Total properties:
1099
Page
1
of
11
Pages:
1 2 3 4 5 6 7 8 9 10 11
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
09862245
|
Filing Dt:
|
05/22/2001
|
Publication #:
|
|
Pub Dt:
|
11/28/2002
| | | | |
Title:
|
DELIVERY SYSTEM FOR MAGNETORHEOLOGICAL FLUID
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/2006
|
Application #:
|
09877341
|
Filing Dt:
|
06/08/2001
|
Publication #:
|
|
Pub Dt:
|
12/26/2002
| | | | |
Title:
|
DRAG REDUCING AGENT SLURRIES HAVING ALFOL ALCOHOLS AND PROCESSES FOR FORMING DRAG REDUCING AGENT SLURRIES HAVING ALFOL ALCOHOLS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2006
|
Application #:
|
09907282
|
Filing Dt:
|
07/17/2001
|
Publication #:
|
|
Pub Dt:
|
02/07/2002
| | | | |
Title:
|
SOURCE REAGENT COMPOSITIONS FOR CVD FORMATION OF HIGH DIELECTRIC CONSTANT AND FERROELECTRIC METAL OXIDE THIN FILMS AND METHOD OF USING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10073844
|
Filing Dt:
|
02/11/2002
|
Title:
|
ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY CHARGED POLYELECTROLYTES FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2007
|
Application #:
|
10139185
|
Filing Dt:
|
05/03/2002
|
Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
Title:
|
APPARATUS AND METHOD FOR MINIMIZING THE GENERATION OF PARTICLES IN ULTRAPURE LIQUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2010
|
Application #:
|
10141215
|
Filing Dt:
|
05/07/2002
|
Publication #:
|
|
Pub Dt:
|
09/12/2002
| | | | |
Title:
|
SELF-REGENERATIVE PROCESS FOR CONTAMINANT REMOVAL FROM AMMONIA
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2004
|
Application #:
|
10156449
|
Filing Dt:
|
05/28/2002
|
Publication #:
|
|
Pub Dt:
|
01/02/2003
| | | | |
Title:
|
FLUOROPOLYMER FLOWMETER
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2005
|
Application #:
|
10165100
|
Filing Dt:
|
06/07/2002
|
Publication #:
|
|
Pub Dt:
|
12/11/2003
| | | | |
Title:
|
CMP COMPOSITIONS FOR LOW-K DIELECTRIC MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2005
|
Application #:
|
10166242
|
Filing Dt:
|
06/10/2002
|
Publication #:
|
|
Pub Dt:
|
12/11/2003
| | | | |
Title:
|
PRESSURE-BASED GAS DELIVERY SYSTEM AND METHOD FOR REDUCING RISKS ASSOCIATED WITH STORAGE AND DELIVERY OF HIGH PRESSURE GASES
|
|
|
Patent #:
|
|
Issue Dt:
|
09/01/2009
|
Application #:
|
10170785
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/19/2002
| | | | |
Title:
|
BULK POLYMERIZATION REACTOR METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/2004
|
Application #:
|
10190347
|
Filing Dt:
|
07/05/2002
|
Publication #:
|
|
Pub Dt:
|
01/08/2004
| | | | |
Title:
|
RETICLE CARRIER
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2004
|
Application #:
|
10194981
|
Filing Dt:
|
07/11/2002
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
Title:
|
THIN WAFER CARRIER
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
10194982
|
Filing Dt:
|
07/11/2002
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
Title:
|
HIGH VOLUME DISPENSE HEAD WITH SEAL VERIFICATION AND LOW FOAM RETURN LINE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
10196714
|
Filing Dt:
|
07/17/2002
|
Publication #:
|
|
Pub Dt:
|
01/22/2004
| | | | |
Title:
|
SENSORS AND METHODS FOR HIGH-SENSITIVITY OPTICAL PARTICLE COUNTING AND SIZING
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10199704
|
Filing Dt:
|
07/19/2002
|
Publication #:
|
|
Pub Dt:
|
01/22/2004
| | | | |
Title:
|
POLISHING COMPOSITION CONTAINING CONDUCTING POLYMER
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2005
|
Application #:
|
10201340
|
Filing Dt:
|
07/23/2002
|
Publication #:
|
|
Pub Dt:
|
