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05/01/2012
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Application #:
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11093481
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Filing Dt:
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03/30/2005
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
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Patent #:
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Issue Dt:
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05/20/2008
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Application #:
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11104397
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Filing Dt:
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04/12/2005
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Publication #:
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Pub Dt:
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08/24/2006
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Title:
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FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
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Patent #:
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Issue Dt:
|
06/19/2007
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Application #:
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11136078
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Filing Dt:
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05/23/2005
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Publication #:
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Pub Dt:
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03/02/2006
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Title:
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METHOD OF DETERMINING AXIAL ALIGNMENT OF THE CENTROID OF AN EDGE GRIPPING END EFFECTOR AND THE CENTER OF A SPECIMEN GRIPPED BY IT
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Patent #:
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Issue Dt:
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02/19/2013
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Application #:
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11148871
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Filing Dt:
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06/09/2005
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Publication #:
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Pub Dt:
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05/11/2006
| | | | |
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Title:
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DUAL SCARA ARM
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Patent #:
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Issue Dt:
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10/27/2009
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Application #:
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11154787
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Filing Dt:
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06/15/2005
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Publication #:
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Pub Dt:
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03/02/2006
| | | | |
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Title:
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SUBTRATE PROCESSING APPARATUS WITH REMOVABLE COMPONENT MODULE
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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11168908
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Filing Dt:
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06/28/2005
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Publication #:
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Pub Dt:
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03/16/2006
| | | | |
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Title:
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NONPRODUCTIVE WAFER BUFFER MODULE FOR SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/08/2011
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Application #:
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11178615
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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01/11/2007
| | | | |
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Title:
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SCALABLE MOTION CONTROL SYSTEM
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Patent #:
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Issue Dt:
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11/05/2013
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Application #:
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11178830
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
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Title:
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Substrate transport apparatus
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Patent #:
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Issue Dt:
|
09/02/2014
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Application #:
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11178836
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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01/11/2007
| | | | |
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Title:
|
Load port module
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|
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Patent #:
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|
Issue Dt:
|
10/01/2013
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Application #:
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11179745
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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10/05/2006
| | | | |
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Title:
|
HIGH SPEED SUBSTRATE ALIGNER APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/02/2016
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Application #:
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11179762
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
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Title:
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UNEQUAL LINK SCARA ARM
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|
|
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Patent #:
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Issue Dt:
|
02/07/2012
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Application #:
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11196063
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Filing Dt:
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08/03/2005
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Publication #:
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Pub Dt:
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12/01/2005
| | | | |
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Title:
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SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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11207231
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Filing Dt:
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08/19/2005
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Publication #:
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Pub Dt:
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04/27/2006
| | | | |
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Title:
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REDUCED CAPACITY CARRIER AND METHOD OF USE
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|
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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11239272
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Filing Dt:
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09/29/2005
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Publication #:
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Pub Dt:
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04/12/2007
| | | | |
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Title:
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END EFFECTOR WITH CENTERING GRIP
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|
|
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Patent #:
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Issue Dt:
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02/15/2011
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Application #:
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11302563
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Filing Dt:
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12/13/2005
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Publication #:
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Pub Dt:
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06/14/2007
| | | | |
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Title:
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ROBOTICS PROGRAMMING INTERFACE
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|
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Patent #:
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Issue Dt:
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01/19/2010
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Application #:
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11305256
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Filing Dt:
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12/16/2005
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Publication #:
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Pub Dt:
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06/08/2006
| | | | |
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Title:
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WAFER ENGINE
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|
|
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Patent #:
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Issue Dt:
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05/14/2013
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Application #:
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11382491
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Filing Dt:
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05/10/2006
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Publication #:
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Pub Dt:
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11/23/2006
| | | | |
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Title:
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LINEAR SEMICONDUCTOR PROCESSING FACILITIES
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|
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Patent #:
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Issue Dt:
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11/13/2007
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Application #:
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11404536
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Filing Dt:
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04/14/2006
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Publication #:
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Pub Dt:
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08/17/2006
| | | | |
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Title:
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ULTRA LOW CONTACT AREA END EFFECTOR
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|
|
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Patent #:
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|
Issue Dt:
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06/14/2011
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Application #:
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11442509
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Filing Dt:
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05/26/2006
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Publication #:
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Pub Dt:
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12/21/2006
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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03/19/2013
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Application #:
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11442511
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Filing Dt:
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05/26/2006
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Publication #:
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Pub Dt:
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11/29/2007
| | | | |
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Title:
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LINEARLY DISTRIBUTED SEMICONDUCTOR WORKPIECE PROCESSING TOOL
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Patent #:
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|
Issue Dt:
|
02/01/2011
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Application #:
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11453395
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Filing Dt:
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06/15/2006
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Publication #:
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Pub Dt:
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12/20/2007
| | | | |
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Title:
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A SUBSTRATE ALIGNMENT APPARATUS COMPRISING A CONTROLLER TO MEASURE ALIGNMENT DURING TRANSPORT
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Patent #:
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Issue Dt:
|
02/01/2011
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Application #:
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11485143
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Filing Dt:
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07/11/2006
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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INTELLIGENT CONDITION-MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREDICTIVE MAINTENANCE
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Patent #:
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|
Issue Dt:
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04/12/2011
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Application #:
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11485144
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Filing Dt:
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07/11/2006
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Publication #:
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Pub Dt:
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03/29/2007
| | | | |
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Title:
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PROCESS APPARATUS WITH ON-THE-FLY WORKPIECE CENTERING
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Patent #:
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Issue Dt:
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07/27/2010
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Application #:
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11485145
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Filing Dt:
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07/11/2006
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Publication #:
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Pub Dt:
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05/03/2007
| | | | |
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Title:
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EQUIPMENT STORAGE FOR SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/21/2009
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Application #:
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11485146
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Filing Dt:
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07/11/2006
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH AUTOMATED ALIGNMENT
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Patent #:
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Issue Dt:
|
03/08/2011
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Application #:
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11523101
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Filing Dt:
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09/19/2006
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Publication #:
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Pub Dt:
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03/20/2008
| | | | |
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Title:
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APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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11594365
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Filing Dt:
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11/07/2006
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Publication #:
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Pub Dt:
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08/16/2007
| | | | |
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Title:
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REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
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Patent #:
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Issue Dt:
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12/05/2017
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Application #:
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11644240
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Filing Dt:
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12/22/2006
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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Loader and buffer for reduced lot size
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Patent #:
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Issue Dt:
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03/26/2013
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Application #:
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11681822
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Filing Dt:
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03/05/2007
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Publication #:
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Pub Dt:
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01/17/2008
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Title:
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BYPASS THERMAL ADJUSTER FOR VACUUM SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
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09/07/2010
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Application #:
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11682306
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Filing Dt:
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03/05/2007
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Publication #:
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Pub Dt:
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12/13/2007
| | | | |
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Title:
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WAFER CENTER FINDING
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Patent #:
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Issue Dt:
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05/24/2011
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Application #:
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11697390
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Filing Dt:
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04/06/2007
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Publication #:
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Pub Dt:
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10/09/2008
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS
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Patent #:
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Issue Dt:
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09/06/2016
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Application #:
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11741416
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Filing Dt:
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04/27/2007
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Publication #:
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Pub Dt:
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10/30/2008
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Title:
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INERTIAL WAFER CENTERING END EFFECTOR AND TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/05/2017
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Application #:
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11769651
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Filing Dt:
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06/27/2007
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Publication #:
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Pub Dt:
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01/01/2009
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Title:
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REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC MOTOR
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Patent #:
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Issue Dt:
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09/02/2014
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Application #:
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11769688
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Filing Dt:
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06/27/2007
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Publication #:
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Pub Dt:
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01/01/2009
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Title:
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COMMUTATION OF AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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11774764
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Filing Dt:
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07/09/2007
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Publication #:
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Pub Dt:
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01/10/2008
| | | | |
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Title:
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VARIABLE LOT SIZE LOAD PORT
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Patent #:
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Issue Dt:
|
09/18/2012
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Application #:
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11803077
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Filing Dt:
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05/11/2007
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Publication #:
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Pub Dt:
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04/03/2008
| | | | |
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Title:
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REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
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Patent #:
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Issue Dt:
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06/14/2011
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Application #:
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11846290
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Filing Dt:
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08/28/2007
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Publication #:
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Pub Dt:
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04/10/2008
| | | | |
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Title:
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LINEAR SEMICONDUCTOR PROCESSING FACILITIES
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Patent #:
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Issue Dt:
|
08/25/2015
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Application #:
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11848845
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Filing Dt:
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08/31/2007
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Publication #:
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Pub Dt:
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03/06/2008
| | | | |
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Title:
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Compact Processing Apparatus
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Patent #:
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Issue Dt:
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10/30/2012
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Application #:
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11855484
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Filing Dt:
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09/14/2007
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Publication #:
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Pub Dt:
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05/08/2008
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Title:
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CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT
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Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11870560
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Filing Dt:
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10/11/2007
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Publication #:
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Pub Dt:
|
04/16/2009
| | | | |
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Title:
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ULTRA LOW CONTACT AREA END EFFECTOR
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Patent #:
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Issue Dt:
|
08/19/2014
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Application #:
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11876869
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Filing Dt:
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10/23/2007
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Publication #:
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Pub Dt:
|
09/11/2008
| | | | |
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Title:
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SEMICONDUCTOR MANUFACTURING PROCESS MODULES
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Patent #:
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Issue Dt:
|
09/18/2012
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Application #:
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11876876
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Filing Dt:
|
10/23/2007
|
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Publication #:
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Pub Dt:
|
09/11/2008
| | | | |
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Title:
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SEMICONDUCTOR MANUFACTURING PROCESS MODULES
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|