01/29/2004
| | | | |
Title:
|
COMPOSITION AND PROCESS FOR WET STRIPPING REMOVAL OF SACRIFICIAL ANTI-REFLECTIVE MATERIAL
|
|
|
Patent #:
|
|
Issue Dt:
|
07/26/2005
|
Application #:
|
10201518
|
Filing Dt:
|
07/23/2002
|
Publication #:
|
|
Pub Dt:
|
01/29/2004
| | | | |
Title:
|
VAPORIZER DELIVERY AMPOULE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2004
|
Application #:
|
10213631
|
Filing Dt:
|
08/06/2002
|
Publication #:
|
|
Pub Dt:
|
02/12/2004
| | | | |
Title:
|
UNIFORM THIN FILMS PRODUCED BY MAGNETORHEOLOGICAL FINISHING
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/2004
|
Application #:
|
10213669
|
Filing Dt:
|
08/07/2002
|
Publication #:
|
|
Pub Dt:
|
02/12/2004
| | | | |
Title:
|
BR2SBCH3 A SOLID SOURCE ION IMPLANT AND CVD PRECURSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10231047
|
Filing Dt:
|
08/30/2002
|
Publication #:
|
|
Pub Dt:
|
04/17/2003
| | | | |
Title:
|
SLURRY FOR MECHANICAL POLISHING (CMP) OF METALS AND USE THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2005
|
Application #:
|
10241815
|
Filing Dt:
|
09/11/2002
|
Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
Title:
|
MATRIX TRAY WITH TACKY SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2006
|
Application #:
|
10247107
|
Filing Dt:
|
09/19/2002
|
Publication #:
|
|
Pub Dt:
|
04/24/2003
| | | | |
Title:
|
APPARATUS AND METHOD FOR DISPENSING HIGH-VISCOSITY LIQUID
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/2005
|
Application #:
|
10269864
|
Filing Dt:
|
10/11/2002
|
Publication #:
|
|
Pub Dt:
|
12/11/2003
| | | | |
Title:
|
CMP METHOD UTILIZING AMPHIPHILIC NONIONIC SURFACTANTS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2005
|
Application #:
|
10281782
|
Filing Dt:
|
10/28/2002
|
Publication #:
|
|
Pub Dt:
|
11/27/2003
| | | | |
Title:
|
MICROPOROUS POLISHING PADS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/06/2004
|
Application #:
|
10282377
|
Filing Dt:
|
10/29/2002
|
Title:
|
APPARATUS AND METHOD FOR INHIBITING DECOMPOSITION OF GERMANE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/14/2008
|
Application #:
|
10282489
|
Filing Dt:
|
10/28/2002
|
Publication #:
|
|
Pub Dt:
|
04/29/2004
| | | | |
Title:
|
TRANSPARENT MICROPOROUS MATERIALS FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
08/03/2004
|
Application #:
|
10284910
|
Filing Dt:
|
10/31/2002
|
Publication #:
|
|
Pub Dt:
|
05/06/2004
| | | | |
Title:
|
ION IMPLANTATION AND WET BENCH SYSTEMS UTILIZING EXHAUST GAS RECIRCULATION
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2005
|
Application #:
|
10293891
|
Filing Dt:
|
11/13/2002
|
Publication #:
|
|
Pub Dt:
|
06/12/2003
| | | | |
Title:
|
WAFER ENCLOSURE SEALING ARRANGEMENT FOR WAFER CONTAINERS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2009
|
Application #:
|
10294431
|
Filing Dt:
|
11/14/2002
|
Publication #:
|
|
Pub Dt:
|
05/20/2004
| | | | |
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2005
|
Application #:
|
10294475
|
Filing Dt:
|
11/14/2002
|
Publication #:
|
|
Pub Dt:
|
07/17/2003
| | | | |
Title:
|
WAFER CARRIER WITH WAFER RETAINING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/04/2003
|
Application #:
|
10295836
|
Filing Dt:
|
11/18/2002
|
Title:
|
POLISHING COMPOSITIONS AND USE THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2008
|
Application #:
|
10301109
|
Filing Dt:
|
11/21/2002
|
Publication #:
|
|
Pub Dt:
|
05/27/2004
| | | | |
Title:
|
POROGEN MATERIAL
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
10303236
|
Filing Dt:
|
11/25/2002
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
Title:
|
METHOD FOR SELF-CALIBRATED SUB-APERTURE STITCHING FOR SURFACE FIGURE MEASUREMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/30/2004
|
Application #:
|
10307894
|
Filing Dt:
|
12/02/2002
|
Publication #:
|
|
Pub Dt:
|
07/17/2003
| | | | |
Title:
|
WAFER CARRIER DOOR AND LATCHING MECHANISM WITHHOURGLASS SHAPED KEY SLOT
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/2005
|
Application #:
|
10314728
|
Filing Dt:
|
12/09/2002
|
Publication #:
|
|
Pub Dt:
|
06/10/2004
| | | | |
Title:
|
PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2006
|
Application #:
|
10314777
|
Filing Dt:
|
12/09/2002
|
Publication #:
|
|
Pub Dt:
|
06/24/2004
| | | | |
Title:
|
RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/2004
|
Application #:
|
10315635
|
Filing Dt:
|
12/10/2002
|
Publication #:
|
|
Pub Dt:
|
06/10/2004
| | | | |
Title:
|
GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2007
|
Application #:
|
10315641
|
Filing Dt:
|
12/10/2002
|
Publication #:
|
|
Pub Dt:
|
06/10/2004
| | | | |
Title:
|
PASSIVATIVE CHEMICAL MECHANICAL POLISHING COMPOSITION FOR COPPER FILM PLANARIZATION
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2003
|
Application #:
|
10317006
|
Filing Dt:
|
12/11/2002
|
Publication #:
|
|
Pub Dt:
|
08/28/2003
| | | | |
Title:
|
WAFER CONTAINER CUSHION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
10317023
|
Filing Dt:
|
12/11/2002
|
Publication #:
|
|
Pub Dt:
|
07/24/2003
| | | | |
Title:
|
WAFER CARRIER DOOR AND LATCHING MECHANISM WITH C-SHAPED CAM FOLLOWER
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/2005
|
Application #:
|
10318374
|
Filing Dt:
|
12/11/2002
|
Publication #:
|
|
Pub Dt:
|
07/17/2003
| | | | |
Title:
|
WAFER CARRIER DOOR AND SPRING BIASED LATCHING MECHANISM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/15/2004
|
Application #:
|
10345088
|
Filing Dt:
|
01/14/2003
|
Publication #:
|
|
Pub Dt:
|
08/07/2003
| | | | |
Title:
|
WAFER CARRIER DOOR WITH FORM FITTING MECHANISM COVER
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/2006
|
Application #:
|
10345616
|
Filing Dt:
|
01/16/2003
|
Publication #:
|
|
Pub Dt:
|
07/22/2004
| | | | |
Title:
|
CHEMICAL VAPOR DEPOSITION PRECURSORS FOR DEPOSITION OF TANTALUM-BASED MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/01/2005
|
Application #:
|
10361520
|
Filing Dt:
|
02/10/2003
|
Publication #:
|
|
Pub Dt:
|
08/12/2004
| | | | |
Title:
|
CMP PAD WITH COMPOSITE TRANSPARENT WINDOW
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2005
|
Application #:
|
10364243
|
Filing Dt:
|
02/11/2003
|
Publication #:
|
|
Pub Dt:
|
08/12/2004
| | | | |
Title:
|
MIXED-ABRASIVE POLISHING COMPOSITION AND METHOD FOR USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
08/07/2012
|
Application #:
|
10389214
|
Filing Dt:
|
03/14/2003
|
Publication #:
|
|
Pub Dt:
|
09/16/2004
| | | | |
Title:
|
PHOTORESIST REMOVAL
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
10390350
|
Filing Dt:
|
03/17/2003
|
Publication #:
|
|
Pub Dt:
|
04/15/2004
| | | | |
Title:
|
FULLY DRAINABLE WEIR VALVE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/2006
|
Application #:
|
10419580
|
Filing Dt:
|
04/21/2003
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
Title:
|
COATED METAL OXIDE PARTICLES FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
01/25/2005
|
Application #:
|
10454742
|
Filing Dt:
|
06/03/2003
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
Title:
|
FLUID HANDLING COMPONENT WITH ULTRAPHOBIC SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2005
|
Application #:
|
10454745
|
Filing Dt:
|
06/03/2003
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
Title:
|
ULTRAPHOBIC SURFACE FOR HIGH PRESSURE LIQUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/26/2005
|
Application #:
|
10463680
|
Filing Dt:
|
06/17/2003
|
Publication #:
|
|
Pub Dt:
|
12/23/2004
| | | | |
Title:
|
MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/2006
|
Application #:
|
10463721
|
Filing Dt:
|
06/17/2003
|
Publication #:
|
|
Pub Dt:
|
12/23/2004
| | | | |
Title:
|
ULTRASONIC WELDING METHOD FOR THE MANUFACTURE OF A POLISHING PAD COMPRISING AN OPTICALLY TRANSMISSIVE REGION
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/2006
|
Application #:
|
10463730
|
Filing Dt:
|
06/17/2003
|
Publication #:
|
|
Pub Dt:
|
12/23/2004
| | | | |
Title:
|
POLISHING PAD WITH ORIENTED PORE STRUCTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/22/2007
|
Application #:
|
10478587
|
Filing Dt:
|
11/24/2003
|
Publication #:
|
|
Pub Dt:
|
09/30/2004
| | | | |
Title:
|
THIN WAFER INSERT
|
|
|
Patent #:
|
|
Issue Dt:
|
12/18/2007
|
Application #:
|
10489214
|
Filing Dt:
|
03/10/2004
|
Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
Title:
|
EXCHANGE APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/05/2008
|
Application #:
|
10489453
|
Filing Dt:
|
03/11/2004
|
Publication #:
|
|
Pub Dt:
|
10/28/2004
| | | | |
Title:
|
HIGH-STRENGTH, CHEMICALLY RESISTANT LAMINAR FILM WITH LIMITED EXTRACTABLES
|
|
|
Patent #:
|
|
Issue Dt:
|
02/15/2011
|
Application #:
|
10496756
|
Filing Dt:
|
04/11/2005
|
Publication #:
|
|
Pub Dt:
|
10/13/2005
| | | | |
Title:
|
FRONT OPENING WAFER CARRIER WITH PATH TO GROUND EFFECTUATED BY DOOR
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2006
|
Application #:
|
10509499
|
Filing Dt:
|
09/28/2004
|
Publication #:
|
|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
FILTER CARTRIDGE CONSTRUCTION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2007
|
Application #:
|
10509500
|
Filing Dt:
|
09/28/2004
|
Publication #:
|
|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
FILTER CARTRIDGE CONSTRUCTION
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2007
|
Application #:
|
10521697
|
Filing Dt:
|
06/14/2005
|
Publication #:
|
|
Pub Dt:
|
07/27/2006
| | | | |
Title:
|
FLUID FLOW MEASURING AND PROPORTIONAL FLUID FLOW CONTROL DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2008
|
Application #:
|
10531512
|
Filing Dt:
|
06/21/2005
|
Publication #:
|
|
Pub Dt:
|
12/01/2005
| | | | |
Title:
|
METHOD FOR PURIFYING CARBON DIOXIDE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2008
|
Application #:
|
10543848
|
Filing Dt:
|
07/29/2005
|
Publication #:
|
|
Pub Dt:
|
09/07/2006
| | | | |
Title:
|
METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/2014
|
Application #:
|
10544309
|
Filing Dt:
|
11/29/2005
|
Publication #:
|
|
Pub Dt:
|
09/21/2006
| | | | |
Title:
|
Method for analysis of contaminants in a process fluid stream
|
|
|
Patent #:
|
|
Issue Dt:
|
11/21/2006
|
Application #:
|
10547646
|
Filing Dt:
|
09/01/2005
|
Publication #:
|
|
Pub Dt:
|
07/06/2006
| | | | |
Title:
|
FILTER DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/31/2009
|
Application #:
|
10565353
|
Filing Dt:
|
03/23/2006
|
Publication #:
|
|
Pub Dt:
|
08/24/2006
| | | | |
Title:
|
HYDRIDE GAS PURIFICATION FOR THE SEMICONDUCTOR INDUSTRY
|
|
|
Patent #:
|
|
Issue Dt:
|
07/26/2011
|
Application #:
|
10566847
|
Filing Dt:
|
08/16/2006
|
Publication #:
|
|
Pub Dt:
|
12/07/2006
| | | | |
Title:
|
METHODS AND MATERIALS FOR MAKING A MONOLITHIC POROUS PAD CAST ONTO A ROTATABLE BASE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/2010
|
Application #:
|
10568727
|
Filing Dt:
|
02/17/2006
|
Publication #:
|
|
Pub Dt:
|
03/06/2008
| | | | |
Title:
|
CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
02/15/2011
|
Application #:
|
10581475
|
Filing Dt:
|
08/10/2007
|
Publication #:
|
|
Pub Dt:
|
01/10/2008
| | | | |
Title:
|
RESIST, BARC AND GAP FILL MATERIAL STRIPPING CHEMICAL AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/2005
|
Application #:
|
10606520
|
Filing Dt:
|
06/26/2003
|
Publication #:
|
|
Pub Dt:
|
12/30/2004
| | | | |
Title:
|
CANISTER GUARD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/09/2007
|
Application #:
|
10610407
|
Filing Dt:
|
06/30/2003
|
Publication #:
|
|
Pub Dt:
|
12/30/2004
| | | | |
Title:
|
CMP OF NOBLE METALS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/2008
|
Application #:
|
10623180
|
Filing Dt:
|
07/21/2003
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
LITHOGRAPHIC PROJECTION APPARATUS, GAS PURGING METHOD AND DEVICE MANUFACTURING METHOD AND PURGE GAS SUPPLY SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/2006
|
Application #:
|
10623244
|
Filing Dt:
|
07/18/2003
|
Publication #:
|
|
Pub Dt:
|
01/29/2004
| | | | |
Title:
|
INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10625179
|
Filing Dt:
|
07/23/2003
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
DELIVERY SYSTEMS FOR EFFICIENT VAPORIZATION OF PRECURSOR SOURCE MATERIAL
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10641576
|
Filing Dt:
|
08/14/2003
|
Publication #:
|
|
Pub Dt:
|
10/14/2004
| | | | |
Title:
|
PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2007
|
Application #:
|
10643110
|
Filing Dt:
|
08/18/2003
|
Publication #:
|
|
Pub Dt:
|
02/24/2005
| | | | |
Title:
|
PRECURSOR COMPOSITIONS AND PROCESSES FOR MOCVD OF BARRIER MATERIALS IN SEMICONDUCTOR MANUFACTURING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2008
|
Application #:
|
10650282
|
Filing Dt:
|
08/28/2003
|
Publication #:
|
|
Pub Dt:
|
02/26/2004
| | | | |
Title:
|
STABILIZED CYCLOSILOXANES FOR USE AS CVD PRECURSORS FOR LOW-DIELECTRIC CONSTANT THIN FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
10652586
|
Filing Dt:
|
08/29/2003
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
Title:
|
MICROFLUIDIC DEVICE WITH ULTRAPHOBIC SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/07/2006
|
Application #:
|
10653430
|
Filing Dt:
|
09/02/2003
|
Publication #:
|
|
Pub Dt:
|
03/03/2005
| | | | |
Title:
|
REACTIVE GAS FILTER
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
10658035
|
Filing Dt:
|
09/09/2003
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
Title:
|
AUTO-SWITCHING SYSTEM FOR SWITCH-OVER OF GAS STORAGE AND DISPENSING VESSELS IN A MULTI-VESSEL ARRAY
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2009
|
Application #:
|
10660379
|
Filing Dt:
|
09/11/2003
|
Publication #:
|
|
Pub Dt:
|
03/17/2005
| | | | |
Title:
|
CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
03/27/2007
|
Application #:
|
10666797
|
Filing Dt:
|
09/19/2003
|
Publication #:
|
|
Pub Dt:
|
03/24/2005
| | | | |
Title:
|
POLISHING PAD WITH RECESSED WINDOW
|
|
|
Patent #:
|
|
Issue Dt:
|
10/31/2006
|
Application #:
|
10668489
|
Filing Dt:
|
09/23/2003
|
Publication #:
|
|
Pub Dt:
|
03/25/2004
| | | | |
Title:
|
MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2006
|
Application #:
|
10677706
|
Filing Dt:
|
10/02/2003
|
Publication #:
|
|
Pub Dt:
|
06/10/2004
| | | | |
Title:
|
MEMBRANE AND RETICLE-PELLICLE APPARATUS WITH PURGED PELLICLE-TO-RETICLE GAP USING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
08/25/2009
|
Application #:
|
10683501
|
Filing Dt:
|
10/10/2003
|
Publication #:
|
|
Pub Dt:
|
04/14/2005
| | | | |
Title:
|
MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS USING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2007
|
Application #:
|
10683903
|
Filing Dt:
|
10/10/2003
|
Publication #:
|
|
Pub Dt:
|
12/02/2004
| | | | |
Title:
|
METHOD FOR THE REMOVAL OF AIRBORNE MOLECULAR CONTAMINANTS USING OXYGEN GAS MIXTURES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/01/2005
|
Application #:
|
10684545
|
Filing Dt:
|
10/14/2003
|
Publication #:
|
|
Pub Dt:
|
04/14/2005
| | | | |
Title:
|
TANTALUM AMIDE COMPLEXES FOR DEPOSITING TANTALUM-CONTAINING FILMS, AND METHOD OF MAKING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
11/04/2008
|
Application #:
|
10699079
|
Filing Dt:
|
10/31/2003
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/07/2007
|
Application #:
|
10699863
|
Filing Dt:
|
11/03/2003
|
Publication #:
|
|
Pub Dt:
|
05/05/2005
| | | | |
Title:
|
FLUID STORAGE AND DISPENSING VESSELS HAVING COLORIMETRICALLY VERIFLABLE LEAK-TIGHTNESS, AND METHOD OF MAKING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2006
|
Application #:
|
10725218
|
Filing Dt:
|
12/01/2003
|
Publication #:
|
|
Pub Dt:
|
06/02/2005
| | | | |
Title:
|
MANUFACTURING SYSTEM WITH INTRINSICALLY SAFE ELECTRIC INFORMATION STORAGE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2007
|
Application #:
|
10731355
|
Filing Dt:
|
12/09/2003
|
Publication #:
|
|
Pub Dt:
|
06/17/2004
| | | | |
Title:
|
INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/2006
|
Application #:
|
10733218
|
Filing Dt:
|
12/11/2003
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
Title:
|
POROUS SINTERED COMPOSITE MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2007
|
Application #:
|
10743840
|
Filing Dt:
|
12/22/2003
|
Publication #:
|
|
Pub Dt:
|
06/23/2005
| | | | |
Title:
|
METHOD FOR CALIBRATING THE GEOMETRY OF A MULTI-AXIS METROLOGY SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2007
|
Application #:
|
10753138
|
Filing Dt:
|
01/07/2004
|
Publication #:
|
|
Pub Dt:
|
07/07/2005
| | | | |
Title:
|
CHEMICAL-MECHANICAL POLISHING OF METALS IN AN OXIDIZED FORM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2007
|
Application #:
|
10755154
|
Filing Dt:
|
01/09/2004
|
Publication #:
|
|
Pub Dt:
|
07/14/2005
| | | | |
Title:
|
POLISHING SYSTEM COMPRISING A HIGHLY BRANCHED POLYMER
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2005
|
Application #:
|
10767901
|
Filing Dt:
|
01/29/2004
|
Publication #:
|
|
Pub Dt:
|
09/23/2004
| | | | |
Title:
|
GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/2005
|
Application #:
|
10777300
|
Filing Dt:
|
02/12/2004
|
Publication #:
|
|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
SYSTEM AND METHOD FOR FLOW MONITORING AND CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
|
Application #:
|
10779009
|
Filing Dt:
|
02/13/2004
|
Publication #:
|
|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
SYSTEM FOR CONTROLLING FLUID FLOW
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2012
|
Application #:
|
10792038
|
Filing Dt:
|
03/03/2004
|
Publication #:
|
|
Pub Dt:
|
09/08/2005
| | | | |
Title:
|
COMPOSITION AND PROCESS FOR POST-ETCH REMOVAL OF PHOTORESIST AND/OR SACRIFICIAL ANTI-REFLECTIVE MATERIAL DEPOSITED ON A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2005
|
Application #:
|
10792183
|
Filing Dt:
|
03/03/2004
|
Publication #:
|
|
Pub Dt:
|
09/02/2004
| | | | |
Title:
|
MICROPOROUS POLISHING PADS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/2005
|
Application #:
|
10792344
|
Filing Dt:
|
03/03/2004
|
Publication #:
|
|
Pub Dt:
|
09/16/2004
| | | | |
Title:
|
MICROPOROUS POLISHING PADS
|
|